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class=\"wp-block-heading\">CVD\u306f\u6df1\u3044\u7a74\u306e\u5e95\u307e\u3067\u30ac\u30b9\u304c\u5747\u4e00\u306b\u884c\u304d\u6e21\u308a\u306b\u304f\u3044<\/h3>\n\n\n\n<p>CVD\uff08\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff09\u306f\u3001\u539f\u6599\u30ac\u30b9\u3092\u4f9b\u7d66\u3057\u3066\u57fa\u677f\u8868\u9762\u3067\u5316\u5b66\u53cd\u5fdc\u3092\u8d77\u3053\u3057\u3001\u819c\u3092\u5806\u7a4d\u3055\u305b\u307e\u3059\u3002\u30ac\u30b9\u304c\u56de\u308a\u8fbc\u3080\u305f\u3081\u3001\u4e00\u822c\u306b\u3001\u901a\u5e38\u306e\u30e9\u30a4\u30f3\u30fb\u30aa\u30d6\u30fb\u30b5\u30a4\u30c8\u578bPVD\u3088\u308a\u9ad8\u3044\u88ab\u8986\u6027\u3092\u5f97\u3084\u3059\u3044\u624b\u6cd5\u3067\u3059\u3002\u540c\u793e\u3082\u3001CVD\u65b9\u5f0f\u3067\u3042\u308c\u3070\u7a74\u306e\u5e95\u3084\u69cb\u9020\u4f53\u306e\u5468\u308a\u306b\u307e\u3093\u3079\u3093\u306a\u304f\u30ac\u30b9\u3092\u884c\u304d\u6e21\u3089\u305b\u3001\u8868\u9762\u306b\u5316\u5b66\u53cd\u5fdc\u3092\u8d77\u3053\u3059\u3053\u3068\u3067\u5747\u4e00\u306b\u6210\u819c\u3067\u304d\u308b\u3068\u8aac\u660e\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305f\u3060\u3057\u9650\u754c\u306f\u3042\u308a\u307e\u3059\u3002CVD\u3067\u306f\u539f\u6599\u306e\u4f9b\u7d66\u3068\u8868\u9762\u53cd\u5fdc\u304c\u540c\u6642\u306b\u9032\u3080\u305f\u3081\u3001\u4f9b\u7d66\u91cf\u304c\u819c\u539a\u306b\u53cd\u6620\u3055\u308c\u307e\u3059\u3002\u6df1\u3044\u7a74\u3067\u306f\u5165\u53e3\u4ed8\u8fd1\u3067\u539f\u6599\u304c\u6d88\u8cbb\u3055\u308c\u3066\u3057\u307e\u3044\u3001\u5965\u307b\u3069\u819c\u304c\u8584\u304f\u306a\u308b\u3002\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u4e0a\u304c\u308b\u306b\u3064\u308c\u3066\u3001\u3053\u306e\u50be\u5411\u306f\u5f37\u307e\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u300c\u7a74\u3092\u8986\u3046\u300d\u306e\u304b\u300c\u7a74\u3092\u57cb\u3081\u308b\u300d\u306e\u304b<\/h3>\n\n\n\n<p>\u3053\u3053\u3067\u3001\u3053\u306e\u8a18\u4e8b\u3067\u3082\u3063\u3068\u3082\u91cd\u8981\u306a\u6574\u7406\u3092\u3057\u3066\u304a\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5fae\u7d30\u69cb\u9020\u3078\u306e\u6210\u819c\u306b\u306f\u3001\u8981\u6c42\u306e\u7570\u306a\u308b2\u7a2e\u985e\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3072\u3068\u3064\u306f\u300c\u8986\u3046\u300d\u3053\u3068\u3002\u7a74\u306e\u5185\u58c1\u3092\u3001\u5e95\u3082\u5074\u58c1\u3082\u5165\u53e3\u3082\u540c\u3058\u539a\u3055\u306e\u819c\u3067\u8986\u3044\u305f\u3044\u5834\u5408\u3067\u3059\u3002\u30d0\u30ea\u30a2\u819c\u3001\u7d76\u7e01\u819c\u3001\u30e9\u30a4\u30ca\u30fc\u5c64\u3001\u4fdd\u8b77\u819c\u306a\u3069\u304c\u3053\u308c\u306b\u3042\u305f\u308a\u307e\u3059\u3002\u6c42\u3081\u3066\u3044\u308b\u306e\u306f\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\uff08\u6bb5\u5dee\u88ab\u8986\u6027\u306e\u9ad8\u3044\u6210\u819c\uff09\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u3082\u3046\u3072\u3068\u3064\u306f\u300c\u57cb\u3081\u308b\u300d\u3053\u3068\u3002\u7a74\u306e\u5185\u90e8\u3092\u6750\u6599\u3067\u5b8c\u5168\u306b\u5145\u586b\u3057\u305f\u3044\u5834\u5408\u3067\u3059\u3002\u914d\u7dda\u3001\u96fb\u6975\u3001\u8cab\u901a\u96fb\u6975\u306a\u3069\u304c\u3053\u308c\u306b\u3042\u305f\u308a\u307e\u3059\u3002\u6c42\u3081\u3066\u3044\u308b\u306e\u306f\u30ae\u30e3\u30c3\u30d7\u30d5\u30a3\u30eb\u3001\u3064\u307e\u308a\u57cb\u3081\u8fbc\u307f\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e2\u3064\u3092\u6df7\u540c\u3059\u308b\u3068\u3001\u624b\u6cd5\u306e\u9078\u5b9a\u3092\u8aa4\u308a\u307e\u3059\u3002\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u304c\u5f97\u610f\u306a\u624b\u6cd5\u3067\u7a74\u3092\u57cb\u3081\u3088\u3046\u3068\u3059\u308b\u3068\u3001\u5f8c\u8ff0\u3059\u308b\u3088\u3046\u306b\u5185\u90e8\u306b\u7d99\u304e\u76ee\u304c\u6b8b\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u9006\u306b\u3001\u57cb\u3081\u8fbc\u307f\u306b\u6700\u9069\u5316\u3057\u305f\u6761\u4ef6\u3068\u3001\u8584\u3044\u5747\u4e00\u819c\u3092\u5f62\u6210\u3059\u308b\u6761\u4ef6\u3068\u3067\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u8a2d\u8a08\u304c\u7570\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305a\u81ea\u5206\u306e\u8981\u6c42\u304c\u3069\u3061\u3089\u306a\u306e\u304b\u3092\u3001\u306f\u3063\u304d\u308a\u3055\u305b\u308b\u3053\u3068\u304c\u5927\u5207\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u7a74\u306e\u4e2d\u3078\u306e\u6210\u819c\u65b9\u5f0f\u3092\u6bd4\u8f03\u3059\u308b<\/h2>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">ALD \u2014 \u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u69cb\u9020\u3092\u5747\u4e00\u306b\u8986\u3044\u3084\u3059\u3044<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"625\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image3.png\" alt=\"ALD \u2014 \u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u69cb\u9020\u3092\u5747\u4e00\u306b\u8986\u3044\u3084\u3059\u3044\" class=\"wp-image-10068\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image3.png 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image3-300x183.png 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image3-768x469.png 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u306f\u3001\u524d\u99c6\u4f53\u3068\u53cd\u5fdc\u5264\u306a\u3069\u8907\u6570\u306e\u53cd\u5fdc\u7269\u3092\u3001\u540c\u6642\u3067\u306f\u306a\u304f\u4ea4\u4e92\u306b\u4f9b\u7d66\u3059\u308b\u6c17\u76f8\u6210\u819c\u6cd5\u3067\u3059\u3002\u305d\u308c\u305e\u308c\u306e\u53cd\u5fdc\u304c\u8868\u9762\u3067\u81ea\u5df1\u5236\u9650\u7684\u306b\u9032\u307f\u3001\u53cd\u5fdc\u30b5\u30a4\u30c8\u3092\u4f7f\u3044\u5207\u3063\u305f\u6642\u70b9\u3067\u6b62\u307e\u308a\u307e\u3059\u3002\u5404\u534a\u53cd\u5fdc\u304c\u98fd\u548c\u3059\u308b\u6761\u4ef6\u3067\u306f\u3001\u819c\u539a\u3092\u4e3b\u306b\u30b5\u30a4\u30af\u30eb\u6570\u3067\u5236\u5fa1\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u306a\u304a1\u30b5\u30a4\u30af\u30eb\u3042\u305f\u308a\u306e\u6210\u9577\u91cf\u306f\u3001\u591a\u304f\u306e\u5834\u54081\u539f\u5b50\u5c64\u306b\u6e80\u305f\u306a\u3044\u91cf\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u5f93\u6765\u306eCVD\u3084PVD\u3068\u6bd4\u3079\u305f\u3068\u304d\u306e\u7279\u5fb4\u306f\u3001\u6b20\u9665\u3084\u30d4\u30f3\u30db\u30fc\u30eb\u3092\u6291\u3048\u305f\u9023\u7d9a\u819c\u3092\u5f62\u6210\u3057\u3084\u3059\u3044\u3053\u3068\u3001\u826f\u597d\u306a\u30b9\u30c6\u30c3\u30d7\u30ab\u30d0\u30ec\u30c3\u30b8\u3001\u819c\u539a\u5236\u5fa1\u6027\u306e\u9ad8\u3055\u3001\u305d\u3057\u3066\u819c\u539a\u5206\u5e03\u306e\u826f\u3055\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u2192 \u539f\u7406\u306e\u8a73\u7d30\u306f<a href=\"https:\/\/agus.co.jp\/?p=8307\">ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u3068\u306f\uff1f\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u5f79\u5272\u30fb\u88c5\u7f6e\u3082\u7d39\u4ecb<\/a>\u3067\u89e3\u8aac\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">CVD \u2014 \u901f\u3044\u304c\u3001\u6df1\u3044\u7a74\u3067\u306f\u5165\u53e3\u304c\u539a\u304f\u306a\u308a\u3084\u3059\u3044<\/h3>\n\n\n\n<p><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image2-1.jpg\" alt=\"CVD \u2014 \u901f\u3044\u304c\u3001\u6df1\u3044\u7a74\u3067\u306f\u5165\u53e3\u304c\u539a\u304f\u306a\u308a\u3084\u3059\u3044\" class=\"wp-image-10069\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image2-1.jpg 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image2-1-300x225.jpg 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image2-1-768x576.jpg 768w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u524d\u8ff0\u306e\u3068\u304a\u308a\u3001CVD\u306f\u30ac\u30b9\u306e\u56de\u308a\u8fbc\u307f\u306b\u3088\u3063\u3066PVD\u3088\u308a\u9ad8\u3044\u88ab\u8986\u6027\u3092\u5f97\u3084\u3059\u3044\u624b\u6cd5\u3067\u3059\u3002\u6210\u819c\u901f\u5ea6\u3082ALD\u3088\u308a\u901f\u304f\u3001\u751f\u7523\u6027\u306e\u9762\u3067\u512a\u4f4d\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u4e00\u65b9\u3067\u3001\u88ab\u8986\u6027\u306f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3067\u4f5c\u308a\u8fbc\u3080\u3082\u306e\u3067\u3042\u308a\u3001ALD\u306e\u3088\u3046\u306b\u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u306b\u3088\u3063\u3066\u4fdd\u8a3c\u3055\u308c\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u9ad8\u304f\u306a\u308b\u307b\u3069\u3001\u5165\u53e3\u3068\u5e95\u306e\u819c\u539a\u5dee\u304c\u554f\u984c\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">PVD \u2014 \u8584\u3044\u819c\u306a\u3089\u5fae\u7d30\u306a\u6e9d\u306b\u3082\u4f7f\u308f\u308c\u308b<\/h3>\n\n\n\n<p>\u901a\u5e38\u306ePVD\u306f\u30e9\u30a4\u30f3\u30fb\u30aa\u30d6\u30fb\u30b5\u30a4\u30c8\u6027\u304c\u5f37\u3044\u305f\u3081\u3001\u6df1\u3044\u7a74\u306e\u5e95\u307e\u3067\u539a\u3044\u819c\u3092\u4ed8\u3051\u308b\u3053\u3068\u306b\u306f\u5236\u7d04\u304c\u3042\u308a\u307e\u3059\u3002\u305f\u3060\u3057\u3001\u8584\u3044\u30d0\u30ea\u30a2\u819c\u3084\u30b7\u30fc\u30c9\u819c\u306e\u3088\u3046\u306b\u300c\u539a\u3055\u3088\u308a\u9023\u7d9a\u6027\u304c\u6c42\u3081\u3089\u308c\u308b\u5c64\u300d\u3067\u3042\u308c\u3070\u3001\u5fae\u7d30\u306a\u6e9d\u306b\u5bfe\u3057\u3066\u3082\u4f7f\u308f\u308c\u3066\u3044\u307e\u3059\u3002\u7528\u9014\u306b\u3088\u3063\u3066\u8a55\u4fa1\u304c\u5909\u308f\u308b\u624b\u6cd5\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">3\u65b9\u5f0f\u306e\u6bd4\u8f03<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td><\/td><td><strong>ALD<\/strong><\/td><td><strong>CVD<\/strong><\/td><td><strong>PVD<\/strong><\/td><\/tr><tr><td>\u7a74\u306e\u4e2d\u3078\u306e\u8ffd\u5f93\u6027<\/td><td>\u6975\u3081\u3066\u9ad8\u3044<\/td><td>\u4e2d\u301c\u9ad8<\/td><td>\u4f4e\u3044<\/td><\/tr><tr><td>\u6210\u819c\u306e\u539f\u7406<\/td><td>\u524d\u99c6\u4f53\u3092\u4ea4\u4e92\u4f9b\u7d66\u3057\u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u30671\u5c64\u305a\u3064\u5806\u7a4d<\/td><td>\u539f\u6599\u30ac\u30b9\u3092\u540c\u6642\u4f9b\u7d66\u3057\u5316\u5b66\u53cd\u5fdc\u3067\u5806\u7a4d<\/td><td>\u6750\u6599\u3092\u7269\u7406\u7684\u306b\u98db\u3070\u3057\u3066\u76f4\u7dda\u7684\u306b\u5806\u7a4d<\/td><\/tr><tr><td>\u819c\u539a\u5236\u5fa1\u6027<\/td><td>\u6975\u3081\u3066\u9ad8\u3044\uff08\u30b5\u30a4\u30af\u30eb\u6570\u3067\u6c7a\u307e\u308b\uff09<\/td><td>\u4e2d<\/td><td>\u4e2d<\/td><\/tr><tr><td>\u6210\u819c\u901f\u5ea6<\/td><td>\u9045\u3044<\/td><td>\u901f\u3044<\/td><td>\u901f\u3044<\/td><\/tr><tr><td>\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u69cb\u9020<\/td><td>\u5f97\u610f<\/td><td>\u6761\u4ef6\u6b21\u7b2c<\/td><td>\u5236\u7d04\u304c\u5927\u304d\u3044<\/td><\/tr><tr><td>\u4e3b\u306a\u7528\u9014<\/td><td>\u30d0\u30ea\u30a2\u819c\u3001\u7d76\u7e01\u819c\u3001\u30e9\u30a4\u30ca\u30fc\u3001\u591a\u5b54\u8cea\u4f53<\/td><td>\u7d76\u7e01\u819c\u3001\u5c0e\u96fb\u819c\u3001\u4e09\u6b21\u5143\u69cb\u9020<\/td><td>\u5e73\u5766\u9762\u3001\u8584\u3044\u30d0\u30ea\u30a2\u819c\u30fb\u30b7\u30fc\u30c9\u819c<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>\u203b\u4e0a\u8a18\u306f\u5404\u624b\u6cd5\u306e\u4e00\u822c\u7684\u306a\u50be\u5411\u3092\u6574\u7406\u3057\u305f\u3082\u306e\u3067\u3059\u3002\u5b9f\u969b\u306e\u6027\u80fd\u306f\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u30fb\u88c5\u7f6e\u30fb\u6750\u6599\u306b\u3088\u308a\u5909\u52d5\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u306a\u305cALD\u304c\u5fae\u7d30\u306a\u7a74\u306e\u4e2d\u306b\u5f37\u3044\u306e\u304b<\/h2>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u8868\u9762\u304c\u98fd\u548c\u3057\u305f\u3089\u53cd\u5fdc\u304c\u6b62\u307e\u308b<\/h3>\n\n\n\n<p>ALD\u306e1\u30b5\u30a4\u30af\u30eb\u306f\u3001\u524d\u99c6\u4f53\u306e\u4f9b\u7d66\u3001\u30d1\u30fc\u30b8\u3001\u53cd\u5fdc\u5264\u306e\u4f9b\u7d66\u3001\u30d1\u30fc\u30b8\u3068\u3044\u30464\u30b9\u30c6\u30c3\u30d7\u3067\u3059\u3002\u305d\u308c\u305e\u308c\u306e\u4f9b\u7d66\u30b9\u30c6\u30c3\u30d7\u3067\u8d77\u304d\u308b\u53cd\u5fdc\u304c\u81ea\u5df1\u5236\u9650\u7684\u3067\u3042\u308b\u3053\u3068\u304c\u3001\u3053\u306e\u624b\u6cd5\u306e\u6838\u5fc3\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u53cd\u5fdc\u7269\u306f\u8868\u9762\u306e\u53cd\u5fdc\u30b5\u30a4\u30c8\u3068\u7d50\u5408\u3057\u307e\u3059\u304c\u3001\u30b5\u30a4\u30c8\u3092\u4f7f\u3044\u5207\u308c\u3070\u305d\u308c\u4ee5\u4e0a\u306f\u53cd\u5fdc\u3057\u307e\u305b\u3093\u3002\u4f59\u5206\u306b\u4f9b\u7d66\u3057\u3066\u3082\u819c\u306f\u539a\u304f\u306a\u3089\u306a\u3044\u3002\u3064\u307e\u308a\u3001\u5341\u5206\u306a\u91cf\u3055\u3048\u5c4a\u3051