{"id":4499,"date":"2022-01-24T12:46:00","date_gmt":"2022-01-24T03:46:00","guid":{"rendered":"https:\/\/agus.co.jp\/?p=4499"},"modified":"2023-12-27T14:33:42","modified_gmt":"2023-12-27T05:33:42","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%bd%e9%80%a0%e3%81%ab%e7%94%9f%e3%81%8b%e3%81%95%e3%82%8c%e3%82%8b%e3%80%8c%e8%96%84%e8%86%9c%e3%80%8d%e3%82%92%e3%82%8f%e3%81%8b%e3%82%8a%e3%82%84%e3%81%99%e3%81%8f","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=4499","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059"},"content":{"rendered":"\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh3.googleusercontent.com\/CD4nvFcU3MOOr4X7XTn0SPOm9UNMl1wa1NPZZ8uyarbK4my7kWz6CIbN7JKaZMT_DXhgZD9r3fm7ATWcFfGm7cNfygU6eFYUH2ZHJ9zsWaRoYx0TeP0LGvZKUa36WRJXu8Tf5lsg\" alt=\"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059\"\/><\/figure>\n\n\n\n<p>\u4e16\u754c\u7684\u306a\u534a\u5c0e\u4f53\u4e0d\u8db3\u306f\u4eca\u3084\u591a\u304f\u306e\u4f01\u696d\u304c\u6253\u6483\u3092\u53d7\u3051\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u9ad8\u6027\u80fd\u306a\u96fb\u5b50\u6a5f\u5668\u304c\u666e\u53ca\u3059\u308b\u4e2d\u3001\u81ea\u793e\u88fd\u54c1\u306b\u4f7f\u7528\u3059\u308b\u534a\u5c0e\u4f53\u3092\u3081\u3050\u308a\u5954\u8d70\u3057\u3066\u3044\u308b\u72b6\u6cc1\u3002<\/p>\n\n\n\n<p>\u4e0d\u8db3\u3068\u306a\u3063\u305f\u7406\u7531\u306e\u4e00\u3064\u306b\u3001\u534a\u5c0e\u4f53\u306e\u751f\u7523\u306b\u6642\u9593\u304c\u304b\u304b\u308b\u3053\u3068\u3082\u8981\u56e0\u306b\u3002<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306f\u901a\u5e38\u3001\u6750\u6599\u3092\u6295\u5165\u3057\u3066\u304b\u3089\u88fd\u54c1\u304c\u3067\u304d\u3042\u304c\u308b\u307e\u3067\u306b3\u30ab\u6708\u4ee5\u4e0a\u306e\u6642\u9593\u304c\u304b\u304b\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u3092\u88fd\u9020\u3059\u308b\u306b\u306f\u591a\u6570\u306e\u5de5\u7a0b\u3092\u7d4c\u3066\u5b8c\u74a7\u306b\u6a5f\u80fd\u3092\u679c\u305f\u3059\u3082\u306e\u304c\u96fb\u5b50\u6a5f\u5668\u306b\u4f7f\u308f\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u306e\u5de5\u7a0b\u306b\u6b20\u304b\u305b\u306a\u3044\u6280\u8853\u304c\u300c\u8584\u819c\u300d\u3002<\/p>\n\n\n\n<p>\u4eca\u56de\u306f\u3001\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u5de5\u7a0b\u306b\u91cd\u8981\u306a\u300c\u8584\u819c\u300d\u306e\u6280\u8853\u3001\u88c5\u7f6e\u3001\u65b9\u6cd5\u306a\u3069\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u7d39\u4ecb\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u5fc5\u8981\u306a\u300c\u8584\u819c\u300d\u306e\u57fa\u672c<\/h2>\n\n\n\n<p>\u300c\u8584\u819c\uff08\u306f\u304f\u307e\u304f\uff09\u300d\u3068\u306f\u3001\u8584\u3044\u819c\u306e\u3053\u3068\u3067\u30ac\u30e9\u30b9\u3084\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u306a\u3069\u306e\u4e0a\u306b\u3001\u3054\u304f\u8584\u304f\u5e73\u6ed1\u306b\u5806\u7a4d\u3057\u305f\u819c\u306e\u3053\u3068\u3002<\/p>\n\n\n\n<p>\u8584\u819c\u306f\u3001\u72ed\u3044\u610f\u5473\u3067\u306f\u3001\u300c\u771f\u7a7a\u6210\u819c\u6280\u8853\u306a\u3069\u3067\u4f5c\u3063\u305f\u819c\u300d\u306e\u3053\u3068\u3092\u3044\u3044\u3001\u5e83\u3044\u610f\u5473\u3067\u306f\u3001\u3081\u3063\u304d\u3084\u5857\u88c5\u3067\u3064\u304f\u3063\u305f\u8584\u3044\u819c\u3082\u300c\u8584\u819c\u300d\u3068\u547c\u3070\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3068\u306b\u304b\u304f\u8584\u3044\u819c\u307b\u3069\u300c\u8584\u819c\u300d\u3068\u3044\u308f\u308c\u308b\u306e\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u3067\u306f\u3001\u7d30\u304b\u3044\u56de\u8def\u3092\u4f5c\u308a\u3001\u8584\u819c\u3092\u30d1\u30bf\u30fc\u30f3\u5f62\u72b6\u306b\u52a0\u5de5\u3057\u3066\u3001\u7a4d\u5c64\u3055\u305b\u3066\u3044\u307e\u3059\u3002\u534a\u5c0e\u4f53\u306f\u8584\u819c\u3067\u3067\u304d\u3066\u3044\u308b\u3068\u3044\u3063\u3066\u3082\u904e\u8a00\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n\n\n\n<p>\u3067\u306f\