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style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u300c\u5747\u4e00\u300d\u306b\u306f2\u3064\u306e\u610f\u5473\u304c\u3042\u308b \u2014 \u9762\u5185\u5747\u4e00\u6027\u3068\u6bb5\u5dee\u88ab\u8986\u6027<\/h3>\n\n\n\n<p>\u8b70\u8ad6\u3092\u9032\u3081\u308b\u524d\u306b\u3001\u7528\u8a9e\u3092\u6574\u7406\u3057\u3066\u304a\u304d\u307e\u3059\u3002\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u304a\u3051\u308b\u300c\u5747\u4e00\u300d\u306b\u306f\u3001\u6df7\u540c\u3055\u308c\u3084\u3059\u30442\u3064\u306e\u610f\u5473\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3072\u3068\u3064\u306f\u9762\u5185\u5747\u4e00\u6027\u3002\u57fa\u677f\u306e\u5e83\u304c\u308a\u306e\u4e2d\u3067\u3001\u5834\u6240\u306b\u3088\u308b\u819c\u539a\u5dee\u304c\u3069\u308c\u3060\u3051\u5c0f\u3055\u3044\u304b\u3092\u6307\u3057\u307e\u3059\u3002\u30a6\u30a8\u30cf\u30fc\u9762\u5185\u306e\u819c\u539a\u5206\u5e03\u306a\u3069\u304c\u3053\u308c\u306b\u3042\u305f\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3082\u3046\u3072\u3068\u3064\u304c\u6bb5\u5dee\u88ab\u8986\u6027\u3001\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6027\u3067\u3059\u3002\u51f9\u51f8\u306e\u3042\u308b\u69cb\u9020\u306b\u5bfe\u3057\u3066\u3001\u5e73\u5766\u90e8\u3068\u51f9\u90e8\u306e\u5e95\u3001\u5074\u58c1\u3068\u3067\u819c\u539a\u304c\u3069\u308c\u3060\u3051\u63c3\u3063\u3066\u3044\u308b\u304b\u3092\u6307\u3057\u307e\u3059\u3002\u300c\u8907\u96d1\u306a\u5f62\u72b6\u306b\u5747\u4e00\u306b\u300d\u3068\u3044\u3046\u8981\u6c42\u306f\u3001\u6b63\u78ba\u306b\u306f\u3053\u3061\u3089\u306e\u8a71\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u9762\u5185\u5747\u4e00\u6027\u304c\u826f\u304f\u3066\u3082\u6bb5\u5dee\u88ab\u8986\u6027\u304c\u60aa\u3044\u624b\u6cd5\u306f\u3044\u304f\u3089\u3067\u3082\u3042\u308a\u307e\u3059\u3002\u9006\u3082\u7136\u308a\u3067\u3059\u3002\u4ed5\u69d8\u3092\u6c7a\u3081\u308b\u3068\u304d\u306f\u3001\u3069\u3061\u3089\u3092\u6c42\u3081\u3066\u3044\u308b\u306e\u304b\u3092\u660e\u78ba\u306b\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p>\u2192 \u9762\u5185\u5206\u5e03\u306b\u3064\u3044\u3066\u306f<a href=\"https:\/\/agus.co.jp\/?p=8413\">ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\uff09\u306e\u300c\u9762\u5185\u5206\u5e03\u300d\u5fb9\u5e95\u89e3\u8aac\uff1a\u539f\u7406\u30fb\u91cd\u8981\u6027\u30fb\u8ab2\u984c<\/a>\u3067\u6398\u308a\u4e0b\u3052\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u8907\u96d1\u5f62\u72b6\u3067\u3082\u5747\u4e00\u306b\u88ab\u8986\u3067\u304d\u308b\u4e3b\u8981\u306a\u5de5\u6cd5<\/h2>\n\n\n\n<p>\u3053\u3053\u304b\u3089\u306f\u3001\u8907\u96d1\u5f62\u72b6\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u4ee3\u8868\u7684\u306a4\u3064\u306e\u624b\u6cd5\u3092\u3001\u539f\u7406\u306e\u9055\u3044\u306b\u6ce8\u76ee\u3057\u3066\u6574\u7406\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u2014 nm\u30aa\u30fc\u30c0\u30fc\u3067\u5f62\u72b6\u306b\u307b\u307c\u4f9d\u5b58\u3057\u306a\u3044<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"625\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6.png\" alt=\"ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u2014 nm\u30aa\u30fc\u30c0\u30fc\u3067\u5f62\u72b6\u306b\u307b\u307c\u4f9d\u5b58\u3057\u306a\u3044\" class=\"wp-image-10056\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6.png 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6-300x183.png 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6-768x469.png 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>ALD\u306f\u30012\u7a2e\u985e\u4ee5\u4e0a\u306e\u53cd\u5fdc\u7269\uff08\u524d\u99c6\u4f53\uff09\u3092\u540c\u6642\u3067\u306f\u306a\u304f\u4ea4\u4e92\u306b\u4f9b\u7d66\u3059\u308b\u6c17\u76f8\u6210\u819c\u6cd5\u3067\u3059\u3002\u305d\u308c\u305e\u308c\u306e\u53cd\u5fdc\u304c\u8868\u9762\u3067\u81ea\u5df1\u5236\u9650\u7684\u306b\u9032\u884c\u3057\u3001\u8868\u9762\u306e\u53cd\u5fdc\u30b5\u30a4\u30c8\u3092\u4f7f\u3044\u5207\u3063\u305f\u6642\u70b9\u3067\u6b62\u307e\u308a\u307e\u3059\u3002\u305d\u306e\u305f\u30811\u30b5\u30a4\u30af\u30eb\u3042\u305f\u308a\u306e\u6210\u9577\u91cf\u304c\u6c7a\u307e\u3063\u3066\u304a\u308a\u3001\u819c\u539a\u306f\u30b5\u30a4\u30af\u30eb\u6570\u3067\u5236\u5fa1\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5f93\u6765\u306eCVD\u3084PVD\u3068\u6bd4\u3079\u305f\u3068\u304d\u306e\u7279\u5fb4\u306f\u3001\u30d4\u30f3\u30db\u30fc\u30eb\u306e\u306a\u3044\u9ad8\u3044\u30d0\u30ea\u30a2\u6027\u3001\u826f\u597d\u306a\u30b9\u30c6\u30c3\u30d7\u30ab\u30d0\u30ec\u30c3\u30b8\u3001\u819c\u539a\u5236\u5fa1\u6027\u306e\u9ad8\u3055\u3001\u305d\u3057\u3066\u819c\u539a\u5206\u5e03\u306e\u826f\u3055\u3067\u3059\u30022007\u5e74\u306bIntel\u304c45nm\u4e16\u4ee3CPU\u306eHigh-k\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u5de5\u7a0b\u306b\u63a1\u7528\u3057\u3066\u4ee5\u964d\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u30e9\u30a4\u30f3\u3067\u6025\u901f\u306b\u666e\u53ca\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u2192 \u57fa\u672c\u539f\u7406\u306f<a href=\"https:\/\/agus.co.jp\/?p=8307\">ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u3068\u306f\uff1f\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u5f79\u5272\u30fb\u88c5\u7f6e\u3082\u7d39\u4ecb<\/a>\u3067\u8a73\u3057\u304f\u89e3\u8aac\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u306a\u300cALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\uff09\u300d\u6280\u8853\u306b\u3064\u3044\u3066\u89e3\u8aac\uff01\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/DF2UJaoDm8U?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">CVD\uff08\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff09\u2014 \u901f\u3044\u304c\u3001\u6761\u4ef6\u6b21\u7b2c\u3067\u88ab\u8986\u6027\u304c\u843d\u3061\u308b<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6.jpeg\" alt=\"CVD\uff08\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff09\u2014 \u901f\u3044\u304c\u3001\u6761\u4ef6\u6b21\u7b2c\u3067\u88ab\u8986\u6027\u304c\u843d\u3061\u308b\" class=\"wp-image-10055\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6.jpeg 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6-300x225.jpeg 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image-6-768x576.jpeg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>CVD\u306f\u539f\u6599\u30ac\u30b9\u3092\u53cd\u5fdc\u3055\u305b\u3066\u819c\u3092\u5806\u7a4d\u3055\u305b\u308b\u624b\u6cd5\u3067\u3001ALD\u3088\u308a\u6210\u819c\u901f\u5ea6\u304c\u901f\u3044\u3053\u3068\u304c\u5927\u304d\u306a\u5229\u70b9\u3067\u3059\u3002\u6bb5\u5dee\u88ab\u8986\u6027\u3082\u3001\u4e00\u822c\u306b\u901a\u5e38\u306e\u30e9\u30a4\u30f3\u30fb\u30aa\u30d6\u30fb\u30b5\u30a4\u30c8\u578bPVD\u3068\u6bd4\u3079\u308c\u3070\u512a\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305f\u3060\u3057ALD\u306e\u3088\u3046\u306b\u300c\u5f62\u72b6\u306b\u4f9d\u5b58\u3057\u306a\u3044\u300d\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002CVD\u3067\u306f\u539f\u6599\u306e\u4f9b\u7d66\u3068\u8868\u9762\u53cd\u5fdc\u304c\u540c\u6642\u306b\u9032\u3080\u305f\u3081\u3001\u4f9b\u7d66\u91cf\u304c\u819c\u539a\u306b\u53cd\u6620\u3055\u308c\u307e\u3059\u3002\u69cb\u9020\u306e\u5965\u307b\u3069\u539f\u6599\u304c\u5c4a\u304d\u306b\u304f\u304f\u306a\u308c\u3070\u3001\u305d\u306e\u3076\u3093\u819c\u304c\u8584\u304f\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3064\u307e\u308aCVD\u306e\u88ab\u8986\u6027\u306f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3067\u4f5c\u308a\u8fbc\u3080\u3082\u306e\u3067\u3042\u308a\u3001ALD\u306e\u3088\u3046\u306b\u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u306b\u3088\u3063\u3066\u4fdd\u8a3c\u3055\u308c\u308b\u3082\u306e\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u96fb\u7740\u5857\u88c5 \u2014 \u96fb\u6d41\u5206\u5e03\u306e\u81ea\u5df1\u5236\u5fa1\u3067\u51f9\u90e8\u306b\u56de\u308a\u8fbc\u3080<\/h3>\n\n\n\n<p>CVD\u306f\u539f\u6599\u30ac\u30b9\u3092\u53cd\u5fdc\u3055\u305b\u3066\u819c\u3092\u5806\u7a4d\u3055\u305b\u308b\u624b\u6cd5\u3067\u3001ALD\u3088\u308a\u6210\u819c\u901f\u5ea6\u304c\u901f\u3044\u3053\u3068\u304c\u5927\u304d\u306a\u5229\u70b9\u3067\u3059\u3002\u6bb5\u5dee\u88ab\u8986\u6027\u3082\u3001\u4e00\u822c\u306b\u901a\u5e38\u306e\u30e9\u30a4\u30f3\u30fb\u30aa\u30d6\u30fb\u30b5\u30a4\u30c8\u578bPVD\u3068\u6bd4\u3079\u308c\u3070\u512a\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305f\u3060\u3057ALD\u306e\u3088\u3046\u306b\u300c\u5f62\u72b6\u306b\u4f9d\u5b58\u3057\u306a\u3044\u300d\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002CVD\u3067\u306f\u539f\u6599\u306e\u4f9b\u7d66\u3068\u8868\u9762\u53cd\u5fdc\u304c\u540c\u6642\u306b\u9032\u3080\u305f\u3081\u3001\u4f9b\u7d66\u91cf\u304c\u819c\u539a\u306b\u53cd\u6620\u3055\u308c\u307e\u3059\u3002\u69cb\u9020\u306e\u5965\u307b\u3069\u539f\u6599\u304c\u5c4a\u304d\u306b\u304f\u304f\u306a\u308c\u3070\u3001\u305d\u306e\u3076\u3093\u819c\u304c\u8584\u304f\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3064\u307e\u308aCVD\u306e\u88ab\u8986\u6027\u306f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3067\u4f5c\u308a\u8fbc\u3080\u3082\u306e\u3067\u3042\u308a\u3001ALD\u306e\u3088\u3046\u306b\u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u306b\u3088\u3063\u3066\u4fdd\u8a3c\u3055\u308c\u308b\u3082\u306e\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u7121\u96fb\u89e3\u30cb\u30c3\u30b1\u30eb\u3081\u3063\u304d \u2014 \u96fb\u6d41\u3092\u4f7f\u308f\u306a\u3044\u305f\u3081\u539a\u307f\u30e0\u30e9\u304c\u751f\u3058\u306b\u304f\u3044<\/h3>\n\n\n\n<p>\u7121\u96fb\u89e3\u30cb\u30c3\u30b1\u30eb-\u308a\u3093\u3081\u3063\u304d\u306f\u3001\u5916\u90e8\u96fb\u6e90\u3092\u4f7f\u308f\u305a\u3001\u5316\u5b66\u7684\u306a\u9084\u5143\u53cd\u5fdc\u3067\u91d1\u5c5e\u76ae\u819c\u3092\u6790\u51fa\u3055\u305b\u307e\u3059\u3002\u96fb\u6d41\u3092\u6d41\u3055\u306a\u3044\u305f\u3081\u3001\u96fb\u6d41\u96c6\u4e2d\u306b\u8d77\u56e0\u3059\u308b\u539a\u307f\u30e0\u30e9\u304c\u751f\u3058\u306b\u304f\u304f\u306a\u308a\u307e\u3059\u3002\u3081\u3063\u304d\u6db2\u304c\u884c\u304d\u6e21\u308b\u7b87\u6240\u3067\u3042\u308c\u3070\u3001\u30d1\u30a4\u30d7\u306e\u5185\u9762\u3084\u7d30\u304b\u3044\u30cd\u30b8\u90e8\u306b\u3082\u307b\u307c\u5747\u4e00\u306b\u4ed8\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u819c\u539a\u306b\u3064\u3044\u3066\u306f\u65e5\u672c\u7523\u696d\u898f\u683c\u306b\u898f\u5b9a\u304c\u3042\u308a\u3001JIS H 8645\u3067\u306f\u6700\u5c0f\u539a\u3055\u306b\u3088\u3063\u30661\u7d1a\u304b\u30897\u7d1a\u307e\u3067\u306e7\u7b49\u7d1a\u304c\u5b9a\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u30021\u7d1a\u304c\u6700\u5c0f\u539a\u30553\u00b5m\u3001\u4ee5\u4e0b5\u00b5m\u300110\u00b5m\u300115\u00b5m\u300120\u00b5m\u300130\u00b5m\u30017\u7d1a\u304c50\u00b5m\u3067\u3059\u3002\u540c\u898f\u683c\u306e\u9069\u7528\u5bfe\u8c61\u306f\u3001\u9244\u3001\u9285\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u304a\u3088\u3073\u305d\u308c\u3089\u306e\u5408\u91d1\u306e\u7d20\u5730\u4e0a\u306b\u3001\u9632\u98df\u6027\u3084\u8010\u6469\u8017\u6027\u3092\u76ee\u7684\u3068\u3057\u3066\u65bd\u3057\u305f\u3082\u306e\u3068\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u306a\u304a\u3001\u3053\u308c\u306f\u3042\u304f\u307e\u3067\u898f\u683c\u306e\u9069\u7528\u7bc4\u56f2\u3067\u3042\u308a\u3001\u6280\u8853\u7684\u306b\u3081\u3063\u304d\u304c\u53ef\u80fd\u306a\u7d20\u6750\u306e\u7bc4\u56f2\u3068\u306f\u5225\u3067\u3059\u3002\u6a39\u8102\u306a\u3069\u3078\u306e\u9069\u7528\u306f\u524d\u51e6\u7406\u3092\u542b\u3081\u305f\u5225\u306e\u691c\u8a0e\u304c\u5fc5\u8981\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">4\u5de5\u6cd5\u306e\u6bd4\u8f03<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th><\/th><th><strong>ALD<\/strong><\/th><th><strong>CVD<\/strong><\/th><th><strong>\u96fb\u7740\u5857\u88c5<\/strong><\/th><th><strong>\u7121\u96fb\u89e3Ni\u3081\u3063\u304d<\/strong><\/th><\/tr><\/thead><tbody><tr><td>\u5178\u578b\u7684\u306a\u819c\u539a<\/td><td>\u6570nm\u301c\u6570\u767enm<\/td><td>\u6570\u5341nm\u301c\u6570\u00b5m<\/td><td>\u6570\u00b5m\u301c\u6570\u5341\u00b5m<\/td><td>3\u301c50\u00b5m\uff08JIS\u7b49\u7d1a\uff09<\/td><\/tr><tr><td>\u6bb5\u5dee\u88ab\u8986\u6027<\/td><td>\u6975\u3081\u3066\u9ad8\u3044\uff08\u66dd\u9732\u91cf\u6b21\u7b2c\uff09<\/td><td>\u9ad8\u3044\uff08\u6761\u4ef6\u4f9d\u5b58\uff09<\/td><td>\u9ad8\u3044\uff08\u5c0e\u96fb\u4f53\u306b\u9650\u308b\uff09<\/td><td>\u9ad8\u3044\uff08\u6db2\u304c\u5c4a\u304f\u7bc4\u56f2\uff09<\/td><\/tr><tr><td>\u7c89\u4f53\u30fb\u591a\u5b54\u8cea<\/td><td>\u5bfe\u5fdc\u53ef\uff08\u64b9\u62cc\u6a5f\u69cb\u304c\u5fc5\u8981\uff09<\/td><td>\u6761\u4ef6\u306b\u3088\u308a\u53ef<\/td><td>\u56f0\u96e3<\/td><td>\u5bfe\u5fdc\u53ef<\/td><\/tr><tr><td>\u5bfe\u5fdc\u7d20\u6750<\/td><td>\u7d20\u6750\u3092\u9078\u3073\u306b\u304f\u3044<\/td><td>\u8010\u71b1\u6027\u306b\u3088\u308b\u5236\u7d04<\/td><td>\u5c0e\u96fb\u4f53\u306e\u307f<\/td><td>\u9244\u30fb\u9285\u30fb\u30a2\u30eb\u30df\u7cfb<\/td><\/tr><tr><td>\u6210\u819c\u901f\u5ea6<\/td><td>\u9045\u3044<\/td><td>\u901f\u3044<\/td><td>\u901f\u3044<\/td><td>\u4e2d<\/td><\/tr><tr><td>\u4e3b\u306a\u7528\u9014<\/td><td>\u534a\u5c0e\u4f53\u3001\u96fb\u6c60\u3001\u89e6\u5a92\u3001\u5149\u5b66<\/td><td>\u534a\u5c0e\u4f53\u3001\u4fdd\u8b77\u819c<\/td><td>\u81ea\u52d5\u8eca\u90e8\u54c1\u306e\u9632\u9306<\/td><td>\u6a5f\u68b0\u90e8\u54c1\u306e\u9632\u98df\u30fb\u8010\u6469\u8017<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>\u203b\u4e0a\u8a18\u306f\u5404\u624b\u6cd5\u306e\u4e00\u822c\u7684\u306a\u50be\u5411\u3092\u6574\u7406\u3057\u305f\u3082\u306e\u3067\u3059\u3002\u5b9f\u969b\u306e\u5024\u306f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u30fb\u88c5\u7f6e\u30fb\u6750\u6599\u306b\u3088\u308a\u5909\u52d5\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u306a\u305cALD\u304c\u6700\u3082\u5747\u4e00\u306a\u306e\u304b \u2014 \u81ea\u5df1\u98fd\u548c\u53cd\u5fdc\u3068\u6bb5\u5dee\u88ab\u8986\u6027<\/h2>\n\n\n\n<p>\u3053\u3053\u304b\u3089\u304c\u672c\u984c\u3067\u3059\u3002ALD\u304c\u8907\u96d1\u5f62\u72b6\u306b\u5f37\u3044\u3053\u3068\u306f\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u300c\u306a\u305c\u300d\u300c\u3069\u3053\u307e\u3067\u300d\u3092\u8aac\u660e\u3057\u305f\u60c5\u5831\u306f\u591a\u304f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u8868\u9762\u304c\u98fd\u548c\u3057\u305f\u3089\u53cd\u5fdc\u304c\u6b62\u307e\u308b\u3001\u3068\u3044\u3046\u6027\u8cea<\/h3>\n\n\n\n<p>ALD\u306e1\u30b5\u30a4\u30af\u30eb\u306f\u3001\u524d\u99c6\u4f53\u306e\u4f9b\u7d66 \u2192 \u30d1\u30fc\u30b8 \u2192 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style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u4e0a\u304c\u308b\u3068\u3001\u5fc5\u8981\u306a\u66dd\u9732\u91cf\u306f\u6025\u6fc0\u306b\u5897\u3048\u308b<\/h3>\n\n\n\n<p>ALD\u306e1\u30b5\u30a4\u30af\u30eb\u306f\u3001\u524d\u99c6\u4f53\u306e\u4f9b\u7d66 \u2192 \u30d1\u30fc\u30b8 \u2192 \u53cd\u5fdc\u5264\u306e\u4f9b\u7d66 \u2192 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style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u8d85\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u7d30\u5b54\u3067\u3082\u5747\u4e00\u88ab\u8986\u306f\u5b9f\u8a3c\u3055\u308c\u3066\u3044\u308b<\/h3>\n\n\n\n<p>\u3067\u306f\u3001\u3069\u3053\u307e\u3067\u306e\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u306e\u304b\u3002<\/p>\n\n\n\n<p>Elam\u3089\u306f\u3001\u967d\u6975\u9178\u5316\u30a2\u30eb\u30df\u30ca\u819c\u3092\u5bfe\u8c61\u306b\u3057\u305f\u691c\u8a3c\u3092\u884c\u3063\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u819c\u306f\u7d30\u5b54\u5f8465nm\u3001\u9577\u305550\u00b5m\u3001\u3064\u307e\u308a\u9577\u3055\u3068\u5f84\u306e\u6bd4\u304c\u304a\u3088\u305d10\u00b3\u30aa\u30fc\u30c0\u30fc\u3068\u3044\u3046\u6975\u7aef\u306a\u69cb\u9020\u3067\u3059\u3002\u7814\u7a76\u3067\u306f\u3001\u5341\u5206\u306a\u53cd\u5fdc\u7269\u66dd\u9732\u6642\u9593\u3092\u78ba\u4fdd\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u306e\u7d30\u5b54\u5185\u90e8\u3092\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u819c\u3067\u5747\u4e00\u306b\u88ab\u8986\u3067\u304d\u308b\u3053\u3068\u304c\u3001\u65ad\u9762SEM\u89b3\u5bdf\u306b\u3088\u3063\u3066\u78ba\u8a8d\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u3055\u3089\u306b\u9178\u5316\u4e9c\u925b\u306e\u6210\u819c\u306b\u3064\u3044\u3066\u306f\u3001EPMA\uff08\u96fb\u5b50\u7dda\u30de\u30a4\u30af\u30ed\u30a2\u30ca\u30e9\u30a4\u30b6\uff09\u306b\u3088\u308b\u4e9c\u925b\u306e\u6fc3\u5ea6\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u6e2c\u5b9a\u304c\u884c\u308f\u308c\u3001\u66dd\u9732\u6642\u9593\u3092\u9577\u304f\u3059\u308b\u306b\u3064\u308c\u3066\u6210\u819c\u304c\u7d30\u5b54\u306e\u5965\u3078\u3068\u6bb5\u968e\u7684\u306b\u6d78\u900f\u3057\u3066\u3044\u304f\u69d8\u5b50\u304c\u6349\u3048\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u30a2\u30b9\u30da\u30af\u30c8\u6bd410\u00b3\u30aa\u30fc\u30c0\u30fc\u3068\u3044\u3046\u9818\u57df\u3067\u3082\u3001\u6761\u4ef6\u3055\u3048\u6574\u3048\u3070ALD\u306f\u5747\u4e00\u306b\u4ed8\u304f\u3002\u3053\u308c\u304cALD\u306e\u6bb5\u5dee\u88ab\u8986\u6027\u3092\u8a9e\u308b\u3046\u3048\u3067\u306e\u4e00\u3064\u306e\u5230\u9054\u70b9\u3067\u3059\u3002\u305f\u3060\u3057\u3053\u308c\u306f\u7279\u5b9a\u306e\u967d\u6975\u9178\u5316\u30a2\u30eb\u30df\u30ca\u7d30\u5b54\u3068\u7279\u5b9a\u306eALD\u5316\u5b66\u7cfb\u3067\u306e\u5b9f\u8a3c\u3067\u3042\u308a\u3001\u3042\u3089\u3086\u308bALD\u30d7\u30ed\u30bb\u30b9\u306e\u5230\u9054\u9650\u754c\u3092\u793a\u3059\u3082\u306e\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u7c89\u4f53\u30fb\u591a\u5b54\u8cea\u6750\u6599\u3