\u3070\u3001\u4f9b\u7d66\u91cf\u306e\u3070\u3089\u3064\u304d\u304c\u819c\u539a\u306e\u3070\u3089\u3064\u304d\u306b\u306a\u308a\u306b\u304f\u3044\u308f\u3051\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u5341\u5206\u306a\u66dd\u9732\u3068\u7406\u60f3\u7684\u306a\u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u304c\u6210\u7acb\u3059\u308c\u3070\u3001\u7a74\u306e\u5165\u53e3\u3068\u6df1\u90e8\u306e\u819c\u539a\u5dee\u3092\u6291\u3048\u3089\u308c\u307e\u3059\u3002PVD\u3084CVD\u3067\u8d77\u304d\u308b\u300c\u5165\u53e3\u3060\u3051\u304c\u539a\u304f\u306a\u308b\u300d\u73fe\u8c61\u3092\u56de\u907f\u3067\u304d\u308b\u306e\u306f\u3001\u3053\u306e\u6027\u8cea\u306b\u3088\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u5fc5\u8981\u306a\u66dd\u9732\u91cf\u306f\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u7d042\u4e57\u3067\u5897\u3048\u308b<\/h3>\n\n\n\n<p>\u305f\u3060\u3057\u300c\u5341\u5206\u306a\u91cf\u304c\u5c4a\u3051\u3070\u300d\u3068\u3044\u3046\u6761\u4ef6\u304c\u4ed8\u304d\u307e\u3059\u3002\u3053\u3053\u304c\u5b9f\u52d9\u4e0a\u306e\u8981\u70b9\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u6df1\u3044\u5b54\u306e\u5965\u307e\u3067\u53cd\u5fdc\u7269\u3092\u884c\u304d\u6e21\u3089\u305b\u308b\u306b\u306f\u3001\u9577\u3044\u4f9b\u7d66\u6642\u9593\u304b\u9ad8\u3044\u5206\u5727\u304c\u5fc5\u8981\u306b\u306a\u308a\u307e\u3059\u3002\u3053\u306e\u5fc5\u8981\u91cf\u306f\u66dd\u9732\u91cf\u3068\u3057\u3066\u3001\u5727\u529b\u3068\u6642\u9593\u306e\u7a4d\u3067\u8868\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>Gordon\u3089\u306f\u3001\u72ed\u3044\u5b54\u3084\u30c8\u30ec\u30f3\u30c1\u5185\u3067\u306e\u6bb5\u5dee\u88ab\u8986\u6027\u306b\u3064\u3044\u3066\u5206\u5b50\u8f38\u9001\u306b\u57fa\u3065\u304f\u901f\u5ea6\u8ad6\u30e2\u30c7\u30eb\u3092\u69cb\u7bc9\u3057\u307e\u3057\u305f\u3002\u3053\u306e\u30e2\u30c7\u30eb\u3067\u306f\u3001\u958b\u53e3\u90e8\u3067\u5fc5\u8981\u3068\u306a\u308b\u66dd\u9732\u91cf\u304c\u3001\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u9ad8\u3044\u9818\u57df\u3067\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u7d042\u4e57\u306b\u6bd4\u4f8b\u3057\u3066\u5897\u52a0\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305f\u3060\u3057\u3053\u308c\u306f\u7279\u5b9a\u306e\u4eee\u5b9a\u306b\u57fa\u3065\u304f\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3067\u3042\u308a\u3001\u3042\u3089\u3086\u308b\u6750\u6599\u30fb\u88c5\u7f6e\u30fb\u5727\u529b\u9818\u57df\u306b\u901a\u7528\u3059\u308b\u666e\u904d\u5247\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u5b9f\u969b\u306b\u5fc5\u8981\u306a\u6761\u4ef6\u306f\u3001\u5b54\u306e\u5f62\u72b6\u3001\u53cd\u5fdc\u78ba\u7387\u3001\u6e29\u5ea6\u3001\u5727\u529b\u3001\u88c5\u7f6e\u69cb\u6210\u306b\u3088\u3063\u3066\u3082\u5909\u308f\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u540c\u8ad6\u6587\u3067\u306f\u3001\u30a2\u30b9\u30da\u30af\u30c8\u6bd443\u306e\u5b54\u306b\u9178\u5316\u30cf\u30d5\u30cb\u30a6\u30e0\u819c\u3092100%\u306e\u6bb5\u5dee\u88ab\u8986\u7387\u3067\u6210\u819c\u3059\u308b\u306e\u306b\u3001\u6700\u4f4e\u3067\u3082\u304a\u3088\u305d9\u00d710\u00b3\u30e9\u30f3\u30b0\u30df\u30e5\u30a2\u306e\u66dd\u9732\u3092\u8981\u3057\u305f\u3068\u5831\u544a\u3055\u308c\u3066\u3044\u307e\u3059\uff081\u30e9\u30f3\u30b0\u30df\u30e5\u30a2\uff1d10\u207b\u2076 Torr\u00b7s\uff09\u3002\u3053\u308c\u306f\u540c\u8ad6\u6587\u306e\u9178\u5316\u30cf\u30d5\u30cb\u30a6\u30e0\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u4e00\u4f8b\u3067\u3042\u308a\u3001\u4e00\u822c\u7684\u306aALD\u6761\u4ef6\u3068\u3057\u3066\u8aad\u3081\u308b\u6570\u5024\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u305d\u308c\u3067\u3082\u5b9f\u52d9\u4e0a\u306e\u542b\u610f\u306f\u660e\u5feb\u3067\u3059\u3002\u5e73\u5766\u306a\u30a6\u30a8\u30cf\u30fc\u3067\u6700\u9069\u5316\u3057\u305f\u30ec\u30b7\u30d4\u3092\u3001\u305d\u306e\u307e\u307e\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u69cb\u9020\u306b\u6d41\u7528\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002\u66dd\u9732\u6761\u4ef6\u306f\u5bfe\u8c61\u306e\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306b\u5fdc\u3058\u3066\u8a2d\u8a08\u3057\u76f4\u3059\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30d1\u30fc\u30b8\u306b\u3064\u3044\u3066\u3082\u3001\u6df1\u3044\u69cb\u9020\u307b\u3069\u6392\u6c17\u306b\u6642\u9593\u304c\u304b\u304b\u308b\u305f\u3081\u3001\u5225\u9014\u306e\u6700\u9069\u5316\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u30a2\u30b9\u30da\u30af\u30c8\u6bd410\u00b3\u30aa\u30fc\u30c0\u30fc\u306e\u7d30\u5b54\u3067\u3082\u5747\u4e00\u88ab\u8986\u306f\u5b9f\u8a3c\u3055\u308c\u3066\u3044\u308b<\/h3>\n\n\n\n<p>\u3067\u306f\u3001\u3069\u3053\u307e\u3067\u5c4a\u304f\u306e\u304b\u3002<\/p>\n\n\n\n<p>Elam\u3089\u306f\u967d\u6975\u9178\u5316\u30a2\u30eb\u30df\u30ca\u819c\u3092\u5bfe\u8c61\u306b\u691c\u8a3c\u3057\u3066\u3044\u307e\u3059\u3002\u7d30\u5b54\u5f8465nm\u3001\u9577\u305550\u00b5m\u3001\u9577\u3055\u3068\u5f84\u306e\u6bd4\u304c\u304a\u3088\u305d10\u00b3\u30aa\u30fc\u30c0\u30fc\u3068\u3044\u3046\u6975\u7aef\u306a\u69cb\u9020\u3067\u3059\u3002\u5341\u5206\u306a\u53cd\u5fdc\u7269\u66dd\u9732\u6642\u9593\u3092\u78ba\u4fdd\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u306e\u7d30\u5b54\u5185\u90e8\u3092\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u819c\u3067\u5747\u4e00\u306b\u88ab\u8986\u3067\u304d\u308b\u3053\u3068\u304c\u3001\u65ad\u9762SEM\u89b3\u5bdf\u3067\u78ba\u8a8d\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u9178\u5316\u4e9c\u925b\u306e\u6210\u819c\u3067\u306f\u3001EPMA\uff08\u96fb\u5b50\u7dda\u30de\u30a4\u30af\u30ed\u30a2\u30ca\u30e9\u30a4\u30b6\uff09\u306b\u3088\u308b\u4e9c\u925b\u306e\u6fc3\u5ea6\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u6e2c\u5b9a\u304c\u884c\u308f\u308c\u3001\u66dd\u9732\u6642\u9593\u3092\u9577\u304f\u3059\u308b\u306b\u3064\u308c\u3066\u6210\u819c\u304c\u7d30\u5b54\u306e\u5965\u3078\u6bb5\u968e\u7684\u306b\u6d78\u900f\u3057\u3066\u3044\u304f\u69d8\u5b50\u304c\u6349\u3048\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6761\u4ef6\u3055\u3048\u6574\u3048\u3070\u3001ALD\u306f\u3053\u306e\u9818\u57df\u307e\u3067\u5c4a\u304d\u307e\u3059\u3002\u305f\u3060\u3057\u3053\u308c\u306f\u7279\u5b9a\u306e\u967d\u6975\u9178\u5316\u30a2\u30eb\u30df\u30ca\u7d30\u5b54