{"id":3012,"date":"2022-10-19T12:49:56","date_gmt":"2022-10-19T03:49:56","guid":{"rendered":"https:\/\/agus.co.jp\/en\/?p=3012"},"modified":"2022-11-25T10:33:42","modified_gmt":"2022-11-25T01:33:42","slug":"test-example-of-deposition-al2o3-deposition-on-%cf%86100um-ti-beads-using-sal1000b-desk-top-type-ald-system","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/en\/?p=3012","title":{"rendered":"Test example of deposition (Al2O3 deposition on \u03c6300\u03bcm Ti beads using SAL1000B, desk-top type ALD system)"},"content":{"rendered":"\n<div class=\"wp-block-image\"><figure class=\"aligncenter\"><img loading=\"lazy\" decoding=\"async\" width=\"320\" height=\"370\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/SAL1000B-b.png\" alt=\"\" class=\"wp-image-3017\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/SAL1000B-b.png 320w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/SAL1000B-b-259x300.png 259w\" sizes=\"auto, (max-width: 320px) 100vw, 320px\" \/><\/figure><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Test example of deposition<\/h2>\n\n\n\n<p>We would like to share with you the result of Al2O3 deposition on \u03c6300\u03bcm Ti beads using SAL1000B, desk-top type ALD system for deposition on powder.<\/p>\n\n\n\n<p>The recipes for the deposition test were prepared as follows.<\/p>\n\n\n\n<ul class=\"wp-block-list\"><li>Equipment: SAL1000B<\/li><li>Substrate rotation\uff1aOn<\/li><li>Vibration: On<\/li><li>A device angle: About 8 degrees<\/li><li>Substrate temperature: 350\u2103<\/li><li>Sample size: \u03c6300\u03bcm Ti beads<\/li><li>H2O open time: 15 msec<\/li><li>Wait time after H2O: 15 sec<\/li><li>Wait time after TMA: 15 sec<\/li><li>Wait time after TMA: 10 sec<\/li><li>Number of repetitions: 1500 cycles<\/li><\/ul>\n\n\n\n<div class=\"wp-block-spacer\" style=\"height: 20px;\" aria-hidden=\"true\">\u00a0<\/div>\n\n\n\n<p>Before film formation<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"819\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1024x819-1.jpg\" alt=\"\" class=\"wp-image-3022\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1024x819-1.jpg 1024w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1024x819-1-300x240.jpg 300w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1024x819-1-768x614.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-spacer\" style=\"height: 20px;\" aria-hidden=\"true\">\u00a0<\/div>\n\n\n\n<p>After film formation<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"819\" src=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1-1024x819-1.jpg\" alt=\"After film formation\" class=\"wp-image-3023\" srcset=\"https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1-1024x819-1.jpg 1024w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1-1024x819-1-300x240.jpg 300w, https:\/\/agus.co.jp\/en\/wp-content\/uploads\/2022\/10\/image-1-1024x819-1-768x614.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<div class=\"wp-block-spacer\" style=\"height: 20px;\" aria-hidden=\"true\">\u00a0<\/div>\n\n\n\n<p>In this video, the stirring conditions before deposition on \u03c6300\u03bcm Ti beads with SAL1000B can be seen.<\/p>\n\n\n\n<figure><iframe loading=\"lazy\" title=\"YouTube video player\" src=\"https:\/\/www.youtube.com\/embed\/x_Z22MvYe7c\" width=\"560\" height=\"315\" frameborder=\"0\" allowfullscreen=\"allowfullscreen\"><\/iframe><\/figure>\n\n\n\n<div class=\"wp-block-spacer\" style=\"height: 20px;\" aria-hidden=\"true\">\u00a0<\/div>\n\n\n\n<p><a href=\"https:\/\/agus.co.jp\/en\/?p=770\">Deposition test<\/a> will be available as well.<\/p>\n\n\n\n<p>For further information on the kinds of deposition, please feel free to <a href=\"https:\/\/agus.co.jp\/en\/?page_id=95\">contact us<\/a>.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Test example of deposition We would like to share with you the result of Al[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":3017,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[56],"tags":[],"class_list":["post-3012","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-deposition-test"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Test example of deposition (Al2O3 deposition on \u03c6300\u03bcm Ti beads using SAL1000B, desk-top type ALD system) | SUGA Co., Ltd.<\/title>\n<meta name=\"description\" content=\"Test example of deposition We would like to share with you the result of Al2O3\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/agus.co.jp\/en\/?p=3012\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Test example of deposition (Al2O3 deposition on \u03c6300\u03bcm Ti beads using SAL1000B, desk-top type ALD system) | SUGA Co., Ltd.\" \/>\n<meta property=\"og:description\" content=\"Test example of deposition We would like to share with you the result of Al2O3\" \/>\n<meta property=\"og:url\" content=\"https:\/\/agus.co.jp\/en\/?p=3012\" \/>\n<meta property=\"og:site_name\" content=\"SUGA Co., Ltd.\" \/>\n<meta property=\"article:published_time\" content=\"2022-10-19T03:49:56+00:00\" \/>\n<meta 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