{"id":2771,"date":"2022-01-06T14:11:10","date_gmt":"2022-01-06T05:11:10","guid":{"rendered":"https:\/\/agus.co.jp\/en\/?p=2771"},"modified":"2022-11-25T10:46:11","modified_gmt":"2022-11-25T01:46:11","slug":"film-deposition-of-tin-using-sugas-desk-top-type-sputtering-system-ssp1000","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/en\/?p=2771","title":{"rendered":"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000"},"content":{"rendered":"<p><span style=\"font-weight: 400;\">TiN is commonly deposited for semiconductors as the barrier layer in between Oxide film layer (SiO2, etc.) and Cupper to prevent the integration.\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">For another application, TiN is often applied as hard coating aimed at extending the life of cutting tools.\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">It\u2019s known that TiN film has high hardness and excellent heat resistance which are sufficient to prevent baking and melting damage.<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-weight: 400;\">The performance of TiN film is highly appreciated not only for the cutting tools but also for the wear resistant engine parts and golf heads.\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Needless to say, tack force is very important for those applications in addition to the hardness and ware resistance and film deposition seems to be the only solution for such extreme demands.\u00a0<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-weight: 400;\">Sputtering with Ti target using only argon gas would create the silver-colored metallic titanium film, but when nitrogen gas is added to argon gas, golden shine colored very hard TiN film is formed.\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">\u00a0<\/span><\/p>\n<p><span style=\"font-weight: 400;\">This is the phenomenon which is caused by one of the reactive sputtering when the sputtered titanium is nitrided.<\/span><\/p>\n<p><span style=\"font-weight: 400;\">The residual stress inside the film changes as the nitrogen gas partial pressure ratio with respect to argon gas increases or decreases. The residual stress also increases and the hardness of the film tends to increase when the nitrogen partial pressure ratio is large,\u00a0<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-weight: 400;\">However, on the contrary, the film would peel off with a slight impact if the residual stress is large. So, it is important to cut and try in order to find the optimum condition for the film deposition that suit the purpose.<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><span style=\"font-weight: 400;\">Now, let us introduce an example of film deposition of TiN using the reactive sputtering method with our desktop sputtering system, SSP1000.<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-3209\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2020\/10\/PA150019-1.jpg\" alt=\"\u6210\u819c\u4e2d\u306eSSP1000\u306e\u69d8\u5b50\" width=\"486\" height=\"364\" \/><\/p>\n<p><span style=\"font-weight: 400;\">Desk top type sputtering system, SSP1000<\/span><\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-3205\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2020\/10\/PA150018-3.jpg\" alt=\"\" width=\"484\" height=\"363\" \/><\/p>\n<p><span style=\"font-weight: 400;\">Silicon wafer before the film deposition (Silver)<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-3206\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2020\/10\/PA150022.jpg\" alt=\"\u7a92\u5316\u30c1\u30bf\u30f3\u6210\u819c\u5f8c\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\" width=\"486\" height=\"365\" \/><\/p>\n<p><span style=\"font-weight: 400;\">Silicon wafer after TiN film deposition (turn into Gold)<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\" wp-image-3245\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2020\/10\/IMG_5247-scaled.jpg\" alt=\"\u7a92\u5316\u30c1\u30bf\u30f3\u3092\u6210\u819c\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\" width=\"484\" height=\"363\" \/><\/p>\n<p><span style=\"font-weight: 400;\">The masking tape has been peeled off.<\/span><\/p>\n<p><span style=\"font-weight: 400;\">It\u2019s easy to observe the color change.<\/span><\/p>\n<p><span style=\"font-weight: 400;\">The black dots observed on the surface are marking points for measurement of film thickness using a profilometer.<\/span><\/p>\n<p><span style=\"font-weight: 400;\">SSP1000, desktop sputtering system<\/span><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-2978\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2020\/06\/SSP1000-b.png\" alt=\"\" width=\"320\" height=\"370\" \/><\/p>\n<p><a href=\"https:\/\/agus.co.jp\/en\/?p=218\"><span style=\"font-weight: 400;\">Read More<\/span><\/a><\/p>\n<p><span style=\"font-weight: 400;\">Note: This report shows an example of film deposition using SSP1000. Quality such as color and hardness are not guaranteed.