078\u306e\u5168\u5468\u56f2\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/h3>\n\n\n\n<p>\u7c89\u4f53\u3084\u591a\u5b54\u8cea\u4f53\u306f\u3001\u8907\u96d1\u5f62\u72b6\u306e\u6975\u7aef\u306a\u304b\u305f\u3061\u3067\u3059\u3002\u7c92\u5b50\u306e\u5168\u8868\u9762\u3092\u88ab\u8986\u3059\u308b\u306b\u306f\u3001\u7c92\u5b50\u540c\u58eb\u304c\u51dd\u96c6\u3057\u305f\u308a\u5806\u7a4d\u3057\u305f\u308a\u305b\u305a\u3001\u5e38\u306b\u53cd\u5fdc\u30ac\u30b9\u306b\u89e6\u308c\u308b\u72b6\u614b\u3092\u4fdd\u3064\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u305f\u3081\u3001\u6d41\u52d5\u5c64\u65b9\u5f0f\u3084\u56de\u8ee2\u30fb\u632f\u52d5\u65b9\u5f0f\u306a\u3069\u3001\u7c89\u4f53\u3092\u64b9\u62cc\u3057\u306a\u304c\u3089\u6210\u819c\u3059\u308b\u6a5f\u69cb\u304c\u7528\u3044\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?p=8725\"> \u7c89\u4f53\u3078\u306e\u539f\u5b50\u5c64\u5806\u7a4d\uff08ALD\uff09\u6280\u8853\uff1a\u6b21\u4e16\u4ee3\u9ad8\u6a5f\u80fd\u6750\u6599\u3092\u5275\u51fa\u3059\u308b\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/a><\/p>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"\u3010\u691c\u8a3c\u3011\u7c89\u4f53ALD\u3067\u9285\u7c89\u672b\u306bAl\u2082O\u2083\u3092\u6210\u819c\uff01\u89aa\u6c34\u6027\u3068\u8010\u9178\u6027\u306f\u3069\u3046\u5909\u308f\u308b\uff1f\u3010\u83c5\u88fd\u4f5c\u6240\u3011\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/4KHBxXq-gmc?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">ALD\u3067\u3082\u5747\u4e00\u306b\u306a\u3089\u306a\u3044\u6761\u4ef6<\/h3>\n\n\n\n<p>\u516c\u5e73\u3092\u671f\u3059\u305f\u3081\u306b\u3001\u3046\u307e\u304f\u3044\u304b\u306a\u3044\u30b1\u30fc\u30b9\u3082\u6319\u3052\u3066\u304a\u304d\u307e\u3059\u3002ALD\u306f\u4e07\u80fd\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p><strong>\u30d1\u30fc\u30b8\u4e0d\u8db3\u3002<\/strong> 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\u4f4e\u3059\u304e\u308c\u3070\u524d\u99c6\u4f53\u304c\u51dd\u7e2e\u3057\u3001\u3042\u308b\u3044\u306f\u53cd\u5fdc\u304c\u5b8c\u7d50\u3057\u307e\u305b\u3093\u3002\u9ad8\u3059\u304e\u308c\u3070\u71b1\u5206\u89e3\u3092\u8d77\u3053\u3057\u307e\u3059\u3002\u3044\u305a\u308c\u306e\u5834\u5408\u3082\u81ea\u5df1\u5236\u9650\u6027\u304c\u5d29\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u6df1\u90e8\u3067\u306e\u53cd\u5fdc\u7269\u306e\u67af\u6e07\u3002<\/strong> \u66dd\u9732\u91cf\u304c\u4e0d\u8db3\u3057\u3066\u3044\u308b\u3068\u3001\u5b54\u306e\u5165\u53e3\u4ed8\u8fd1\u3067\u6d88\u8cbb\u3055\u308c\u3001\u5965\u307e\u3067\u5c4a\u304d\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p><strong>\u6838\u751f\u6210\u306e\u9045\u308c\u3002<\/strong> 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class=\"wp-block-heading\">\u76ee\u7684\u3068\u5bfe\u8c61\u7269\u304b\u3089\u9078\u3076<\/h2>\n\n\n\n<p>\u3053\u3053\u307e\u3067\u306e\u5185\u5bb9\u3092\u3001\u9078\u5b9a\u306e\u5b9f\u52d9\u306b\u843d\u3068\u3057\u8fbc\u307f\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u7d20\u6750\u3067\u7d5e\u308b<\/h3>\n\n\n\n<p>\u307e\u305a\u7d20\u6750\u3067\u5019\u88dc\u304c\u7d5e\u308c\u307e\u3059\u3002\u96fb\u7740\u5857\u88c5\u306f\u901a\u96fb\u304c\u524d\u63d0\u306a\u306e\u3067\u3001\u6a39\u8102\u3084\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306b\u306f\u4f7f\u3048\u307e\u305b\u3093\u3002\u7121\u96fb\u89e3\u30cb\u30c3\u30b1\u30eb\u3081\u3063\u304d\u306fJIS\u4e0a\u3001\u9244\u30fb\u9285\u30fb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u304a\u3088\u3073\u305d\u308c\u3089\u306e\u5408\u91d1\u304c\u5bfe\u8c61\u3067\u3059\u3002<\/p>\n\n\n\n<p>ALD\u3068CVD\u306f\u7d20\u6750\u306e\u5c0e\u96fb\u6027\u3092\u554f\u3044\u307e\u305b\u3093\u304c\u3001\u30d7\u30ed\u30bb\u30b9\u6e29\u5ea6\u306b\u8010\u3048\u3089\u308c\u308b\u304b\u304c\u5236\u7d04\u306b\u306a\u308a\u307e\u3059\u3002\u8010\u71b1\u6027\u306e\u4f4e\u3044\u57fa\u6750\u306b\u306f\u3001\u30d7\u30e9\u30ba\u30de\u3092\u5229\u7528\u3057\u3066\u53cd\u5fdc\u3092\u4fc3\u9032\u3059\u308b\u30d7\u30e9\u30ba\u30de\u63f4\u7528ALD\u306a\u3069\u3001\u3088\u308a\u4f4e\u6e29\u3067\u306e\u6210\u819c\u304c\u53ef\u80fd\u306a\u624b\u6cd5\u3092\u691c\u8a0e\u3059\u308b\u3053\u3068\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u5fc5\u8981\u306a\u819c\u539a\u3067\u7d5e\u308b<\/h3>\n\n\n\n<p>\u819c\u539a\u3060\u3051\u3067\u306a\u304f\u3001\u5f62\u72b6\u3068\u7d44\u307f\u5408\u308f\u305b\u3066\u8003\u3048\u308b\u