\u3068\u7279\u5b9a\u306eALD\u5316\u5b66\u7cfb\u3067\u306e\u5b9f\u8a3c\u3067\u3042\u308a\u3001\u3042\u3089\u3086\u308bALD\u30d7\u30ed\u30bb\u30b9\u306e\u5230\u9054\u9650\u754c\u3092\u793a\u3059\u3082\u306e\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u305d\u3057\u3066\u3082\u3046\u3072\u3068\u3064\u91cd\u8981\u306a\u524d\u63d0\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u7d30\u5b54\u306e\u5185\u58c1\u3092\u8584\u304f\u8986\u3063\u305f\u5834\u5408\u306e\u8a71\u3067\u3059\u3002\u819c\u539a\u304c\u7d30\u5b54\u306e\u5f84\u306b\u5bfe\u3057\u3066\u5341\u5206\u306b\u8584\u3044\u305f\u3081\u3001\u6210\u819c\u304c\u9032\u3093\u3067\u3082\u7d30\u5b54\u306e\u5f84\u306f\u307b\u3068\u3093\u3069\u5909\u308f\u3089\u305a\u3001\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306f\u307b\u307c\u4e00\u5b9a\u306b\u4fdd\u305f\u308c\u307e\u3059\u3002\u3060\u304b\u3089\u3053\u305d\u3001\u6700\u521d\u306b\u6c7a\u3081\u305f\u66dd\u9732\u6761\u4ef6\u304c\u6700\u5f8c\u307e\u3067\u901a\u7528\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5b54\u3092\u57cb\u3081\u308b\u3068\u3053\u308d\u307e\u3067\u819c\u3092\u6210\u9577\u3055\u305b\u308b\u5834\u5408\u306f\u3001\u4e8b\u60c5\u304c\u5909\u308f\u308a\u307e\u3059\u3002\u3053\u308c\u306b\u3064\u3044\u3066\u306f\u5f8c\u8ff0\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">ALD\u3067\u3082\u5747\u4e00\u306b\u306a\u3089\u306a\u3044\u6761\u4ef6<\/h3>\n\n\n\n<p>\u4e00\u65b9\u3067\u3001\u3046\u307e\u304f\u3044\u304b\u306a\u3044\u30b1\u30fc\u30b9\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u30d1\u30fc\u30b8\u4e0d\u8db3\u3002 \u524d\u99c6\u4f53\u304c\u6392\u6c17\u3057\u304d\u308c\u306a\u3044\u3046\u3061\u306b\u53cd\u5fdc\u5264\u3092\u4f9b\u7d66\u3059\u308b\u3068\u6c17\u76f8\u53cd\u5fdc\u304c\u8d77\u304d\u3001\u81ea\u5df1\u5236\u9650\u6027\u304c\u5931\u308f\u308c\u307e\u3059\u3002\u6df1\u3044\u69cb\u9020\u307b\u3069\u30d1\u30fc\u30b8\u306b\u6642\u9593\u304c\u304b\u304b\u308b\u305f\u3081\u3001\u4f9b\u7d66\u6642\u9593\u3060\u3051\u3067\u306a\u304f\u30d1\u30fc\u30b8\u6642\u9593\u306e\u5ef6\u9577\u3082\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u6e29\u5ea6\u6761\u4ef6\u306e\u9038\u8131\u3002 \u4f4e\u3059\u304e\u308c\u3070\u524d\u99c6\u4f53\u304c\u51dd\u7e2e\u307e\u305f\u306f\u53cd\u5fdc\u304c\u5b8c\u7d50\u305b\u305a\u3001\u9ad8\u3059\u304e\u308c\u3070\u71b1\u5206\u89e3\u3057\u307e\u3059\u3002\u3069\u3061\u3089\u3082\u81ea\u5df1\u5236\u9650\u6027\u3092\u58ca\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6df1\u90e8\u3067\u306e\u53cd\u5fdc\u7269\u306e\u67af\u6e07\u3002 \u66dd\u9732\u91cf\u304c\u8db3\u308a\u306a\u3051\u308c\u3070\u5165\u53e3\u4ed8\u8fd1\u3067\u6d88\u8cbb\u3055\u308c\u3001\u5965\u307e\u3067\u5c4a\u304d\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u30ac\u30b9\u304c\u5230\u9054\u3067\u304d\u306a\u3044\u9589\u7a7a\u9593\u3002 \u5bc6\u9589\u3055\u308c\u305f\u5185\u90e8\u306b\u306f\u3001ALD\u3067\u3082\u6210\u819c\u3067\u304d\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u2192 \u9762\u5185\u3067\u306e\u819c\u539a\u5206\u5e03\u306b\u3064\u3044\u3066\u306f<a href=\"https:\/\/agus.co.jp\/?p=8413\">ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\uff09\u306e\u300c\u9762\u5185\u5206\u5e03\u300d\u5fb9\u5e95\u89e3\u8aac\uff1a\u539f\u7406\u30fb\u91cd\u8981\u6027\u30fb\u8ab2\u984c<\/a>\u3067\u6271\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c8\u30ec\u30f3\u30c1\u57cb\u3081\u8fbc\u307f\u6210\u819c \u2014 \u30dc\u30a4\u30c9\u3068\u30b7\u30fc\u30e0\u3092\u3069\u3046\u907f\u3051\u308b\u304b<\/h2>\n\n\n\n<p>\u3053\u3053\u304b\u3089\u306f\u300c\u57cb\u3081\u308b\u300d\u5074\u306e\u8a71\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u3067\u57cb\u3081\u308b\u3068\u5185\u90e8\u306b\u6b20\u9665\u304c\u6b8b\u308b\u3053\u3068\u304c\u3042\u308b<\/h3>\n\n\n\n<p>\u524d\u7bc0\u3067\u306f\u3001\u30a2\u30b9\u30da\u30af\u30c8\u6bd410\u00b3\u30aa\u30fc\u30c0\u30fc\u306e\u7d30\u5b54\u3067\u3082ALD\u304c\u5747\u4e00\u306b\u88ab\u8986\u3067\u304d\u308b\u3053\u3068\u3092\u898b\u307e\u3057\u305f\u3002\u305d\u308c\u306a\u3089\u3070\u57cb\u3081\u8fbc\u307f\u306f\u306a\u304a\u3055\u3089\u5f97\u610f\u306a\u306f\u305a\u3060\u3068\u601d\u308f\u308c\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u304c\u3001\u8a71\u306f\u9006\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u9055\u3044\u306f\u3001\u6210\u819c\u4e2d\u306b\u69cb\u9020\u304c\u5909\u5316\u3059\u308b\u304b\u3069\u3046\u304b\u3067\u3059\u3002\u5185\u58c1\u3092\u8584\u304f\u8986\u3046\u3060\u3051\u306a\u3089\u3001\u6e9d\u3084\u5b54\u306e\u5f62\u306f\u6700\u521d\u304b\u3089\u6700\u5f8c\u307e\u3067\u307b\u3068\u3093\u3069\u5909\u308f\u308a\u307e\u305b\u3093\u3002\u3057\u304b\u3057\u57cb\u3081\u8fbc\u307f\u3067\u306f\u3001\u819c\u539a\u304c\u6e9d\u306e\u5e45\u306e\u534a\u5206\u306b\u9054\u3059\u308b\u307e\u3067\u6210\u9577\u3055\u305b\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u819c\u304c\u80b2\u3064\u306b\u3064\u308c\u3066\u3001\u6b8b\u308a\u306e\u9699\u9593\u306f\u3069\u3093\u3069\u3093\u72ed\u304f\u306a\u3063\u3066\u3044\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u3068\u304d\u751f\u3058\u3046\u308b\u6b20\u9665\u306f\u3001\u6a5f\u69cb\u306e\u7570\u306a\u308b2\u7a2e\u985e\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u3072\u3068\u3064\u306f\u30b7\u30fc\u30e0\u3067\u3059\u3002<\/strong> \u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u3067\u30ae\u30e3\u30c3\u30d7\u3092\u57cb\u3081\u308b\u3068\u3001\u4e21\u5074\u58c1\u304b\u3089\u307b\u307c\u540c\u3058\u539a\u3055\u3067\u819c\u304c\u6210\u9577\u3057\u3001\u4e2d\u592e\u3067\u6210\u9577\u9762\u3069\u3046\u3057\u304c\u5408\u6d41\u3057\u307e\u3059\u3002\u5341\u5206\u306a\u66dd\u9732\u3092\u7dad\u6301\u3067\u304d\u3066\u3044\u3066\u3082\u3001\u5408\u6d41\u90e8\u306b\u7dda\u72b6\u306e\u30b7\u30fc\u30e0\u3084\u5bc6\u5ea6\u5dee\u304c\u6b8b\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u3082\u3046\u3072\u3068\u3064\u306f\u30dc\u30a4\u30c9\u3067\u3059\u3002<\/strong> 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class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"440\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image4-2-1024x440.png\" alt=\"\u3010\u56f31\uff5c\u30b7\u30fc\u30e0\u3068\u30dc\u30a4\u30c9\u306e\u9055\u3044\u3011\" class=\"wp-image-10066\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image4-2-1024x440.png 