<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p>TiN is commonly deposited for semiconductors as the barrier layer in betwee[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":2775,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[50],"tags":[],"class_list":["post-2771","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-sputtering"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000 | SUGA Co., Ltd.<\/title>\n<meta name=\"description\" content=\"TiN is commonly deposited for semiconductors as the barrier layer in between\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/agus.co.jp\/en\/?p=2771\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000 | SUGA Co., Ltd.\" \/>\n<meta property=\"og:description\" content=\"TiN is commonly deposited for semiconductors as the barrier layer in between\" \/>\n<meta property=\"og:url\" content=\"https:\/\/agus.co.jp\/en\/?p=2771\" \/>\n<meta property=\"og:site_name\" content=\"SUGA Co., Ltd.\" \/>\n<meta property=\"article:published_time\" content=\"2022-01-06T05:11:10+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-11-25T01:46:11+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/01\/PA150022.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"640\" \/>\n\t<meta property=\"og:image:height\" content=\"480\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Element inc.\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u57f7\u7b46\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"Element inc.\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data2\" content=\"2\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771\"},\"author\":{\"name\":\"Element inc.\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/#\\\/schema\\\/person\\\/b9cc35eaceb8c21ecf2cf155179866ea\"},\"headline\":\"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000\",\"datePublished\":\"2022-01-06T05:11:10+00:00\",\"dateModified\":\"2022-11-25T01:46:11+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771\"},\"wordCount\":378,\"commentCount\":0,\"image\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/PA150022.jpg\",\"articleSection\":[\"Sputtering\"],\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771\",\"name\":\"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000 | SUGA Co., Ltd.\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/PA150022.jpg\",\"datePublished\":\"2022-01-06T05:11:10+00:00\",\"dateModified\":\"2022-11-25T01:46:11+00:00\",\"author\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/#\\\/schema\\\/person\\\/b9cc35eaceb8c21ecf2cf155179866ea\"},\"description\":\"TiN is commonly deposited for semiconductors as the barrier layer in between\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#primaryimage\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/PA150022.jpg\",\"contentUrl\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/PA150022.jpg\",\"width\":640,\"height\":480,\"caption\":\"OLYMPUS DIGITAL CAMERA\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?p=2771#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"TOP\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/en\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Topics\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?cat=44\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Vacuum Equipment\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?cat=48\"},{\"@type\":\"ListItem\",\"position\":4,\"name\":\"Sputtering\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?cat=50\"},{\"@type\":\"ListItem\",\"position\":5,\"name\":\"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/#website\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/\",\"name\":\"SUGA Co., Ltd.\",\"description\":\"Co-create the value with customers.\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ja\"},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/en\\\/#\\\/schema\\\/person\\\/b9cc35eaceb8c21ecf2cf155179866ea\",\"name\":\"Element inc.\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/a85fc9897ff2c1242fadc97ddbbff00c4642fb8336320eb221bbad8d24ffeaf8?s=96&d=mm&r=g\",\"url\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/a85fc9897ff2c1242fadc97ddbbff00c4642fb8336320eb221bbad8d24ffeaf8?s=96&d=mm&r=g\",\"contentUrl\":\"https:\\\/\\\/secure.gravatar.com\\\/avatar\\\/a85fc9897ff2c1242fadc97ddbbff00c4642fb8336320eb221bbad8d24ffeaf8?s=96&d=mm&r=g\",\"caption\":\"Element inc.