306e\u304c\u5b9f\u52d9\u7684\u3067\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>nm\u30aa\u30fc\u30c0\u30fc\u3067\u3001\u304b\u3064\u8907\u96d1\u5f62\u72b6<\/strong>\uff1aALD\u304c\u6709\u529b\u3002\u6570nm\u306e\u7cbe\u5ea6\u304c\u5fc5\u8981\u306a\u754c\u9762\u5236\u5fa1\u3001\u30d0\u30ea\u30a2\u5c64\u3001\u89e6\u5a92\u4fee\u98fe\u306a\u3069<\/li>\n\n\n\n<li><strong>nm\u301c\u00b5m\u3067\u3001\u5f62\u72b6\u304c\u5358\u7d14<\/strong>\uff1aCVD\u3001\u30b9\u30d1\u30c3\u30bf\u3082\u5341\u5206\u306a\u9078\u629e\u80a2<\/li>\n\n\n\n<li><strong>\u00b5m\u301c\u6570\u5341\u00b5m<\/strong>\uff1a\u96fb\u7740\u5857\u88c5\u3001\u7121\u96fb\u89e3\u3081\u3063\u304d<\/li>\n<\/ul>\n\n\n\n<p>\u819c\u539a\u30ec\u30f3\u30b8\u304c\u9055\u3048\u3070\u6c42\u3081\u3089\u308c\u308b\u6a5f\u80fd\u3082\u9055\u3044\u307e\u3059\u3002nm\u30aa\u30fc\u30c0\u30fc\u306e\u819c\u306b\u9632\u9306\u3092\u671f\u5f85\u3059\u308b\u306e\u306f\u7b4b\u304c\u9055\u3044\u307e\u3059\u3057\u3001\u9006\u306b\u00b5m\u306e\u5857\u819c\u3067\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u754c\u9762\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u3082\u3067\u304d\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u76ee\u7684\u3067\u7d5e\u308b<\/h3>\n\n\n\n<p>\u9632\u9306\u3084\u8010\u6469\u8017\u3067\u3042\u308c\u3070\u3001\u00b5m\u30aa\u30fc\u30c0\u30fc\u306e\u3081\u3063\u304d\u30fb\u5857\u88c5\u304c\u73fe\u5b9f\u7684\u3067\u3059\u3002\u7d76\u7e01\u3001\u30ac\u30b9\u30d0\u30ea\u30a2\u3001\u754c\u9762\u5236\u5fa1\u3001\u89e6\u5a92\u8868\u9762\u306e\u4fee\u98fe\u3001\u6fe1\u308c\u6027\u306e\u5236\u5fa1\u3068\u3044\u3063\u305f\u6a5f\u80fd\u6027\u306e\u4ed8\u4e0e\u3067\u306f\u3001ALD\u306enm\u30aa\u30fc\u30c0\u30fc\u306e\u7cbe\u5bc6\u5236\u5fa1\u304c\u52b9\u304d\u307e\u3059\u3002&nbsp;<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u6570\u91cf\u30fb\u30ed\u30c3\u30c8\u3067\u7d5e\u308b<\/h3>\n\n\n\n<p>\u898b\u843d\u3068\u3055\u308c\u304c\u3061\u3067\u3059\u304c\u91cd\u8981\u306a\u89b3\u70b9\u3067\u3059\u3002\u91cf\u7523\u30e9\u30a4\u30f3\u3092\u524d\u63d0\u3068\u3057\u305f\u624b\u6cd5\u3068\u3001\u7814\u7a76\u958b\u767a\u3067\u6570\u500b\u306e\u30b5\u30f3\u30d7\u30eb\u3092\u8a66\u3057\u305f\u3044\u5834\u5408\u3068\u3067\u306f\u3001\u6700\u9069\u89e3\u304c\u5909\u308f\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5c11\u91cf\u30fb\u8a66\u4f5c\u6bb5\u968e\u3067\u3042\u308c\u3070\u3001\u5353\u4e0a\u30b5\u30a4\u30ba\u306e\u7814\u7a76\u958b\u767a\u7528ALD\u88c5\u7f6e\u3068\u3044\u3046\u9078\u629e\u80a2\u304c\u3042\u308a\u307e\u3059\u3002\u8a2d\u7f6e\u30b9\u30da\u30fc\u30b9\u3092\u53d6\u3089\u305a\u3001\u6761\u4ef6\u51fa\u3057\u306e\u81ea\u7531\u5ea6\u304c\u9ad8\u3044\u3053\u3068\u304c\u5229\u70b9\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?p=7476\"> ALD\u88c5\u7f6e\u3068\u306f\uff1f\u539f\u7406\u3084\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u30fb\u88c5\u7f6e\u306e\u9078\u3073\u65b9\u307e\u3067\u89e3\u8aac<\/a><\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u8ff7\u3063\u305f\u3089\u300cALD\u306e\u30c6\u30b9\u30c8\u6210\u819c\u300d\u3092<\/h2>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"\u88c5\u7f6e\u5c0e\u5165\u524d\u306b\u6210\u819c\u3092\u78ba\u8a8d\u3067\u304d\u308b\uff01\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u306e\u3054\u7d39\u4ecb\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/sXJXwD1TUEk?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n\n\n\n<p>\u3053\u3053\u307e\u3067ALD\u306e\u9ad8\u3044\u6bb5\u5dee\u88ab\u8986\u6027\u3068\u3001\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306b\u5fdc\u3058\u305f\u6761\u4ef6\u8a2d\u5b9a\u306e\u91cd\u8981\u6027\u306b\u3064\u3044\u3066\u89e3\u8aac\u3057\u3066\u304d\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001\u81ea\u793e\u306e\u6271\u3046\u30b5\u30f3\u30d7\u30eb\uff08\u7279\u6b8a\u306a\u7acb\u4f53\u69cb\u9020\u3001\u6975\u5c0f\u306e\u30c8\u30ec\u30f3\u30c1\u3001\u591a\u5b54\u8cea\u4f53\u3084\u7c89\u4f53\u306a\u3069\uff09\u306b\u5bfe\u3057\u3066\u672c\u5f53\u306b\u601d\u3044\u901a\u308a\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u3067\u304d\u308b\u304b\u3069\u3046\u304b\u306f\u3001\u5b9f\u969b\u306b\u3084\u3063\u3066\u307f\u306a\u3051\u308c\u3070\u308f\u304b\u3089\u306a\u3044\u90e8\u5206\u3082\u3042\u308a\u307e\u3059\u3002\u30ab\u30bf\u30ed\u30b0\u30b9\u30da\u30c3\u30af\u3084\u6587\u732e\u306e\u30c7\u30fc\u30bf\u3060\u3051\u3067\u5224\u65