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u306e\u306b\u3069\u306e\u304f\u3089\u3044\u306e\u8584\u3055\u304c\u5fc5\u8981\u3068\u3055\u308c\u308b\u306e\u304b\u8aac\u660e\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p>\u8584\u819c\u306f\u3001\u4e3b\u306b\u539a\u3055\u304c10\u03bcm\uff08\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\uff09\u4ee5\u4e0b\u306e\u819c\u306e\u3053\u3068\u3092\u3044\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8eab\u8fd1\u306a\u4f8b\u3067\u4f8b\u3048\u308b\u3068\u3001\u300c\u7d19\u300d\u3002\u7d19\u306e\u539a\u3055\u306f\u304a\u3088\u305d60\u301c70\u03bcm\uff08\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\uff09\u3002\u3061\u306a\u307f\u306b\u3001\u30a2\u30eb\u30df\u30db\u30a4\u30eb\u306f\u300110\u301c60\u03bcm\u3002<\/p>\n\n\n\n<p>\u3053\u308c\u306b\u5bfe\u3057\u3066\u3001\u8584\u819c\u306e\u539a\u3055\u306f\u8584\u3044\u3082\u306e\u306b\u306a\u308b\u3068\u6570nm\uff08\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\uff1d1\/1000\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\uff09\u3068\u3044\u3046\u304b\u3089\u9a5a\u304d\uff01<\/p>\n\n\n\n<p>\u5358\u4f4d\u304c\u3088\u304f\u308f\u304b\u3089\u306a\u3044\u65b9\u306f\u4e0b\u8a18\u306e\u5358\u4f4d\u63db\u7b97\u8868\u3082\u53c2\u8003\u306b\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table><thead><tr><th><meta charset=\"utf-8\">1\u30e1\u30fc\u30c8\u30eb<\/th><th><meta charset=\"utf-8\">1\u30df\u30ea\u30e1\u30fc\u30c8\u30eb<\/th><th><meta charset=\"utf-8\">1\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb<\/th><th><meta charset=\"utf-8\">1\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb<\/th><\/tr><\/thead><tbody><tr><td>1m<\/td><td>0.001m<\/td><td>0.000001m<\/td><td>0.000000001m<\/td><\/tr><tr><td>1,000mm<\/td><td>1mm<\/td><td>0.001mm<\/td><td>0.000001mm<\/td><\/tr><tr><td>1,000,000\u03bcm<\/td><td>1,000\u03bcm<\/td><td>1\u03bcm<\/td><td>0.001\u03bcm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u7528\u9014<\/h2>\n\n\n\n<p>\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u7528\u9014\u306f\u534a\u5c0e\u4f53\u4ee5\u5916\u306b\u3082\u3055\u307e\u3056\u307e\u6d3b\u7528\u3055\u308c\u3066\u3044\u308b\u306e\u3067\u3053\u3053\u3067\u7d39\u4ecb\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh4.googleusercontent.com\/bZTxdUgE5rdareM1bkJLzqIesB1l3BzkEGBjmdR4j5jS1cli468V0SDAORzlHoQ6GXE9stsA_n5dnapmuz1mbnnCBWO09UEe_X8pTD-6hQszErSMOvOJcZ6aBE5Oeg6mFtinGLKO\" alt=\"\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u7528\u9014\"\/><\/figure>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u7269\u4f53\u306e\u8868\u9762\u306e\u5f37\u5316\u3084\u4fdd\u8b77<\/h3>\n\n\n\n<p>\u88fd\u9020\u696d\u3067\u3088\u304f\u4f7f\u7528\u3059\u308b\u91d1\u578b\u3084\u5de5\u5177\u306f\u3001\u305d\u306e\u8868\u9762\u3092\u56fa\u3044\u8584\u819c\u3067\u4fdd\u8b77\u3059\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u5149\u306e\u5236\u5fa1<\/h3>\n\n\n\n<p>\u91d1\u5c5e\u88fd\u54c1\u306e\u8868\u9762\u3092\u8584\u819c\u306b\u3088\u3063\u3066\u3055\u307e\u3056\u307e\u306b\u8272\u4ed8\u3051\u3057\u305f\u308a\u3057\u307e\u3059\u3002\u81ea\u52d5\u8eca\u306e\u30d8\u30c3\u30c9\u30e9\u30a4\u30c8\u5149\u6e90\u306e\u5468\u308a\u306b\u3082\u5149\u3092\u3088\u304f\u53cd\u5c04\u3059\u308b\u8584\u819c\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u30c6\u30ec\u30d3\u3001\u30d1\u30bd\u30b3\u30f3\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u306e\u5fc3\u81d3\u90e8\u5206\u3067\u3042\u308b\u96c6\u7a4d\u56de\u8def<\/h3>\n\n\n\n<p>\u96c6\u7a4d\u56de\u8def\uff08IC\uff09\u306f\u3001\u8907\u96d1\u306a\u96fb\u6c17\u56de\u8def\u3092\u9855\u5fae\u93e1\u3067\u3057\u304b\u898b\u3048\u306a\u3044\u304f\u3089\u3044\u306e\u5c0f\u3055\u306a\u4e16\u754c\u306b\u9589\u3058\u8fbc\u3081\u305f\u3082\u306e\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u771f\u7a7a\u3092\u5229\u7528\u3057\u305f\u8584\u819c\u52a0\u5de5\u6280\u8853\u3067\u88fd\u9020\