{"id":2997,"date":"2022-10-07T08:08:00","date_gmt":"2022-10-06T23:08:00","guid":{"rendered":"https:\/\/agus.co.jp\/en\/?p=2997"},"modified":"2022-11-25T10:34:45","modified_gmt":"2022-11-25T01:34:45","slug":"test-example-of-deposition-the-experiment-to-see-if-sputter-deposition-can-be-done-without-tmp-turbo-molecular-pump-and-only-with-rp-rotary-pump-on-ssp100-cubic-equipment","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/en\/?p=2997","title":{"rendered":"Test example of deposition ~The experiment to see if sputter deposition can be done without TMP (turbo molecular pump) and only with RP (rotary pump) on SSP100 cubic equipment~"},"content":{"rendered":"\n
\"SSP1000\u30ad\u30e5\u30fc\u30d3\u30c3\u30af\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3067TMP(\u30bf\u30fc\u30dc\u5206\u5b50\u30dd\u30f3\u30d7)\u7121\u3057\u3001RP(\u30ed\u30fc\u30bf\u30ea\u30fc\u30dd\u30f3\u30d7)\u306e\u307f\u3067\u30b9\u30d1\u30c3\u30bf\u6210\u819c\u3067\u304d\u308b\u304b\u5b9f\u9a13\u3057\u3066\u307f\u305f\uff5e\"\/<\/figure>\n\n\n\n
<\/div>\n\n\n\n

Test example of deposition <\/h2>\n\n\n\n

We have experimented with the SSP1000 cubic sputtering system to see if it is possible to sputter deposition without a TMP (turbo molecular pump) and only with an RP (rotary pump).<\/p>\n\n\n\n

This blog shows the results of this experiment.<\/p>\n\n\n\n

Just to briefly conclude, although sputter deposition can be carried out without a TMP (turbo molecular pump) and only with an RP (rotary pump), the high pressure before deposition doesn\u2019t exclude impurity gases, which raises concerns about the quality of the film.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

For applications where membrane quality is not so important, it could be used without a TMP (turbo molecular pump).<\/p>\n\n\n\n

Thus, Suga can perform experimental deposition for you with its in-house SSP1000 cubic sputtering equipment<\/a>.
Please feel free to contact us if you are interested in what kind of film deposition can be achieved with our SSP1000 Cubic Sputtering Equipment<\/a>.<\/p>\n","protected":false},"excerpt":{"rendered":"

Test example of deposition  We have experimented with the SSP1000 cubi[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":3000,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[56],"tags":[],"class_list":["post-2997","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-deposition-test"],"acf":[],"yoast_head":"\nTest example of deposition ~The experiment to see if sputter deposition can be done without TMP (turbo molecular pump) and only with RP (rotary pump) on SSP100 cubic equipment~ | SUGA Co., Ltd.<\/title>\n<meta name=\"description\" content=\"Test example of deposition  We have experimented with the SSP1000 cubic\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" 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