{"id":2975,"date":"2022-09-16T13:13:55","date_gmt":"2022-09-16T04:13:55","guid":{"rendered":"https:\/\/agus.co.jp\/en\/?p=2975"},"modified":"2023-04-28T12:24:02","modified_gmt":"2023-04-28T03:24:02","slug":"test-example-of-deposition-al2o3-deposition-on-%cf%8645um-ni-powder-using-sal1000b-desk-top-type-ald-system","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/en\/?p=2975","title":{"rendered":"Test example of deposition (Al2O3 deposition on \u03c645\u03bcm Ni powder using SAL1000B, desk-top type ALD system)"},"content":{"rendered":"\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"320\" height=\"370\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/SAL1000B-b.png\" alt=\"Test example of deposition (Al2O3 deposition on \u03c645\u03bcm Ni powder using SAL1000B, desk-top type ALD system)\" class=\"wp-image-3017\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/SAL1000B-b.png 320w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/SAL1000B-b-259x300.png 259w\" sizes=\"auto, (max-width: 320px) 100vw, 320px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">Test example of deposition&nbsp;<\/h2>\n\n\n\n<p>We introduce the result of Al2O3 deposition on \u03c645\u03bcm Ni powder using SAL1000B, desk-top type ALD system for deposition on powder.<\/p>\n\n\n\n<p>The recipes for the deposition test were set as follows.&nbsp;&nbsp;<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Equipment: SAL1000B<\/li><li>Substrate rotation\uff1aOn<\/li><li>Vibration: On<\/li><li>A device angle: About 8 degrees<\/li><li>Substrate temperature: 350\u2103<\/li><li>Sample size: \u03c645\u03bcm Ni powder<\/li><li>H2O open time: 15 msec<\/li><li>Wait time after H2O: 15 sec<\/li><li>TMA open time: 15 msec<\/li><li>Wait time after TMA: 5 sec<\/li><li>Number of repetitions: 1500 cycles<\/li><\/ul>\n\n\n\n<p><\/p>\n\n\n\n<p>The number of repetitions is 1500 cycles, so we consider that about 165 nm of Al2O3 has been deposited.<\/p>\n\n\n\n<p>Normal<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_1.jpg\" alt=\"\" class=\"wp-image-3361\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_1.jpg 1024w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_1-300x225.jpg 300w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_1-768x576.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"819\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_2.jpg\" alt=\"\" class=\"wp-image-3362\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_2.jpg 1024w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_2-300x240.jpg 300w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_2-768x614.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"819\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_3.jpg\" alt=\"\" class=\"wp-image-3363\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_3.jpg 1024w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_3-300x240.jpg 300w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2023\/04\/Al2O3_3-768x614.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>AGUS offers a <a href=\"https:\/\/agus.co.jp\/en\/?p=770\">test deposition service<\/a>.<\/p>\n\n\n\n<p>If you are interested in what kind of deposition can be achieved with the <a href=\"https:\/\/agus.co.jp\/en\/?p=287\">SAL1000B<\/a>, please feel free to contact AGUS<\/p>\n\n\n\n<p><a href=\"https:\/\/agus.co.jp\/en\/?page_id=95\">For inquiries about our products and services, Click here.<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Test example of deposition&nbsp; We introduce the result of Al2O3 depositio[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":2977,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[56],"tags":[],"class_list":["post-2975","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-deposition-test"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Test example of deposition (Al2O3 deposition on \u03c645\u03bcm Ni powder using SAL1000B, desk-top type ALD system) | SUGA Co., Ltd.<\/title>\n<meta name=\"description\" content=\"Test example of deposition&nbsp; We introduce the result of Al2O3 deposition\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/agus.co.jp\/en\/?p=2975\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Test example of deposition (Al2O3 deposition on \u03c645\u03bcm Ni powder using SAL1000B, desk-top type ALD system) | SUGA Co., Ltd.\" \/>\n<meta property=\"og:description\" content=\"Test example of deposition&nbsp; 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