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u8868\u793a\u30c7\u30d0\u30a4\u30b9<\/h3>\n\n\n\n<p>\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u30d1\u30cd\u30eb\u306a\u3069\u306e\u8868\u793a\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u4e00\u822c\u7684\u306b\u306f\u8584\u819c\u4f5c\u88fd\u6280\u8853\u304c\u30ad\u30fc\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3067\u3059\u3002\u3053\u3053\u306b\u306f\u3055\u307e\u3056\u307e\u306a\u8584\u819c\u304c\u7528\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u5149\u30c7\u30a3\u30b9\u30af<\/h3>\n\n\n\n<p>\u5404\u7a2e\u306e\u30b3\u30f3\u30d1\u30af\u30c8\u30c7\u30a3\u30b9\u30af\u3084\u69d8\u3005\u306a\u30c7\u30b8\u30bf\u30eb\u30c7\u30a3\u30b9\u30af\u306b\u306f\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306e\u53cd\u5c04\u819c\u304c\u6210\u819c\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:10px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u592a\u967d\u96fb\u6c60\u819c<\/h3>\n\n\n\n<p>\u30b7\u30e9\u30f3\u30ac\u30b9\u3068\u3044\u3046\u7269\u8cea\u3092\u30d7\u30e9\u30ba\u30de\u5316\u5b66\u84b8\u7740\u3057\u3066\u5f97\u3089\u308c\u308b\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u304c\u3001\u592a\u967d\u96fb\u6c60\u306b\u4f7f\u308f\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u8584\u819c\u3092\u4f5c\u308b\u65b9\u6cd5\u3068\u6280\u8853<\/h2>\n\n\n\n<p>\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u306b\u306f\u4e0b\u56f3\u306e\u3088\u3046\u306b\u3044\u304f\u3064\u304b\u7a2e\u985e\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table><thead><tr><th>\u8584\u819c\u306e<br>\u4f5c\u308a\u65b9<\/th><th>\u8a73\u7d30<\/th><\/tr><\/thead><tbody><tr><td>\u84b8\u7740\u6cd5<\/td><td>\u771f\u7a7a\u306b\u3057\u305f\u5bb9\u5668\u306e\u4e2d\u3067\u3001\u91d1\u5c5e\u3084\u9178\u5316\u7269\u306a\u3069\u306e\u6210\u819c\u6750\u6599\u3092\u84b8\u767a\u3055\u305b\u3066\u3001\u5bfe\u5411\u3057\u305f\u57fa\u677f\u8868\u9762\u306b\u51dd\u7740\u3055\u305b\u3066\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u624b\u6cd5\u3067\u3059\u3002<br>\u53c2\u8003\u203b1.2.3.4<\/td><\/tr><tr><td>\u30a4\u30aa\u30f3\u30d7\u30ec\u30fc\u30c7\u30a3\u30f3\u30b0(IP)\u6cd5<\/td><td>\u539f\u7406\u7684\u306b\u306f\u84b8\u7740\u6cd5\u3068\u307b\u307c\u540c\u3058\u3067\u3059\u304c\u3001\u84b8\u7740\u7c92\u5b50\u3092\u30d7\u30e9\u30ba\u30de\u4e2d\u3092\u901a\u904e\u3055\u305b\u308b\u3053\u3068\u3067\u84b8\u7740\u6750\u3092\u30a4\u30aa\u30f3\u5316\u3055\u305b\u307e\u3059\u3002\u6210\u819c\u3055\u305b\u308b\u57fa\u677f\u306b\u30de\u30a4\u30ca\u30b9\u306e\u96fb\u5727\u3092\u304b\u3051\u3001\u30a4\u30aa\u30f3\u5316\u3055\u305b\u305f\u84b8\u7740\u6750\u3092\u52a0\u901f\u3055\u305b\u306a\u304c\u3089\u57fa\u677f\u306b\u885d\u7a81\u3055\u305b\u308b\u3053\u3068\u3067\u8584\u819c\u3092\u5f62\u6210\u3055\u305b\u307e\u3059\u3002\u30a4\u30aa\u30f3\u5316\u3001\u52a0\u901f\u3092\u884c\u3046\u3053\u3068\u306b\u3088\u308a\u5bc6\u7740\u6027\u306e\u9ad8\u3044\u819c\u3092\u4f5c\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<br>\u53c2\u8003\u203b1.5<\/td><\/tr><tr><td>\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5<\/td><td>\u653e\u96fb\u306b\u3088\u308b\u30d7\u30e9\u30ba\u30de\u4e2d\u306b\u3067\u304d\u305f\u30a4\u30aa\u30f3(\u901a\u5e38\uff21\uff52+\u30a4\u30aa\u30f3)\u3092\u6210\u819c\u6750\u6599\u306e\u677f\uff08\u30bf\u30fc\u30b2\u30c3\u30c8\uff09\u306b\u3076\u3064\u3051\u3066\u6750\u6599\u3092\u306f\u306d\u98db\u3070\u3057\u307e\u3059\uff61\u306f\u306d\u98db\u3070\u3055\u308c\u305f\u6210\u819c\u6750\u6599\u304c\u57fa\u677f\u3078\u98db\u3093\u3067\u3044\u304d\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u624b\u6cd5\u3067\u3059\u3002\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u3067\u306f\u3001\u9ad8\u878d\u70b9\u91d1\u5c5e\u3084\u5408\u91d1\u306a\u3069\u3001\u84b8\u7740\u6cd5\u3067\u306f\u56f0\u96e3\u306a\u6750\u6599\u3067\u3082\u3001\u6210\u819c\u304c\u53ef\u80fd\u3067\u3001\u5e83\u7bc4\u56f2\u306a\u6210