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image4-2-300x129.png 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image4-2-768x330.png 768w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image4-2.png 1500w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u3064\u307e\u308a\u3001\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u306f\u300c\u8986\u3046\u300d\u305f\u3081\u306b\u306f\u7406\u60f3\u7684\u3067\u3082\u3001\u300c\u57cb\u3081\u308b\u300d\u3068\u3044\u3046\u76ee\u7684\u306b\u5bfe\u3057\u3066\u306f\u305d\u308c\u3060\u3051\u3067\u306f\u8db3\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u3068\u3044\u3046\u8003\u3048\u65b9<\/strong><\/h3>\n\n\n\n<p>\u3067\u306f\u3001\u3069\u3046\u3059\u308c\u3070\u30b7\u30fc\u30e0\u3084\u30dc\u30a4\u30c9\u3092\u907f\u3051\u3089\u308c\u308b\u304b\u3002<\/p>\n\n\n\n<p>\u7b54\u3048\u306f\u3001\u7a74\u306e\u5e95\u304b\u3089\u512a\u5148\u7684\u306b\u6210\u9577\u3055\u305b\u308b\u3053\u3068\u3067\u3059\u3002\u5074\u58c1\u306e\u6210\u9577\u3092\u6291\u3048\u3001\u6df1\u90e8\u306e\u6210\u9577\u901f\u5ea6\u3092\u9ad8\u304f\u3059\u308b\u3002\u305d\u3046\u3059\u308c\u3070\u6750\u6599\u304c\u4e0b\u304b\u3089\u7a4d\u307f\u4e0a\u304c\u3063\u3066\u3044\u304d\u3001\u6750\u6599\u304c\u4e0b\u304b\u3089\u7a4d\u307f\u4e0a\u304c\u308b\u3053\u3068\u3067\u3001\u5165\u53e3\u306e\u5148\u884c\u9589\u585e\u3084\u4e2d\u592e\u306e\u30b7\u30fc\u30e0\u3092\u6291\u3048\u3084\u3059\u304f\u306a\u308a\u307e\u3059\u3002\u3053\u308c\u3092\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u3001\u3042\u308b\u3044\u306f\u30b9\u30fc\u30d1\u30fc\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u9577\u3068\u547c\u3073\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8a00\u3044\u63db\u3048\u308c\u3070\u3001\u57cb\u3081\u8fbc\u307f\u3067\u5fc5\u8981\u306a\u306e\u306f\u300c\u5747\u4e00\u306b\u4ed8\u3051\u308b\u6280\u8853\u300d\u3067\u306f\u306a\u304f\u300c\u610f\u56f3\u7684\u306b\u4e0d\u5747\u4e00\u306b\u4ed8\u3051\u308b\u6280\u8853\u300d\u3067\u3059\u3002\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u3068\u306f\u767a\u60f3\u304c\u9006\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u3010\u56f32\uff5c\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u3068\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u306e\u5145\u586b\u904e\u7a0b\u306e\u9055\u3044\u3011<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"788\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image7-1-1024x788.png\" alt=\"\u3010\u56f32\uff5c\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u3068\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u306e\u5145\u586b\u904e\u7a0b\u306e\u9055\u3044\u3011\" class=\"wp-image-10065\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image7-1-1024x788.png 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image7-1-300x231.png 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image7-1-768x591.png 768w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image7-1.png 1500w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u96fb\u89e3\u9285\u3081\u3063\u304d\u306b\u3088\u308b\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u57cb\u3081\u8fbc\u307f<\/strong><\/h3>\n\n\n\n<p>\u3053\u306e\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u304c\u3082\u3063\u3068\u3082\u6210\u719f\u3057\u3066\u3044\u308b\u306e\u304c\u3001LSI\u306e\u9285\u914d\u7dda\u3092\u5f62\u6210\u3059\u308b\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002\u7d76\u7e01\u819c\u306b\u6e9d\u3084\u5b54\u3092\u6398\u308a\u3001\u305d\u3053\u3078\u96fb\u89e3\u3081\u3063\u304d\u3067\u9285\u3092\u5145\u586b\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5236\u5fa1\u306e\u9375\u3092\u63e1\u308b\u306e\u306f\u3001\u3081\u3063\u304d\u6d74\u306b\u52a0\u3048\u3089\u308c\u308b\u5fae\u91cf\u306e\u6dfb\u52a0\u5264\u3067\u3059\u3002\u5f79\u5272\u306e\u7570\u306a\u308b3\u7a2e\u985e\u304c\u7d44\u307f\u5408\u308f\u305b\u3066\u4f7f\u308f\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30b5\u30d7\u30ec\u30c3\u30b5<\/strong>\uff08\u30dd\u30ea\u30a8\u30c1\u30ec\u30f3\u30b0\u30ea\u30b3\u30fc\u30eb\u306a\u3069\uff09\uff1a\u9285\u306e\u6790\u51fa\u3092\u6291\u5236\u3059\u308b<\/li>\n\n\n\n<li><strong>\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30bf<\/strong>\uff08SPS\u306a\u3069\uff09\uff1a\u9285\u306e\u6790\u51fa\u3092\u4fc3\u9032\u3059\u308b<\/li>\n\n\n\n<li><strong>\u30ec\u30d9\u30e9\u30fc<\/strong>\uff1a\u7a81\u51fa\u90e8\u306a\u3069\u306e\u6210\u9577\u3092\u6291\u3048\u308b<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u307b\u304b\u3001\u5869\u5316\u7269\u30a4\u30aa\u30f3\u3082\u6dfb\u52a0\u5264\u306e\u4f5c\u7528\u306b\u95a2\u4e0e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u304c\u6210\u7acb\u3059\u308b\u4ed5\u7d44\u307f\u306e\u3072\u3068\u3064\u304c\u3001\u6dfb\u52a0\u5264\u306e\u5206\u5b50\u30b5\u30a4\u30ba\u306e\u9055\u3044\u3067\u3059\u3002\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30bf\u3068\u3057\u3066\u4f7f\u308f\u308c\u308bSPS\u306f\u5206\u5b50\u91cf\u304c\u5c0f\u3055\u304f\u3001\u7269\u7406\u7684\u306a\u5f62\u72b6\u3082\u5c0f\u3055\u3044\u305f\u3081\u3001\u30c8\u30ec\u30f3\u30c1\u3084\u30d3\u30a2\u306e\u5185\u90e8\u306b\u4fb5\u5165\u3057\u3084\u3059\u3044\u3002\u305d\u306e\u7d50\u679c\u3001\u30d1\u30bf\u30fc\u30f3\u5185\u90e8\u3067\u306f\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30bf\u306e\u30b5\u30d7\u30ec\u30c3\u30b5\u306b\u5bfe\u3059\u308b\u76f8\u5bfe\u6fc3\u5ea6\u304c\u9ad8\u304f\u306a\u308a\u3001\u6790\u51fa\u901f\u5ea6\u304c\u76f8\u5bfe\u7684\u306b\u901f\u304f\u306a\u308a\u307e\u3059\u3002\u7a74\u306e\u4e2d\u3060\u3051\u6210\u9577\u304c\u901f\u304f\u306a\u308b\u308f\u3051\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u305f\u3060\u3057\u3001\u5206\u5b50\u30b5\u30a4\u30ba\u3060\u3051\u3067\u6c7a\u307e\u308b\u308f\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u5404\u6dfb\u52a0\u5264\u306e\u5438\u7740\u3068\u8131\u96e2\u3001\u8868\u9762\u88ab\u8986\u7387\u3001\u57cb\u3081\u8fbc\u307f\u304c\u9032\u3080\u306b\u3064\u308c\u305f\u5f62\u72b6\u5909\u5316\u306b\u3068\u3082\u306a\u3046\u30a2\u30af\u30bb\u30e9\u30ec\u30fc\u30bf\u306e\u6fc3\u7e2e\u306a\u3069\u3082\u95a2\u4fc2\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u6210\u819c\