{"id":3533,"date":"2023-08-28T12:50:00","date_gmt":"2023-08-28T03:50:00","guid":{"rendered":"https:\/\/agus.co.jp\/en\/?p=3533"},"modified":"2024-07-09T10:51:21","modified_gmt":"2024-07-09T01:51:21","slug":"what-is-the-ts-distance","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/en\/?p=3533","title":{"rendered":"What is the TS distance?"},"content":{"rendered":"\r\n

What is the TS distance?<\/h2>\r\n\r\n\r\n\r\n
\"What<\/figure>\r\n\r\n\r\n\r\n

In sputtering deposition, the term “TS distance” is often heard, but what is the TS distance in the first place?<\/p>\r\n\r\n\r\n\r\n

TS distance is an abbreviation for Target-Substrate Distance, and refers to the distance between the target of the material to deposit and the substrate to be deposited.<\/p>\r\n\r\n\r\n\r\n

Varying this TS distance changes the deposition speed and film quality (adhesion strength, crystal orientation, composition, reflectance, surface roughness, etc.)<\/p>\r\n\r\n\r\n\r\n

A short TS distance (i.e. close to the substrate and target) results in faster deposition speeds and thicker films in a shorter time, but the substrate damage from heat and UV radiation can be also greater due to the short distance between the plasma and substrate.<\/p>\r\n\r\n\r\n\r\n

Conversely, a longer TS distance (i.e. the substrate and target are further away) reduces the effects of heat and UV radiation, but slows down the deposition rate.<\/p>\r\n\r\n\r\n\r\n

During deposition, it is necessary to understand this trade-off relationship in order to find the optimum deposition conditions.<\/p>\r\n\r\n\r\n\r\n

Hearing all this, you may be thinking, “That sounds like a lot of work” or “Maybe I should not get involved in sputtering deposition”.<\/p>\r\n\r\n\r\n\r\n

However, since sputter deposition utilizes physical laws such as electro-magnetism, once the optimal deposition conditions are found, the deposition can be reproduced many times under the same conditions.<\/p>\r\n\r\n\r\n\r\n

We also offer a test deposition service.<\/a><\/p>\r\n\r\n\r\n\r\n

Why not start by trying sputtering deposition with the entry-level SSP1000 Cubic Sputtering Equipment<\/a>?<\/p>\r\n\r\n\r\n","protected":false},"excerpt":{"rendered":"

What is the TS distance? In sputtering deposition, the term “TS dista[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":4074,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[58],"tags":[],"class_list":["post-3533","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technology"],"acf":[],"yoast_head":"\nWhat is the TS distance? | SUGA Co., Ltd.<\/title>\n<meta name=\"description\" content=\"What is the TS distance? 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