\u819c\u6750\u6599\u306b\u5bfe\u5fdc\u3067\u304d\u307e\u3059\u3002<br>\u53c2\u8003\u203b1.5.6<\/td><\/tr><tr><td>\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u6cd5<\/td><td>\u6210\u819c\u3057\u305f\u3044\u5143\u7d20\u3092\u542b\u3080\u6c17\u4f53\u3092\u57fa\u677f\u8868\u9762\u306b\u9001\u308a\u3001\u5316\u5b66\u53cd\u5fdc\u3001\u5206\u89e3\u3092\u901a\u3057\u3066\u6210\u819c\u3059\u308b\u65b9\u6cd5\u3002CVD\u306e\u4e2d\u306b\u3082\u57fa\u677f\u3092\u52a0\u71b1\u3055\u305b\u308b\u71b1CVD\u3001\u53cd\u5fdc\u7ba1\u5185\u3092\u6e1b\u5727\u3057\u3001\u30d7\u30e9\u30ba\u30de\u3092\u767a\u751f\u3055\u305b\u308b\u30d7\u30e9\u30ba\u30deCVD\u306a\u3069\u306e\u7a2e\u985e\u304c\u3042\u308b\u3002<br>\u53c2\u8003\u203b1.7.8<\/td><\/tr><tr><td>\u539f\u5b50\u5c64\u5806\u7a4d(ALD)\u6cd5<\/td><td>CVD\u306e\uff11\u7a2e\u3068\u8a00\u308f\u308c\u307e\u3059\u304c\u30012\u7a2e\u985e\u4ee5\u4e0a\u306e\u539f\u6599\u6c17\u4f53\uff08\u30d7\u30ea\u30ab\u30fc\u30b5\u30fc,\u524d\u99c6\u4f53\uff09\u3092\u4ea4\u4e92\u306b\u5c0e\u5165\u30fb\u6392\u6c17\u3092\u7e70\u308a\u8fd4\u3057\uff0c\u6210\u819c\u8868\u9762\u306b\u5438\u7740\u3057\u305f\u539f\u6599\u5206\u5b50\u3092\u53cd\u5fdc\u3055\u305b\u3066\u819c\u5316\u3059\u308b\u65b9\u6cd5\u3092\u539f\u5b50\u5c64\u5806\u7a4d(ALD)\u3068\u3044\u3044\u307e\u3059\u3002<br>\u53c2\u8003\u203b8.9<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<style type=\"text\/css\"><!--\ntable tr td:first-of-type {width: 30%;}\n--><\/style>\n\n\n\n<div class=\"wp-block-group\"><div class=\"wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow\">\n<p class=\"has-small-font-size\">\u53c2\u8003\u6587\u732e\uff1a<\/p>\n\n\n\n<p class=\"has-small-font-size\">\u203b1 \u66f8\u7c4d\u300c\u4eca\u65e5\u304b\u3089\u30e2\u30ce\u77e5\u308a\u30b7\u30ea\u30fc\u30ba \u30c8\u30b3\u30c8\u30f3\u3084\u3055\u3057\u3044\u771f\u7a7a\u306e\u672c\u300d p92-p93<br>\u203b2 <a aria-label=\"undefined (opens in a new tab)\" href=\"https:\/\/www.oike-kogyo.co.jp\/research\/column\/vacuum_dep\/\" target=\"_blank\" rel=\"noreferrer noopener\">\u5c3e\u6c60\u5de5\u696d\u682a\u5f0f\u4f1a\u793e<\/a><br>\u203b3<a aria-label=\"undefined (opens in a new tab)\" href=\"https:\/\/kotobank.jp\/word\/\u84b8\u7740\u6cd5-161215#:~:text=\u84b8\u7740\u6cd5\u3058\u3087\u3046\u3061\u3083\u304f,\u91cd\u8981\u306a\u65b9\u6cd5\u3067\u3042\u308b%E3%80%82\" target=\"_blank\" rel=\"noreferrer noopener\">\u30b3\u30c8\u30d0\u30f3\u30af<\/a><br>\u203b4<a aria-label=\"undefined (opens in a new tab)\" href=\"https:\/\/ja.wikipedia.org\/wiki\/\u84b8\u7740\" target=\"_blank\" rel=\"noreferrer noopener\">\u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2<\/a><br>\u203b5<a aria-label=\"undefined (opens in a new tab)\" href=\"http:\/\/www.tohokaken.jp\/index.htm\" target=\"_blank\" rel=\"noreferrer noopener\">\u6771\u90a6\u5316\u7814\u682a\u5f0f\u4f1a\u793e<\/a><br>\u203b6<a aria-label=\"undefined (opens in a new tab)\" href=\"https:\/\/www.oike-kogyo.co.jp\/research\/column\/sputtering\/\" target=\"_blank\" rel=\"noreferrer noopener\">\u5c3e\u6c60\u5de5\u696d\u682a\u5f0f\u4f1a\u793e<\/a><br>\u203b7<a href=\"https:\/\/ja.wikipedia.org\/wiki\/\u5316\u5b66\u6c17\u76f8\u6210\u9577\">\u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2<\/a><br>\u203b8<a aria-label=\"undefined (opens in a new tab)\" href=\"https:\/\/www.jstage.jst.go.jp\/article\/jvsj2\/59\/7\/59_16-LC-011\/_pdf\/-char\/ja\" target=\"_blank\" rel=\"noreferrer noopener\">\u5316\u5b66\u7684\u6c17\u76f8\u6210\u9577\u6cd5\u306e\u57fa\u672c\u3000\u8ad6\u6587<\/a><br>\u203b9<a aria-label=\"undefined (opens in a new tab)\" href=\"https:\/\/ja.wikipedia.org\/wiki\/\u539f\u5b50\u5c64\u5806\u7a4d#:~:text=\u539f\u5b50\u5c64\u5806\u7a4d\u3001\u307e\u305f\u306f\u539f\u5b50,1\u5206\u985e\u3068\u3055\u308c\u308b%E3%80%82\" target=\"_blank\" rel=\"noreferrer