ad\u3059\u308b\u306e\u3067\u306f\u306a\u304f\u3001\u300c\u81ea\u5206\u306e\u30b5\u30f3\u30d7\u30eb\u3067\u5b9f\u8a3c\u3059\u308b\u300d\u3053\u3068\u304c\u7814\u7a76\u958b\u767a\u3084\u5b9f\u7528\u5316\u3078\u306e\u6700\u77ed\u30eb\u30fc\u30c8\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u3053\u3067\u6709\u52b9\u306a\u306e\u304c\u3001\u88c5\u7f6e\u5c0e\u5165\u524d\u306b\u884c\u3046\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u3067\u3059\u3002\u5f53\u793e\u3067\u306f\u3001\u3054\u6765\u793e\u3044\u305f\u3060\u304d\u88c5\u7f6e\u8aac\u660e\u3092\u542b\u3081\u3066\u5b9f\u65bd\u3059\u308b\u65b9\u6cd5\u3068\u3001\u30b5\u30f3\u30d7\u30eb\u3092\u304a\u9810\u304b\u308a\u3057\u3066\u5f53\u793e\u3067\u6210\u819c\u3059\u308b\u65b9\u6cd5\u306e2\u901a\u308a\u3092\u3054\u7528\u610f\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u2192 <a href=\"https:\/\/agus.co.jp\/?p=9949\">\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u306e\u8a73\u7d30\u306f\u3053\u3061\u3089<\/a><\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u8907\u96d1\u306a\u5f62\u72b6\u306b\u5747\u4e00\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u65bd\u3059\u3046\u3048\u3067\u3001\u62bc\u3055\u3048\u308b\u3079\u304d\u70b9\u3092\u6574\u7406\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u300c\u5747\u4e00\u300d\u30922\u3064\u306b\u5206\u3051\u3066\u8003\u3048\u308b\u3002<\/strong> \u9762\u5185\u5747\u4e00\u6027\u3068\u6bb5\u5dee\u88ab\u8986\u6027\u306f\u5225\u306e\u6982\u5ff5\u3067\u3059\u3002\u8907\u96d1\u5f62\u72b6\u306e\u8a71\u3092\u3057\u3066\u3044\u308b\u306a\u3089\u3001\u6c42\u3081\u3066\u3044\u308b\u306e\u306f\u6bb5\u5dee\u88ab\u8986\u6027\u3067\u3059\u3002<\/p>\n\n\n\n<p><strong>\u5f62\u72b6\u4f9d\u5b58\u3092\u6700\u5c0f\u5316\u3057\u305f\u3044\u306a\u3089ALD\u3002<\/strong> \u81ea\u5df1\u5236\u9650\u7684\u306a\u8868\u9762\u53cd\u5fdc\u306b\u3088\u308a\u3001\u30ac\u30b9\u304c\u5230\u9054\u3067\u304d\u308b\u5834\u6240\u3067\u3042\u308c\u3070\u5f62\u72b6\u306b\u3088\u3089\u305a\u540c\u3058\u819c\u539a\u306b\u306a\u308a\u307e\u3059\u3002\u30a2\u30b9\u30da\u30af\u30c8\u6bd410\u00b3\u306e\u7d30\u5b54\u3067\u3082\u5747\u4e00\u88ab\u8986\u304c\u5b9f\u8a3c\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u305f\u3060\u3057\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e2\u4e57\u3067\u66dd\u9732\u91cf\u304c\u5fc5\u8981\u306b\u306a\u308b\u3002<\/strong> \u5e73\u5766\u57fa\u677f\u306e\u30ec\u30b7\u30d4\u306f\u6d41\u7528\u3067\u304d\u307e\u305b\u3093\u3002\u30d1\u30eb\u30b9\u6642\u9593\u3068\u30d1\u30fc\u30b8\u6642\u9593\u306e\u518d\u8a2d\u8a08\u304c\u524d\u63d0\u3067\u3059\u3002<\/p>\n\n\n\n<p><strong>\u819c\u539a\u30ec\u30f3\u30b8\u3067\u624b\u6cd5\u306f\u6c7a\u307e\u308b\u3002<\/strong> nm\u306a\u3089ALD\u3001\u00b5m\u306a\u3089\u96fb\u7740\u5857\u88c5\u3084\u7121\u96fb\u89e3\u3081\u3063\u304d\u3002\u76ee\u7684\u3068\u5fc5\u8981\u819c\u539a\u304b\u3089\u9006\u7b97\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p><strong>\u8ff7\u3063\u305f\u3089\u30c6\u30b9\u30c8\u6210\u819c\u3002<\/strong> \u30ab\u30bf\u30ed\u30b0\u30b9\u30da\u30c3\u30af\u3067\u306f\u306a\u304f\u3001\u81ea\u5206\u306e\u30b5\u30f3\u30d7\u30eb\u3067\u78ba\u8a8d\u3059\u308b\u306e\u304c\u6700\u77ed\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u306f1946\u5e74\u306e\u5275\u696d\u4ee5\u6765\u3001\u771f\u7a7a\u88c5\u7f6e\u30fb\u771f\u7a7a\u6a5f\u5668\u306e\u88fd\u9020\u306b\u53d6\u308a\u7d44\u3093\u3067\u304d\u307e\u3057\u305f\u3002\u7814\u7a76\u958b\u767a\u7528\u306e\u5c0f\u578bALD\u88c5\u7f6e\u3092\u4e2d\u5fc3\u306b\u3001\u5927\u5b66\u3084\u7814\u7a76\u6a5f\u95a2\u3067\u306e\u5c0e\u5165\u5b9f\u7e3e\u3092\u591a\u6570\u6709\u3057\u3066\u3044\u307e\u3059\u3002\u7814\u7a76\u76ee\u7684\u306b\u5fdc\u3058\u305f\u88c5\u7f6e\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3001\u5c0e\u5165\u524d\u306e\u30c6\u30b9\u30c8\u6210\u819c\u306b\u3082\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8907\u96d1\u306a\u5f62\u72b6\u3078\u306e\u6210\u819c\u3067\u304a\u56f0\u308a\u306e\u969b\u306f\u3001\u304a\u6c17\u8efd\u306b\u3054\u76f8\u8ac7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?cat=15\"> ALD\u88c5\u7f6e\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u88c5\u7f6e\uff09\u88fd\u54c1\u4e00\u89a7<\/a><\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<p class=\"has-small-font-size\"><strong>\u5f15\u7528\u6587\u732e<\/strong><\/p>\n\n\n\n<p class=\"has-small-font-size\">\u5409\u7530\u6b66\u53f2\u300c\u30d7\u30e9\u30ba\u30deALD\u306b\u3088\u308b\u4f4e\u6e29\u6210\u819c\u6280\u8853\u300d\u300e\u8868\u9762\u6280\u8853\u300f68\u5dfb12\u53f7, 2017, pp.679-682.