\"},\"url\":\"https:\\\/\\\/agus.co.jp\\\/en\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000 | SUGA Co., Ltd.","description":"TiN is commonly deposited for semiconductors as the barrier layer in between","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/agus.co.jp\/en\/?p=2771","og_locale":"ja_JP","og_type":"article","og_title":"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000 | SUGA Co., Ltd.","og_description":"TiN is commonly deposited for semiconductors as the barrier layer in between","og_url":"https:\/\/agus.co.jp\/en\/?p=2771","og_site_name":"SUGA Co., Ltd.","article_published_time":"2022-01-06T05:11:10+00:00","article_modified_time":"2022-11-25T01:46:11+00:00","og_image":[{"width":640,"height":480,"url":"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/01\/PA150022.jpg","type":"image\/jpeg"}],"author":"Element inc.","twitter_card":"summary_large_image","twitter_misc":{"\u57f7\u7b46\u8005":"Element inc.","\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"2\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/agus.co.jp\/en\/?p=2771#article","isPartOf":{"@id":"https:\/\/agus.co.jp\/en\/?p=2771"},"author":{"name":"Element inc.","@id":"https:\/\/agus.co.jp\/en\/#\/schema\/person\/b9cc35eaceb8c21ecf2cf155179866ea"},"headline":"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000","datePublished":"2022-01-06T05:11:10+00:00","dateModified":"2022-11-25T01:46:11+00:00","mainEntityOfPage":{"@id":"https:\/\/agus.co.jp\/en\/?p=2771"},"wordCount":378,"commentCount":0,"image":{"@id":"https:\/\/agus.co.jp\/en\/?p=2771#primaryimage"},"thumbnailUrl":"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/01\/PA150022.jpg","articleSection":["Sputtering"],"inLanguage":"ja","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/agus.co.jp\/en\/?p=2771#respond"]}]},{"@type":"WebPage","@id":"https:\/\/agus.co.jp\/en\/?p=2771","url":"https:\/\/agus.co.jp\/en\/?p=2771","name":"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000 | SUGA Co., Ltd.","isPartOf":{"@id":"https:\/\/agus.co.jp\/en\/#website"},"primaryImageOfPage":{"@id":"https:\/\/agus.co.jp\/en\/?p=2771#primaryimage"},"image":{"@id":"https:\/\/agus.co.jp\/en\/?p=2771#primaryimage"},"thumbnailUrl":"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/01\/PA150022.jpg","datePublished":"2022-01-06T05:11:10+00:00","dateModified":"2022-11-25T01:46:11+00:00","author":{"@id":"https:\/\/agus.co.jp\/en\/#\/schema\/person\/b9cc35eaceb8c21ecf2cf155179866ea"},"description":"TiN is commonly deposited for semiconductors as the barrier layer in between","breadcrumb":{"@id":"https:\/\/agus.co.jp\/en\/?p=2771#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/agus.co.jp\/en\/?p=2771"]}]},{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/agus.co.jp\/en\/?p=2771#primaryimage","url":"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/01\/PA150022.jpg","contentUrl":"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/01\/PA150022.jpg","width":640,"height":480,"caption":"OLYMPUS DIGITAL CAMERA"},{"@type":"BreadcrumbList","@id":"https:\/\/agus.co.jp\/en\/?p=2771#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"TOP","item":"https:\/\/agus.co.jp\/en"},{"@type":"ListItem","position":2,"name":"Topics","item":"https:\/\/agus.co.jp\/en\/?cat=44"},{"@type":"ListItem","position":3,"name":"Vacuum Equipment","item":"https:\/\/agus.co.jp\/en\/?cat=48"},{"@type":"ListItem","position":4,"name":"Sputtering","item":"https:\/\/agus.co.jp\/en\/?cat=50"},{"@type":"ListItem","position":5,"name":"Film deposition of TiN using SUGA\u2019s desk-top type sputtering system, SSP1000"}]},{"@type":"WebSite","@id":"https:\/\/agus.co.jp\/en\/#website","url":"https:\/\/agus.co.jp\/en\/","name":"SUGA Co., Ltd.","description":"Co-create the value with customers.","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/agus.co.jp\/en\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ja"},{"@type":"Person","@id":"https:\/\/agus.co.jp\/en\/#\/schema\/person\/b9cc35eaceb8c21ecf2cf155179866ea","name":"Element inc.","image":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/secure.gravatar.com\/avatar\/a85fc9897ff2c1242fadc97ddbbff00c4642fb8336320eb221bbad8d24ffeaf8?s=96&d=mm&r=g","url":"https:\/\/secure.gravatar.com\/avatar\/a85fc9897ff2c1242fadc97ddbbff00c4642fb8336320eb221bbad8d24ffeaf8?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/a85fc9897ff2c1242fadc97ddbbff00c4642fb8336320eb221bbad8d24ffeaf8?s=96&d=mm&r=g","caption":"Element inc."},"url":"https:\/\/agus.co.jp\/en"}]}},"_links":{"self":[{"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/posts\/2771","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2771"}],"version-history":[{"count":3,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/posts\/2771\/revisions"}],"predecessor-version":[{"id":2776,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/posts\/2771\/revisions\/2776"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=\/wp\/v2\/media\/2775"}],"wp:attachment":[{"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2771"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=2771"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/agus.co.jp\/en\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=2771"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}