noopener\">\u30a6\u30a3\u30ad\u30da\u30c7\u30a3\u30a2<\/a><\/p>\n<\/div><\/div>\n\n\n\n<p>\u6210\u819c\u6761\u4ef6\u3092\u6c7a\u3081\u308b\u69d8\u3005\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u5236\u5fa1\u3057\u3066\u3001\u9069\u5207\u306a\u819c\u539a\u3001\u819c\u306e\u72b6\u614b\u3092\u5b9f\u73fe\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u3088\u3046\u306b\u8003\u3048\u308b\u3068\u3001\u8584\u819c\u3092\u3064\u304f\u308b\u306b\u306f\u3001\u591a\u304f\u306e\u8a2d\u5099\u3092\u5fc5\u8981\u3068\u3057\u3066\u3001\u307e\u305f\u6280\u8853\u30ce\u30a6\u30cf\u30a6\u304c\u5927\u5207\u306b\u306a\u308b\u3053\u3068\u304c\u5206\u304b\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u4eca\u56de\u306f\u300c\u8584\u819c\u300d\u306e\u57fa\u790e\u7684\u306a\u77e5\u8b58\u306b\u3064\u3044\u3066\u7d39\u4ecb\u3057\u307e\u3057\u305f\u3002\u83c5\u88fd\u4f5c\u6240\u306f\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u306e\u306b\u6b20\u304b\u305b\u306a\u3044\u88c5\u7f6e\u3092\u88fd\u4f5c\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u771f\u7a7a\u88c5\u7f6e\u3067\u3042\u308b\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3001ALD\u88c5\u7f6e\u3001\u84b8\u7740\u88c5\u7f6e\u306a\u3069\u3092\u53d6\u308a\u63c3\u3048\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u88fd\u54c1\u306e\u8a73\u7d30\u306b\u3064\u3044\u3066\u306f\u3053\u3061\u3089\u3092\u3054\u78ba\u8a8d\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p class=\"blog_btn\">\n<a href=\"https:\/\/agus.co.jp\/?cat=14\">\u88fd\u54c1\u4e00\u89a7<\/a>\n<\/p>\n\n<style type=\"text\/css\"><!--\n#blog_wrap .entry-content .blog_btn a {\n    display: inline-block;\n    font-size: 15pt;\n    font-weight: bold;\n    color: #FFF;\n    text-decoration: none;\n    padding: 12px 50px;\n    background: #034c83;\n    border-radius: 5px;\n}\n--><\/style>\n","protected":false},"excerpt":{"rendered":"<p>\u4e16\u754c\u7684\u306a\u534a\u5c0e\u4f53\u4e0d\u8db3\u306f\u4eca\u3084\u591a\u304f\u306e\u4f01\u696d\u304c\u6253\u6483\u3092\u53d7\u3051\u3066\u3044\u307e\u3059\u3002 \u9ad8\u6027\u80fd\u306a\u96fb\u5b50\u6a5f\u5668\u304c\u666e\u53ca\u3059\u308b\u4e2d\u3001\u81ea\u793e\u88fd\u54c1\u306b\u4f7f\u7528\u3059\u308b\u534a\u5c0e\u4f53\u3092\u3081\u3050\u308a\u5954\u8d70\u3057\u3066\u3044\u308b\u72b6\u6cc1\u3002 \u4e0d\u8db3\u3068\u306a\u3063[\u3082\u3063\u3068\u8aad\u307e\u305b\u3066\u301c]<\/p>\n","protected":false},"author":1,"featured_media":4511,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[110],"tags":[],"class_list":["post-4499","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technology"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059 | \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240<\/title>\n<meta name=\"description\" content=\"\u672c\u8a18\u4e8b\u3067\u306f\u3001\u8584\u819c\u306e\u57fa\u790e\u304b\u3089\u5f62\u6210\u6280\u8853\u3068\u30d7\u30ed\u30bb\u30b9\u3001\u793e\u4f1a\u3067\u3069\u306e\u3088\u3046\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u304b\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/agus.co.jp\/?p=4499\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059 | \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\" \/>\n<meta property=\"og:description\" content=\"\u672c\u8a18\u4e8b\u3067\u306f\u3001\u8584\u819c\u306e\u57fa\u790e\u304b\u3089\u5f62\u6210\u6280\u8853\u3068\u30d7\u30ed\u30bb\u30b9\u3001\u793e\u4f1a\u3067\u3069\u306e\u3088\u3046\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u304b\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/agus.co.jp\/?p=4499\" \/>\n<meta property=\"og:site_name\" content=\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\" \/>\n<meta property=\"article:published_time\" content=\"2022-01-24T03:46:00+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-12-27T05:33:42+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/01\/pixta_72666360_M.