u306e\u5206\u696d<\/strong><\/h3>\n\n\n\n<p>\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u5de5\u7a0b\u3092\u8ffd\u3046\u3068\u3001\u3053\u3053\u307e\u3067\u8aac\u660e\u3057\u3066\u304d\u305f\u300c\u8986\u3046\u300d\u3068\u300c\u57cb\u3081\u308b\u300d\u304c\u5b9f\u969b\u306b\u5206\u696d\u3057\u3066\u3044\u308b\u69d8\u5b50\u304c\u898b\u3048\u3066\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305a\u5c64\u9593\u7d76\u7e01\u819c\u3092\u5806\u7a4d\u3057\u3001\u6240\u5b9a\u306e\u9818\u57df\u306b\u30d3\u30a2\u5b54\u3068\u914d\u7dda\u6e9d\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u6b21\u306b\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u3068Cu\u30b7\u30fc\u30c9\u819c\u3092\u6210\u819c\u3057\u3001\u305d\u306e\u4e0a\u304b\u3089\u96fb\u89e3\u3081\u3063\u304d\u3067Cu\u819c\u3092\u6210\u819c\u3057\u3066\u57cb\u3081\u8fbc\u3080\u3002\u6700\u5f8c\u306bCMP\uff08\u5316\u5b66\u7684\u6a5f\u68b0\u7684\u7814\u78e8\uff09\u3067\u4f59\u5206\u306aCu\u819c\u3092\u9664\u53bb\u3057\u3001Cu\u8868\u9762\u4e0a\u306b\u30d0\u30ea\u30a2\u7d76\u7e01\u819c\u3092\u6210\u819c\u3057\u307e\u3059\u3002\u3053\u306e\u5de5\u7a0b\u3092\u7e70\u308a\u8fd4\u3059\u3053\u3068\u3067\u591a\u5c64\u306eCu\u914d\u7dda\u69cb\u9020\u304c\u3067\u304d\u3042\u304c\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u3010\u56f33\uff5c\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u300c\u8986\u3046\u300d\u5de5\u7a0b\u3068\u300c\u57cb\u3081\u308b\u300d\u5de5\u7a0b\u3011<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"369\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image5-1024x369.png\" alt=\"\u3010\u56f33\uff5c\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u300c\u8986\u3046\u300d\u5de5\u7a0b\u3068\u300c\u57cb\u3081\u308b\u300d\u5de5\u7a0b\u3011\" class=\"wp-image-10067\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image5-1024x369.png 1024w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image5-300x108.png 300w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image5-768x276.png 768w, https:\/\/agus.co.jp\/wp-content\/uploads\/2026\/08\/image5.png 1500w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u3053\u3053\u3067\u6ce8\u76ee\u3057\u305f\u3044\u306e\u304c\u3001\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u3068\u30b7\u30fc\u30c9\u819c\u306e\u5f79\u5272\u3067\u3059\u3002\u30d0\u30ea\u30a2\u30e1\u30bf\u30eb\u306f\u7d76\u7e01\u819c\u3078\u306eCu\u306e\u62e1\u6563\u3092\u9632\u304e\u3001\u30b7\u30fc\u30c9\u819c\u306f\u96fb\u89e3\u3081\u3063\u304d\u306e\u8d77\u70b9\u3068\u306a\u308a\u307e\u3059\u3002\u3069\u3061\u3089\u3082\u6e9d\u306e\u5e95\u304b\u3089\u5074\u58c1\u307e\u3067\u3001\u8584\u304f\u9023\u7d9a\u7684\u306b\u8986\u308f\u308c\u3066\u3044\u306a\u3051\u308c\u3070\u6a5f\u80fd\u3057\u307e\u305b\u3093\u3002\u30b7\u30fc\u30c9\u819c\u304c\u6e9d\u306e\u4e2d\u306b\u5341\u5206\u306b\u4ed8\u3044\u3066\u3044\u306a\u3051\u308c\u3070\u3001\u305d\u306e\u5148\u306e\u57cb\u3081\u8fbc\u307f\u81ea\u4f53\u304c\u6210\u7acb\u3057\u306a\u3044\u304b\u3089\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u5f93\u6765\u578b\u306eCu\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u3053\u306e\u5de5\u7a0b\u306b\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\uff08PVD\uff09\u304c\u5e83\u304f\u4f7f\u308f\u308c\u3066\u304d\u307e\u3057\u305f\u3002\u914d\u7dda\u6750\u6599\u306e\u4e3b\u6d41\u304cAl\u304b\u3089Cu\u306b\u79fb\u308a\u3001\u30c0\u30de\u30b7\u30f3\u69cb\u9020\u3068\u3081\u3063\u304d\u306b\u3088\u308b\u57cb\u3081\u8fbc\u307f\u306b\u5909\u308f\u3063\u305f\u3042\u3068\u3082\u3001\u30b7\u30fc\u30c9\u5c64\u3068\u30d0\u30ea\u30a2\u5c64\uff08Ta(N)\u306a\u3069\uff09\u306e\u5f62\u6210\u306b\u306f\u30b9\u30d1\u30c3\u30bf\u30d7\u30ed\u30bb\u30b9\u304c\u4f7f\u308f\u308c\u7d9a\u3051\u3066\u3044\u307e\u3059\u3002PVD\u306f\u73fe\u5728\u3082\u91cd\u8981\u306a\u624b\u6cd5\u3067\u3059\u304c\u3001\u5148\u7aef\u914d\u7dda\u3067\u306fALD\u3001CVD\u306a\u3069\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u4f8b\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3064\u307e\u308a\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u300c\u8986\u3046\u300d\u5de5\u7a0b\u3068\u300c\u57cb\u3081\u308b\u300d\u5de5\u7a0b\u3092\u660e\u78ba\u306b\u5206\u3051\u3066\u7d44\u307f\u5408\u308f\u305b\u305f\u30d7\u30ed\u30bb\u30b9\u3060\u3068\u8a00\u3048\u307e\u3059\u3002\u7247\u65b9\u3060\u3051\u3067\u306f\u914d\u7dda\u306f\u3067\u304d\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u305d\u3057\u3066\u5fae\u7d30\u5316\u304c\u9032\u3080\u306b\u3064\u308c\u3001\u3053\u306e\u300c\u8986\u3046\u300d\u5de5\u7a0b\u306e\u96e3\u6613\u5ea6\u306f\u4e0a\u304c\u308a\u7d9a\u3051\u3066\u3044\u307e\u3059\u3002\u6e9d\u304c\u72ed\u304f\u6df1\u304f\u306a\u308b\u307b\u3069\u3001\u8584\u304f\u9023\u7d9a\u7684\u306b\u5074\u58c1\u3092\u8986\u3046\u3053\u3068\u304c\u96e3\u3057\u304f\u306a\u308b\u304b\u3089\u3067\u3059\u3002\u6bb5\u5dee\u88ab\u8986\u6027\u3078\u306e\u8981\u6c42\u304c\u53b3\u3057\u304f\u306a\u308a\u7d9a\u3051\u3066\u3044\u308b\u9818\u57df\u3067\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u7528\u9014\u304b\u3089\u9078\u3076<\/h2>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u30d0\u30ea\u30a2\u819c\u30fb\u7d76\u7e01\u819c\u30fb\u30e9\u30a4\u30ca\u30fc \u2192 \u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c<\/h3>\n\n\n\n<p>\u7a74\u306e\u5185\u58c1\u3092\u8584\u304f\u5747\u4e00\u306b\u8986\u3044\u305f\u3044\u5834\u5408\u306f\u3001ALD\u304c\u7b2c\u4e00\u9078\u629e\u3067\u3059\u3002\u819c\u539a\u304c\u30b5\u30a4\u30af\u30eb\u6570\u3067\u6c7a\u307e\u308b\u305f\u3081\u3001nm\u30aa\u30fc\u30c0\u30fc\u306e\u8a2d\u8a08\u5024\u3092\u305d\u306e\u307e\u307e\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u9ad8\u3044\u307b\u3069\u3001\u4ed6\u306e\u624b\u6cd5\u3068\u306e\u5dee\u306f\u958b\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u914d\u7dda\u30fb\u96fb\u6975\u306e\u57cb\u3081\u8fbc\u307f \u2192 \u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u3081\u3063\u304d\u3001CVD<\/h3>\n\n\n\n<p>\u7a74\u3092\u5b8c\u5168\u306b\u5145\u586b\u3057\u305f\u3044\u5834\u5408\u306f\u3001\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u6210\u819c\u304c\u5fc5\u8981\u3067\u3059\u3002\u9285\u914d\u7dda\u3067\u3042\u308c\u3070\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u96fb\u89e3\u3081\u3063\u304d\u3067\u3059\u3002\u3053\u306e\u5834\u5408\u3001\u57cb\u3081\u8fbc\u307f\u306e\u524d\u6bb5\u3068\u3057\u3066\u30d0\u30ea\u30a2\u819c\u3068\u30b7\u30fc\u30c9\u819c\u3092\u6e9d\u306e\u5185\u58c1\u306b\u5f62\u6210\u3059\u308b\u5de5\u7a0b\u304c\u5225\u9014\u5fc5\u8981\u306b\u306a\u308a\u307e\u3059\u3002\u6750\u6599\u306b\u3088\u3063\u3066\u306fCVD\u3082\u9078\u629e\u80a2\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">MEMS\u30fb\u30bb\u30f3\u30b5\u30fb\u591a\u5b54\u8cea\u4f53 \u2192 ALD<\/h3>\n\n\n\n<p>\u8907\u96d1\u306a\u4e09\u6b21\u5143\u69cb\u9020\u3084\u591a\u5b54\u8cea\u6750\u6599\u3067\u306f\u3001\u30ac\u30b9\u304c\u5230\u9054\u3067\u304d\u308b\u3053\u3068\u304c\u305d\u306e\u307e\u307e\u6210\u819c\u53ef\u80fd\u6027\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002\u7c89\u4f53\u3084\u591a\u5b54\u8cea\u4f53\u3078\u306e\u6210\u819c\u306b\u3064\u3044\u3066\u306f\u3001\u5225\u8a18\u4e8b\u3067\u8a73\u3057\u304f\u6271\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?p=8725\"> \u7c89\u4f53\u3078\u306e\u539f\u5b50\u5c64\u5806\u7a4d\uff08ALD\uff09\u6280\u8853\uff1a\u6b21\u4e16\u4ee3\u9ad8\u6a5f\u80fd\u6750\u6599\u3092\u5275\u51fa\u3059\u308b\u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/a><\/p>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"\u7c89\u4f53\u6210\u819c\u7528ALD\u88c5\u7f6e\u300cSAL1000B\u300d\u306b\u3088\u308b\u9285\u7c89\u672b\u3078\u306eAl\u2082O\u2083\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u5927\u516c\u958b\u3010\u83c5\u88fd\u4f5c\u6240\u3011\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/I57N57s0Aiw?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u7814\u7a76\u958b\u767a\u306e\u5c11\u91cf\u30fb\u8a66\u4f5c \u2192 \u5353\u4e0aALD\u3068\u3044\u3046\u9078\u629e\u80a2<\/h3>\n\n\n\n<p>\u91cf\u7523\u30e9\u30a4\u30f3\u3092\u524d\u63d0\u3068\u3057\u305f\u88c5\u7f6e\u3068\u3001\u7814\u7a76\u958b\u767a\u3067\u6570\u679a\u306e\u30a6\u30a8\u30cf\u30fc\u3092\u8a66\u3057\u305f\u3044\u5834\u5408\u3068\u3067\u306f\u3001\u6700\u9069\u89e3\u304c\u5909\u308f\u308a\u307e\u3059\u3002\u5c11\u91cf\u30fb\u8a66\u4f5c\u6bb5\u968e\u3067\u3042\u308c\u3070\u3001\u5353\u4e0a\u30b5\u30a4\u30ba\u306e\u7814\u7a76\u958b\u767a\u7528ALD\u88c5\u7f6e\u3068\u3044\u3046\u9078\u629e\u80a2\u304c\u3042\u308a\u307e\u3059\u3002\u8a2d\u7f6e\u30b9\u30da\u30fc\u30b9\u3092\u53d6\u3089\u305a\u3001\u6761\u4ef6\u51fa\u3057\u306e\u81ea\u7531\u5ea6\u304c\u9ad8\u3044\u3053\u3068\u304c\u5229\u70b9\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?p=7476\"> ALD\u88c5\u7f6e\u3068\u306f\uff1f\u539f\u7406\u3084\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u30fb\u88c5\u7f6e\u306e\u9078\u3073\u65b9\u307e\u3067\u89e3\u8aac<\/a><\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?p=9803\">\u3010\u5927\u5b66\u30fb\u7814\u7a76\u5ba4\u5411\u3051\u3011\u9650\u3089\u308c\u305f\u30b9\u30da\u30fc\u30b9\u3067\u6210\u819c\u74b0\u5883\u3092\u69cb\u7bc9\uff01\u5c0f\u578b\u6210\u819c\u88c5\u7f6e\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba<\/a><\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u305a\u306fALD\u30fb\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u30c6\u30b9\u30c8\u6210\u819c\u3067\u78ba\u304b\u3081\u308b<\/h2>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"\u88c5\u7f6e\u5c0e\u5165\u524d\u306b\u6210\u819c\u3092\u78ba\u8a8d\u3067\u304d\u308b\uff01\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u306e\u3054\u7d39\u4ecb\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/sXJXwD1TUEk?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n\n\n\n<p>\u3053\u3053\u307e\u3067\u898b\u3066\u304d\u305f\u3068\u304a\u308a\u3001\u5fae\u7d30\u69cb\u9020\u3078\u306e\u6210\u819c\u306f\u300c\u3069\u306e\u624b\u6cd5\u3092\u9078\u3076\u304b\u300d\u3060\u3051\u3067\u306f\u6c7a\u307e\u308a\u307e\u305b\u3093\u3002\u540c\u3058ALD\u3067\u3082\u3001\u5bfe\u8c61\u306e\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306b\u3088\u3063\u3066\u5fc5\u8981\u306a\u66dd\u9732\u91cf\u306f\u5927\u304d\u304f\u5909\u308f\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3060\u304b\u3089\u3053\u305d\u3001\u88c5\u7f6e\u306e\u5c0e\u5165\u3092\u691c\u8a0e\u3057\u3066\u3044\u308b\u6bb5\u968e\u3067\u3042\u308c\u3070\u3001<strong>\u81ea\u5206\u306e\u30b5\u30f3\u30d7\u30eb\u3067\u4e00\u5ea6\u8a66\u3057\u3066\u307f\u308b\u306e\u304c\u6700\u77ed\u3067\u3059\u3002<\/strong><\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u3067\u306f\u3001\u30c7\u30e2\u6a5f\u3092\u7528\u3044\u305f\u6709\u511f\u306e\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u3092\u3054\u7528\u610f\u3057\u3066\u3044\u307e\u3059\u3002\u3054\u6765\u793e\u3044\u305f\u3060\u304d\u88c5\u7f6e\u8aac\u660e\u3092\u542b\u3081\u3066\u5b9f\u65bd\u3059\u308b\u65b9\u6cd5\u3068\u3001\u30b5\u30f3\u30d7\u30eb\u3092\u304a\u9810\u304b\u308a\u3057\u3066\u5f53\u793e\u3067\u6210\u819c\u3059\u308b\u65b9\u6cd5\u306e2\u901a\u308a\u304b\u3089\u304a\u9078\u3073\u3044\u305f\u3060\u3051\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u88c5\u7f6e\u5c0e\u5165\u3092\u524d\u63d0\u3068\u3057\u306a\u3044\u3054\u4f9d\u983c\u306b\u3082\u6709\u511f\u3067\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u304c\u3001\u51e6\u7406\u91cf\u3084\u819c\u8cea\u4fdd\u8a3c\u306b\u306f\u4e00\u5b9a\u306e\u5236\u9650\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u2192 <a href=\"https:\/\/agus.co.jp\/?p=9949\">\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u306e\u8a73\u7d30\u306f\u3053\u3061\u3089<\/a><\/p>\n\n\n\n<div