<a href=\"https:\/\/www.jstage.jst.go.jp\/article\/sfj\/68\/12\/68_679\/_pdf\/-char\/ja\"> https:\/\/www.jstage.jst.go.jp\/article\/sfj\/68\/12\/68_679\/_pdf\/-char\/ja<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">\u5ddd\u5cf6\u6b63\u4e00\u90ce\u300c\u96fb\u7740\u5857\u88c5\u306e\u7279\u9577\u3068\u554f\u984c\u70b9\u300d\u300e\u9ad8\u5206\u5b50\u300f14\u5dfb7\u53f7, 1965, p.538.<a href=\"https:\/\/www.jstage.jst.go.jp\/article\/kobunshi1952\/14\/7\/14_7_538\/_pdf\/-char\/ja\"> https:\/\/www.jstage.jst.go.jp\/article\/kobunshi1952\/14\/7\/14_7_538\/_pdf\/-char\/ja<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">\u5927\u85ea\u6a29\u662d\u300c\u65b0\u3057\u3044\u5857\u6599\u3068\u5857\u88c5\u30b7\u30ea\u30fc\u30ba(5) \u96fb\u7740\u5857\u88c5\u300d\u300e\u91d1\u5c5e\u8868\u9762\u6280\u8853\u300f28\u5dfb6\u53f7, 1977, p.306.<a href=\"https:\/\/www.jstage.jst.go.jp\/article\/sfj1950\/28\/6\/28_6_306\/_pdf\/-char\/ja\"> https:\/\/www.jstage.jst.go.jp\/article\/sfj1950\/28\/6\/28_6_306\/_pdf\/-char\/ja<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">\u68ee\u6559\u5b89, \u91ce\u5cf6\u76f4\u5178, \u5c71\u672c\u525b\u5b8f, \u4e2d\u6751\u559c\u4ee3\u6b21\u300c\u9ad8\u5206\u5b50\u6d41\u4f53\u306e\u30c7\u30a3\u30c3\u30d7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u304a\u3051\u308b\u819c\u539a\u306b\u5bfe\u3059\u308b\u5f15\u304d\u4e0a\u3052\u901f\u5ea6\u3068\u30ec\u30aa\u30ed\u30b8\u30fc\u7279\u6027\u306e\u5f71\u97ff\u300d\u300e\u7e4a\u7dad\u5b66\u4f1a\u8a8c\u300f56\u5dfb6\u53f7, 2003, p.T21.<a href=\"https:\/\/www.jstage.jst.go.jp\/article\/transjtmsj1972\/56\/6\/56_6_T21\/_article\/-char\/ja\/\"> https:\/\/www.jstage.jst.go.jp\/article\/transjtmsj1972\/56\/6\/56_6_T21\/_article\/-char\/ja\/<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">\u65e5\u672c\u898f\u683c\u5354\u4f1a\u300cJIS H 8645:1999 \u7121\u96fb\u89e3\u30cb\u30c3\u30b1\u30eb\uff0d\u308a\u3093\u3081\u3063\u304d\u300d<br><a href=\"https:\/\/kikakurui.com\/h8\/H8645-1999-01.html\">https:\/\/kikakurui.com\/h8\/H8645-1999-01.html<\/a><\/p>\n\n\n\n<p><\/p>\n\n\n\n<p class=\"has-small-font-size\">Gordon, R. G.; Hausmann, D. M.; Kim, E.; Shepard, J. &#8220;A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches.&#8221; <em>Chemical Vapor Deposition<\/em>, 2003, 9(2), 73\u201378.<a href=\"https:\/\/doi.org\/10.1002\/cvde.200390005\"> https:\/\/doi.org\/10.1002\/cvde.200390005<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">Elam, J. W.; Routkevitch, D.; Mardilovich, P. P.; George, S. M. &#8220;Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition.&#8221; <em>Chemistry of Materials<\/em>, 2003, 15(18), 3507\u20133517.<a href=\"https:\/\/doi.org\/10.1021\/cm0303080\"> https:\/\/doi.org\/10.1021\/cm0303080<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\"><strong>\u53c2\u8003\u6587\u732e<\/strong><\/p>\n\n\n\n<p class=\"has-small-font-size\">Cremers, V.; Puurunen, R. L.; Dendooven, J. &#8220;Conformality in atomic layer deposition: Current status overview of analysis and modelling.&#8221; <em>Applied Physics Reviews<\/em>, 2019, 6(2), 021302.<a href=\"https:\/\/doi.org\/10.1063\/1.5060967\"> https:\/\/doi.org\/10.1063\/1.5060967<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">George, S. M. &#8220;Atomic Layer Deposition: An Overview.&#8221; <em>Chemical Reviews<\/em>, 2010, 110(1), 111\u2013131.<a href=\"https:\/\/doi.org\/10.1021\/cr900056b\"> https:\/\/doi.org\/10.1021\/cr900056b<\/a><\/p>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6e9d\u3084\u5b54\u3001\u7c89\u4f53\u3001\u591a\u5b54\u8cea\u4f53\u3001\u4e09\u6b21\u5143\u7684\u306b\u5165\u308a\u7d44\u3093\u3060\u90e8\u54c1\u3002\u3053\u3046\u3057\u305f\u300c\u5e73\u5766\u3067\u306a\u3044\u3082\u306e\u300d\u306b\u819c\u3092\u4ed8\u3051\u3088\u3046\u3068\u3057\u3066\u3001\u51f9\u90e8\u306e\u5e95\u3084\u90e8\u54c1\u306e\u88cf\u5074\u3060\u3051\u819c\u304c\u8584\u3044\u3001\u3042\u308b\u3044\u306f\u307e\u3063\u305f\u304f\u4ed8[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":10058,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-10054","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"acf":[],"yoast_head":"<!-- This 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