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1600\" \/>\n\t<meta property=\"og:image:height\" content=\"1066\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u57f7\u7b46\u8005\" \/>\n\t<meta name=\"twitter:data1\" content=\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\" \/>\n\t<meta name=\"twitter:label2\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data2\" content=\"7\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499\"},\"author\":{\"name\":\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/#\\\/schema\\\/person\\\/1d3af4d4c4767e19c391ee00a036c57b\"},\"headline\":\"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059\",\"datePublished\":\"2022-01-24T03:46:00+00:00\",\"dateModified\":\"2023-12-27T05:33:42+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499\"},\"wordCount\":28,\"commentCount\":0,\"image\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/pixta_72666360_M.jpg\",\"articleSection\":[\"\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3064\u3044\u3066\"],\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\\\/\\\/agus.co.jp\\\/?p=4499#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499\",\"name\":\"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059 | \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/pixta_72666360_M.jpg\",\"datePublished\":\"2022-01-24T03:46:00+00:00\",\"dateModified\":\"2023-12-27T05:33:42+00:00\",\"author\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/#\\\/schema\\\/person\\\/1d3af4d4c4767e19c391ee00a036c57b\"},\"description\":\"\u672c\u8a18\u4e8b\u3067\u306f\u3001\u8584\u819c\u306e\u57fa\u790e\u304b\u3089\u5f62\u6210\u6280\u8853\u3068\u30d7\u30ed\u30bb\u30b9\u3001\u793e\u4f1a\u3067\u3069\u306e\u3088\u3046\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u304b\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/agus.co.jp\\\/?p=4499\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#primaryimage\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/pixta_72666360_M.jpg\",\"contentUrl\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2022\\\/01\\\/pixta_72666360_M.jpg\",\"width\":1600,\"height\":1066},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/?p=4499#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"TOP\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u4ed5\u4e8b\u306e\u5b66\u3073\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/?cat=43\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3064\u3044\u3066\",\"item\":\"https:\\\/\\\/agus.co.jp\\\/?cat=110\"},{\"@type\":\"ListItem\",\"position\":4,\"name\":\"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/#website\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/\",\"name\":\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\",\"description\":\"Co-create the value with customers. \u9867\u5ba2\u306e\u72ec\u5275\u6027\u306b\u7acb\u811a\u3057\u3001\u65b0\u3057\u3044\u4fa1\u5024\u3092\u5354\u50cd\u3067\u5275\u9020\u3059\u308b\u3002 \u3082\u306e\u3065\u304f\u308a\u306e\u6280\u8853\u529b\u3092\u5f37\u307f\u3068\u3057\u3066\u3001\u9867\u5ba2\u8981\u671b\u3092\u5177\u73fe\u5316\u3059\u308b\u4f01\u696d\u3068\u306a\u308b\u3002\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/agus.co.jp\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ja\"},{\"@type\":\"Person\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/#\\\/schema\\\/person\\\/1d3af4d4c4767e19c391ee00a036c57b\",\"name\":\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2021\\\/11\\\/logo-150x150.jpg\",\"url\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2021\\\/11\\\/logo-150x150.jpg\",\"contentUrl\":\"https:\\\/\\\/agus.co.jp\\\/wp-content\\\/uploads\\\/2021\\\/11\\\/logo-150x150.jpg\",\"caption\":\"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\"},\"description\":\"\u5317\u6d77\u9053\u5317\u6597\u5e02\u3067\u3001\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3084ALD\u88c5\u7f6e\u7b49\u306e\u6210\u819c\u88c5\u7f6e\u3084\u5149\u653e\u51fa\u96fb\u5b50\u9855\u5fae\u93e1\u306a\u3069\u306e\u771f\u7a7a\u88c5\u7f6e\u3001\u653e\u96fb\u30d7\u30e9\u30ba\u30de\u713c\u7d50(SPS)\u306b\u3088\u308b\u6750\u6599\u5408\u6210\u88c5\u7f6e\u3001\u6f01\u8239\u5411\u3051\u8239\u8236\u7528\u6a5f\u5668\u3092\u88fd\u9020\u30fb\u8ca9\u58f2\u3057\u3066\u3044\u307e\u3059\u3002 \u307e\u305f\u3001\u6c4e\u7528\u30de\u30a4\u30b3\u30f3\u30fb\u6c4e\u7528\u30e1\u30e2\u30ea\u3078\u306e\u66f8\u8fbc\u307f\u30b5\u30fc\u30d3\u30b9\u3082\u884c\u3063\u3066\u3044\u307e\u3059\u3002 \u304a\u554f\u3044\u5408\u308f\u305b\u306f\u3053\u3061\u3089\",\"url\":\"https:\\\/\\\/agus.co.jp\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059 | \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","description":"\u672c\u8a18\u4e8b\u3067\u306f\u3001\u8584\u819c\u306e\u57fa\u790e\u304b\u3089\u5f62\u6210\u6280\u8853\u3068\u30d7\u30ed\u30bb\u30b9\u3001\u793e\u4f1a\u3067\u3069\u306e\u3088\u3046\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u304b\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/agus.co.jp\/?p=4499","og_locale":"ja_JP","og_type":"article","og_title":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059 | \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","og_description":"\u672c\u8a18\u4e8b\u3067\u306f\u3001\u8584\u819c\u306e\u57fa\u790e\u304b\u3089\u5f62\u6210\u6280\u8853\u3068\u30d7\u30ed\u30bb\u30b9\u3001\u793e\u4f1a\u3067\u3069\u306e\u3088\u3046\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u304b\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002","og_url":"https:\/\/agus.co.jp\/?p=4499","og_site_name":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","article_published_time":"2022-01-24T03:46:00+00:00","article_modified_time":"2023-12-27T05:33:42+00:00","og_image":[{"width":1600,"height":1066,"url":"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/01\/pixta_72666360_M.jpg","type":"image\/jpeg"}],"author":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","twitter_card":"summary_large_image","twitter_misc":{"\u57f7\u7b46\u8005":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"7\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/agus.co.jp\/?p=4499#article","isPartOf":{"@id":"https:\/\/agus.co.jp\/?p=4499"},"author":{"name":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","@id":"https:\/\/agus.co.jp\/#\/schema\/person\/1d3af4d4c4767e19c391ee00a036c57b"},"headline":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059","datePublished":"2022-01-24T03:46:00+00:00","dateModified":"2023-12-27T05:33:42+00:00","mainEntityOfPage":{"@id":"https:\/\/agus.co.jp\/?p=4499"},"wordCount":28,"commentCount":0,"image":{"@id":"https:\/\/agus.co.jp\/?p=4499#primaryimage"},"thumbnailUrl":"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/01\/pixta_72666360_M.jpg","articleSection":["\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3064\u3044\u3066"],"inLanguage":"ja","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/agus.co.jp\/?p=4499#respond"]}]},{"@type":"WebPage","@id":"https:\/\/agus.co.jp\/?p=4499","url":"https:\/\/agus.co.jp\/?p=4499","name":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059 | \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","isPartOf":{"@id":"https:\/\/agus.co.jp\/#website"},"primaryImageOfPage":{"@id":"https:\/\/agus.co.jp\/?p=4499#primaryimage"},"image":{"@id":"https:\/\/agus.co.jp\/?p=4499#primaryimage"},"thumbnailUrl":"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/01\/pixta_72666360_M.jpg","datePublished":"2022-01-24T03:46:00+00:00","dateModified":"2023-12-27T05:33:42+00:00","author":{"@id":"https:\/\/agus.co.jp\/#\/schema\/person\/1d3af4d4c4767e19c391ee00a036c57b"},"description":"\u672c\u8a18\u4e8b\u3067\u306f\u3001\u8584\u819c\u306e\u57fa\u790e\u304b\u3089\u5f62\u6210\u6280\u8853\u3068\u30d7\u30ed\u30bb\u30b9\u3001\u793e\u4f1a\u3067\u3069\u306e\u3088\u3046\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u304b\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002","breadcrumb":{"@id":"https:\/\/agus.co.jp\/?p=4499#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