style=\"height:32px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u5fae\u7d30\u69cb\u9020\u306e\u7a74\u306e\u4e2d\u3078\u306e\u6210\u819c\u306b\u3064\u3044\u3066\u3001\u62bc\u3055\u3048\u308b\u3079\u304d\u70b9\u3092\u6574\u7406\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u307e\u305a\u300c\u8986\u3046\u300d\u306e\u304b\u300c\u57cb\u3081\u308b\u300d\u306e\u304b\u3092\u6c7a\u3081\u308b\u3002<\/strong> \u30d0\u30ea\u30a2\u819c\u30fb\u7d76\u7e01\u819c\u30fb\u30e9\u30a4\u30ca\u30fc\u306a\u3089\u8986\u3046\u3001\u914d\u7dda\u30fb\u96fb\u6975\u306a\u3089\u57cb\u3081\u308b\u3002\u6c42\u3081\u308b\u7d50\u679c\u304c\u9055\u3048\u3070\u3001\u6700\u9069\u306a\u624b\u6cd5\u3082\u5909\u308f\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u8986\u3046\u306a\u3089ALD\u3002<\/strong> \u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u306b\u3088\u308a\u3001\u5341\u5206\u306a\u66dd\u9732\u304c\u78ba\u4fdd\u3067\u304d\u308c\u3070\u5f62\u72b6\u306b\u3088\u3089\u305a\u819c\u539a\u5dee\u3092\u6291\u3048\u3089\u308c\u307e\u3059\u3002\u30a2\u30b9\u30da\u30af\u30c8\u6bd410\u00b3\u30aa\u30fc\u30c0\u30fc\u306e\u7d30\u5b54\u3067\u3082\u5747\u4e00\u88ab\u8986\u304c\u5b9f\u8a3c\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u305f\u3060\u3057\u5fc5\u8981\u306a\u66dd\u9732\u91cf\u306f\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u9ad8\u3044\u307b\u3069\u6025\u306b\u5897\u3048\u308b\u3002<\/strong> \u5e73\u5766\u57fa\u677f\u306e\u30ec\u30b7\u30d4\u306f\u6d41\u7528\u3067\u304d\u307e\u305b\u3093\u3002\u66dd\u9732\u6761\u4ef6\u3068\u30d1\u30fc\u30b8\u6761\u4ef6\u306e\u518d\u8a2d\u8a08\u304c\u524d\u63d0\u3067\u3059\u3002<\/p>\n\n\n\n<p><strong>\u57cb\u3081\u308b\u306a\u3089\u30dc\u30c8\u30e0\u30a2\u30c3\u30d7\u3002<\/strong> \u30b3\u30f3\u30d5\u30a9\u30fc\u30de\u30eb\u6210\u819c\u3067\u306f\u3001\u5408\u6d41\u90e8\u306b\u30b7\u30fc\u30e0\u304c\u6b8b\u3063\u305f\u308a\u3001\u66dd\u9732\u4e0d\u8db3\u3067\u30d4\u30f3\u30c1\u30aa\u30d5\u3057\u3066\u30dc\u30a4\u30c9\u304c\u751f\u3058\u305f\u308a\u3057\u307e\u3059\u3002\u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u6dfb\u52a0\u5264\u306e\u50cd\u304d\u306b\u3088\u3063\u3066\u3001\u610f\u56f3\u7684\u306b\u7a74\u306e\u5e95\u306e\u6210\u9577\u3092\u901f\u3081\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u4e21\u8005\u306f\u5206\u696d\u95a2\u4fc2\u306b\u3042\u308b\u3002<\/strong> \u30c0\u30de\u30b7\u30f3\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30d0\u30ea\u30a2\u819c\u3068\u30b7\u30fc\u30c9\u819c\u3092\u300c\u8986\u3046\u300d\u5de5\u7a0b\u3068\u3001Cu\u3092\u300c\u57cb\u3081\u308b\u300d\u5de5\u7a0b\u304c\u7d44\u307f\u5408\u308f\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u7247\u65b9\u3060\u3051\u3067\u306f\u914d\u7dda\u306f\u6210\u7acb\u3057\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u306f1946\u5e74\u306b\u5275\u696d\u3057\u30011993\u5e74\u304b\u3089\u771f\u7a7a\u88c5\u7f6e\u30fb\u771f\u7a7a\u6a5f\u5668\u306e\u88fd\u9020\u3092\u958b\u59cb\u3057\u307e\u3057\u305f\u30022010\u5e74\u306b\u306fALD\u88c5\u7f6e\u306e\u958b\u767a\u30fb\u88fd\u9020\u30fb\u8ca9\u58f2\u3092\u958b\u59cb\u3057\u3001\u5927\u5b66\u30fb\u7814\u7a76\u6a5f\u95a2\u3092\u4e2d\u5fc3\u3068\u3059\u308b\u7814\u7a76\u958b\u767a\u3092\u652f\u63f4\u3057\u3066\u3044\u307e\u3059\u3002\u7814\u7a76\u76ee\u7684\u306b\u5fdc\u3058\u305f\u88c5\u7f6e\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3001\u5c0e\u5165\u524d\u306e\u30c6\u30b9\u30c8\u6210\u819c\u306b\u3082\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5fae\u7d30\u69cb\u9020\u3078\u306e\u6210\u819c\u3067\u304a\u56f0\u308a\u306e\u969b\u306f\u3001\u304a\u6c17\u8efd\u306b\u3054\u76f8\u8ac7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p>\u2192<a href=\"https:\/\/agus.co.jp\/?cat=15\"> ALD\u88c5\u7f6e\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u88c5\u7f6e\uff09\u88fd\u54c1\u4e00\u89a7<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">\u53c2\u8003\u6587\u732e&nbsp;<\/p>\n\n\n\n<p class=\"has-small-font-size\">\u5409\u7530\u6b66\u53f2\u300c\u30d7\u30e9\u30ba\u30deALD\u306b\u3088\u308b\u4f4e\u6e29\u6210\u819c\u6280\u8853\u300d\u300e\u8868\u9762\u6280\u8853\u300f68\u5dfb12\u53f7, 2017, pp.679\u2013682.<br><a href=\"https:\/\/www.jstage.jst.go.jp\/article\/sfj\/68\/12\/68_679\/_pdf\/-char\/ja\">https:\/\/www.jstage.jst.go.jp\/article\/sfj\/68\/12\/68_679\/_pdf\/-char\/ja<\/a>&nbsp;<\/p>\n\n\n\n<p class=\"has-small-font-size\">\u4e0a\u91ce\u548c\u826f\u300c\u534a\u5c0e\u4f53\u96c6\u7a4d\u56de\u8def\u306e\u914d\u7dda\u306b\u7528\u3044\u308b\u9285\u3081\u3063\u304d\u819c\u306e\u4e0d\u7d14\u7269\u300d\u300e\u8868\u9762\u6280\u8853\u300f63\u5dfb4\u53f7, 2012, pp.227\u2013232.<br><a href=\"https:\/\/www.jstage.jst.go.jp\/article\/sfj\/63\/4\/63_227\/_pdf\/-char\/en\">https:\/\/www.jstage.jst.go.jp\/article\/sfj\/63\/4\/63_227\/_pdf\/-char\/en<\/a>&nbsp;<\/p>\n\n\n\n<p class=\"has-small-font-size\">\u4e2d\u6751\u53cb\u4e8c\u300cLSI\u306e\u914d\u7dda\u6280\u8853\u3068\u8868\u9762\u79d1\u5b66\u300d\u300e\u8868\u9762\u79d1\u5b66\u300f35\u5dfb5\u53f7, 2014, pp.236\u2013243.<br><a href=\"https:\/\/www.jstage.jst.go.jp\/article\/jsssj\/35\/5\/35_236\/_pdf\/-char\/ja\">https:\/\/www.jstage.jst.go.jp\/article\/jsssj\/35\/5\/35_236\/_pdf\/-char\/ja<\/a>&nbsp;<\/p>\n\n\n\n<p class=\"has-small-font-size\">\u6771\u4eac\u30a8\u30ec\u30af\u30c8\u30ed\u30f3\u300c\u65b0\u578b\u679a\u8449\u6210\u819c\u88c5\u7f6e Episode\u2122 1 \u2500 AI\u534a\u5c0e\u4f53\u306e\u9032\u5316\u3092\u4fc3\u3057\u3001\u65e5\u5e38\u3092\u5909\u3048\u308b\u6280\u8853\u3068\u306f\u300d2025\u5e74\u3002<br><a href=\"https:\/\/www.tel.co.jp\/blog\/all\/20250213_001.html\">https:\/\/www.tel.co.jp\/blog\/all\/20250213_001.html<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\">Gordon, R. G.; Hausmann, D. M.; Kim, E.; Shepard, J. &#8220;A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches.&#8221; Chemical Vapor Deposition, 2003, 9(2), 73\u201378. <a href=\"https:\/\/doi.org\/10.1002\/cvde.200390005\">https:\/\/doi.org\/10.1002\/cvde.200390005<\/a>&nbsp;<\/p>\n\n\n\n<p class=\"has-small-font-size\">Elam, J. W.; Routkevitch, D.; Mardilovich, P. P.; George, S. M. &#8220;Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition.&#8221; Chemistry of Materials, 2003, 15(18), 3507\u20133517. <a href=\"https:\/\/doi.org\/10.1021\/cm0303080\">https:\/\/doi.org\/10.1021\/cm0303080<\/a>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6df1\u3044\u30c8\u30ec\u30f3\u30c1\u3001\u7d30\u3044\u30d3\u30a2\u30db\u30fc\u30eb\u3001\u5fae\u7d30\u306a\u8cab\u901a\u5b54\u3002\u3053\u3046\u3057\u305f\u69cb\u9020\u306e\u5185\u90e8\u306b\u819c\u3092\u4ed8\u3051\u3088\u3046\u3068\u3057\u3066\u3001\u5165\u53e3\u3070\u304b\u308a\u304c\u539a\u304f\u306a\u308a\u3001\u5e95\u3084\u5074\u58c1\u306b\u306f\u819c\u304c\u5c4a\u304b\u306a\u3044\u3002\u3042\u308b\u3044\u306f\u5165\u53e3\u304c\u5148\u306b[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":10061,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-10060","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-news"],"acf":[],"yoast_head":"<!-- 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