/agus.co.jp\/?p=4499"]}]},{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/agus.co.jp\/?p=4499#primaryimage","url":"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/01\/pixta_72666360_M.jpg","contentUrl":"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/01\/pixta_72666360_M.jpg","width":1600,"height":1066},{"@type":"BreadcrumbList","@id":"https:\/\/agus.co.jp\/?p=4499#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"TOP","item":"https:\/\/agus.co.jp\/"},{"@type":"ListItem","position":2,"name":"\u4ed5\u4e8b\u306e\u5b66\u3073","item":"https:\/\/agus.co.jp\/?cat=43"},{"@type":"ListItem","position":3,"name":"\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3064\u3044\u3066","item":"https:\/\/agus.co.jp\/?cat=110"},{"@type":"ListItem","position":4,"name":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u751f\u304b\u3055\u308c\u308b\u300c\u8584\u819c\u300d\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u8aac\u660e\u3057\u307e\u3059"}]},{"@type":"WebSite","@id":"https:\/\/agus.co.jp\/#website","url":"https:\/\/agus.co.jp\/","name":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","description":"Co-create the value with customers. \u9867\u5ba2\u306e\u72ec\u5275\u6027\u306b\u7acb\u811a\u3057\u3001\u65b0\u3057\u3044\u4fa1\u5024\u3092\u5354\u50cd\u3067\u5275\u9020\u3059\u308b\u3002 \u3082\u306e\u3065\u304f\u308a\u306e\u6280\u8853\u529b\u3092\u5f37\u307f\u3068\u3057\u3066\u3001\u9867\u5ba2\u8981\u671b\u3092\u5177\u73fe\u5316\u3059\u308b\u4f01\u696d\u3068\u306a\u308b\u3002","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/agus.co.jp\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ja"},{"@type":"Person","@id":"https:\/\/agus.co.jp\/#\/schema\/person\/1d3af4d4c4767e19c391ee00a036c57b","name":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240","image":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/agus.co.jp\/wp-content\/uploads\/2021\/11\/logo-150x150.jpg","url":"https:\/\/agus.co.jp\/wp-content\/uploads\/2021\/11\/logo-150x150.jpg","contentUrl":"https:\/\/agus.co.jp\/wp-content\/uploads\/2021\/11\/logo-150x150.jpg","caption":"\u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240"},"description":"\u5317\u6d77\u9053\u5317\u6597\u5e02\u3067\u3001\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3084ALD\u88c5\u7f6e\u7b49\u306e\u6210\u819c\u88c5\u7f6e\u3084\u5149\u653e\u51fa\u96fb\u5b50\u9855\u5fae\u93e1\u306a\u3069\u306e\u771f\u7a7a\u88c5\u7f6e\u3001\u653e\u96fb\u30d7\u30e9\u30ba\u30de\u713c\u7d50(SPS)\u306b\u3088\u308b\u6750\u6599\u5408\u6210\u88c5\u7f6e\u3001\u6f01\u8239\u5411\u3051\u8239\u8236\u7528\u6a5f\u5668\u3092\u88fd\u9020\u30fb\u8ca9\u58f2\u3057\u3066\u3044\u307e\u3059\u3002 \u307e\u305f\u3001\u6c4e\u7528\u30de\u30a4\u30b3\u30f3\u30fb\u6c4e\u7528\u30e1\u30e2\u30ea\u3078\u306e\u66f8\u8fbc\u307f\u30b5\u30fc\u30d3\u30b9\u3082\u884c\u3063\u3066\u3044\u307e\u3059\u3002 \u304a\u554f\u3044\u5408\u308f\u305b\u306f\u3053\u3061\u3089","url":"https:\/\/agus.co.jp"}]}},"_links":{"self":[{"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/posts\/4499","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/agus.co.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=4499"}],"version-history":[{"count":8,"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/posts\/4499\/revisions"}],"predecessor-version":[{"id":6643,"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/posts\/4499\/revisions\/6643"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/agus.co.jp\/index.php?rest_route=\/wp\/v2\/media\/4511"}],"wp:attachment":[{"href":"https:\/\/agus.co.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=4499"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/agus.co.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=4499"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/agus.co.jp\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=4499"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}