{"id":6358,"date":"2023-09-01T09:34:45","date_gmt":"2023-09-01T00:34:45","guid":{"rendered":"https:\/\/agus.co.jp\/?p=6358"},"modified":"2024-09-03T17:45:05","modified_gmt":"2024-09-03T08:45:05","slug":"%e3%83%88%e3%83%aa%e3%83%a1%e3%83%81%e3%83%ab%e3%82%a2%e3%83%ab%e3%83%9f%e3%83%8b%e3%82%a6%e3%83%a0%e3%81%a8%e3%81%af%ef%bc%9f%e6%b3%a8%e6%84%8f%e7%82%b9%e3%82%84%e7%a4%be%e4%bc%9a%e3%81%a7%e3%81%ae","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=6358","title":{"rendered":"\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3068\u306f\uff1f\u6ce8\u610f\u70b9\u3084\u793e\u4f1a\u3067\u306e\u6d3b\u7528\u65b9\u6cd5\u3092\u89e3\u8aac"},"content":{"rendered":"\n\n\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3068\u306f\uff1f\u6ce8\u610f\u70b9\u3084\u793e\u4f1a\u3067\u306e\u6d3b\u7528\u65b9\u6cd5\u3092\u89e3\u8aac<\/p>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh4.googleusercontent.com\/lSxj8zmxfIKwWStiBml_vBrfoSa6Eu7YHcS6IwwCJ9_fpXbQZQF6etX9ieEn7Byr2I_BmFIyy1pHua0NMdJ4iCrtXPJf5IhtgHc5tNIObp0lhji8TesqRLt8jtNM2IXK_AvZYdsFWvuL2PTyGlF7NhU\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u3001\u65e5\u5e38\u7684\u306b\u306f\u3042\u307e\u308a\u8033\u306b\u3057\u306a\u3044\u5316\u5408\u7269\u3067\u3059\u304c\u3001\u5b9f\u306f\u8eab\u8fd1\u306a\u88fd\u54c1\u306e\u539f\u6599\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u8a18\u4e8b\u3067\u306f\u3001\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306e\u7279\u5fb4\u3068\u3001\u793e\u4f1a\u3067\u306e\u6d3b\u7528\u65b9\u6cd5\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002\u5b9f\u9a13\u3084\u6388\u696d\u306e\u7406\u89e3\u3092\u6df1\u3081\u308b\u305f\u3081\u306b\u3001\u3053\u306e\u8a18\u4e8b\u304c\u5f79\u7acb\u3064\u3053\u3068\u3092\u9858\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3068\u306f<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh5.googleusercontent.com\/10YEiof6cWLUrE26ACb61L80TatNEzK7HL0OOVNDQrLAxHNZj0YvJC1P1c7vv-WOnzPgmVtVRBYLrMfcLFHLf_7LXa-V6buf-VysU1jJ_J2_5WQKvmUrSt-59tvPn8YBMA2bx8d2qBYCsuQ0sZr8tM4\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0 (TMA) \u306f\u3001\u70ad\u7d20 (C)\u3001\u6c34\u7d20 (H)\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0 (Al) \u304b\u3089\u6210\u308b\u6709\u6a5f\u91d1\u5c5e\u5316\u5408\u7269\u3067\u3001\u5e38\u6e29\u3067\u306f\u7121\u8272\u306e\u6db2\u4f53\u3067\u3059\u3002TMA\u306f\u6c34\u3084\u7a7a\u6c17\u3068\u53cd\u5fdc\u3057\u3084\u3059\u304f\u3001\u81ea\u7136\u767a\u706b\u6027\u304c\u3042\u308b\u305f\u3081\u3001\u4e0d\u6d3b\u6027\u30ac\u30b9\u96f0\u56f2\u6c17\u4e0b\u3067\u306e\u53d6\u308a\u6271\u3044\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<p>TMA\u306f\u63ee\u767a\u6027\u304c\u9ad8\u304f\u3001\u5b9f\u9a13\u5ba4\u3067\u306f\u30d8\u30ad\u30b5\u30f3\u3084\u30c8\u30eb\u30a8\u30f3\u306a\u3069\u306e\u6709\u6a5f\u6eb6\u5a92\u306b\u6eb6\u89e3\u3057\u3066\u4f7f\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u4e00\u822c\u7684\u3067\u3059\u3002\u6c34\u3068\u63a5\u89e6\u3059\u308b\u3068\u52a0\u6c34\u5206\u89e3\u3092\u8d77\u3053\u3057\u3001\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0 (Al\u2082O\u2083) \u3068\u30e1\u30bf\u30f3 (CH\u2084) \u304c\u751f\u6210\u3055\u308c\u308b\u305f\u3081\u3001\u53d6\u308a\u6271\u3044\u306b\u306f\u6ce8\u610f\u304c\u5fc5\u8981\u3067\u3059\u3002\u4e7e\u71e5\u3057\u305f\u72b6\u614b\u3067\u7a92\u7d20\u3092\u5145\u586b\u3057\u305f\u6ce8\u5c04\u5668\u306a\u3069\u3067\u53d6\u308a\u6271\u3046\u306e\u304c\u63a8\u5968\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5316\u5b66\u5f0f\u306f\u300c(CH\u2083)\u2083Al\u300d\u3067\u8868\u3055\u308c\u307e\u3059\u304c\u3001\u6db2\u4f53\u72b6\u614b\u3067\u306f\u4e8c\u91cf\u4f53\u300c(CH\u2083)\u2083Al\u300d\u307e\u305f\u306f\u300c(CH\u2083)\u2083Al\u2082\u300d\u306a\u3069\u306e\u69cb\u9020\u3068\u3057\u3066\u5b58\u5728\u3059\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u70b9\u306b\u3064\u3044\u3066\u306f\u3001\u6df7\u4e71\u3092\u907f\u3051\u308b\u305f\u3081\u6ce8\u610f\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306e\u6ce8\u610f\u70b9<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh4.googleusercontent.com\/v12Z3nFPnsXbEu7bbvHhfTBl7y2569X-WRkp26hY4g6gfF5chYmIj0XK7Hx9K9pnUrYsjhClo6YHv1X0eCb41SvV2XNDBP0QX05R3VGSV9JVkW-te1-KA9FAVOj32vUE-8ifWeKCBwVzZyAfIAh828Q\" alt=\"\"\/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u81ea\u7136\u767a\u706b\u306e\u5371\u967a\u6027\u304c\u9ad8\u304f\u3001\u53d6\u308a\u6271\u3044\u306b\u306f\u7d30\u5fc3\u306e\u6ce8\u610f\u304c\u5fc5\u8981\u3067\u3059\u3002\u5b9f\u9a13\u4e2d\u306b\u3053\u307c\u308c\u308b\u3068\u706b\u707d\u306e\u539f\u56e0\u3068\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u6c34\u3068\u53cd\u5fdc\u3059\u308b\u3068\u30e1\u30bf\u30f3\u3092\u767a\u751f\u3055\u305b\u3001\u3055\u3089\u306b\u767a\u706b\u3057\u3066\u767d\u7159\u3092\u751f\u3058\u308b\u3053\u3068\u304c\u3042\u308b\u305f\u3081\u3001\u706b\u707d\u6642\u306b\u306f<strong>\u6c34\u3092\u304b\u3051\u308b\u306e\u306f\u53b3\u7981<\/strong>\u3067\u3059\u3002\u6d88\u706b\u306b\u306f\u7c89\u672b\u6d88\u706b\u5668\u3084\u4e7e\u71e5\u7802\u3092\u4f7f\u7528\u3059\u308b\u306e\u304c\u52b9\u679c\u7684\u3067\u3059\u3002\u4e8b\u524d\u306b\u53d6\u308a\u6271\u3044\u65b9\u6cd5\u3092\u5341\u5206\u306b\u7406\u89e3\u3057\u3001\u7d30\u5fc3\u306e\u6ce8\u610f\u3092\u6255\u3046\u3053\u3068\u304c\u6700\u3082\u91cd\u8981\u3067\u3059\u3002<\/p>\n<p>\u305d\u306e\u5371\u967a\u6027\u304b\u3089\u3001\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u6d88\u9632\u6cd5\u3067\u5371\u967a\u7b49\u7d1a\u2160\u306b\u6307\u5b9a\u3055\u308c\u3066\u304a\u308a\u3001\u52b4\u50cd\u5b89\u5168\u885b\u751f\u6cd5\u3067\u3082\u5371\u967a\u7269\u3068\u3057\u3066\u6271\u308f\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u6c34\u3068\u53cd\u5fdc\u3059\u308b\u3068\u3001\u4ee5\u4e0b\u306e\u5316\u5b66\u53cd\u5fdc\u304c\u8d77\u3053\u308a\u307e\u3059\uff1a<\/p>\n<p><span class=\"katex\"><span class=\"katex-mathml\">2Al(CH3)3+3H2O\u2192Al2O3+6CH4<\/span><span class=\"katex-html\" aria-hidden=\"true\"><span class=\"base\"><span class=\"mord\"><span class=\"msupsub\"><span class=\"vlist-t vlist-t2\"><span class=\"vlist-r\"><span class=\"vlist-s\">\u200b<\/span><\/span><\/span><\/span><\/span><\/span><\/span><\/span><\/p>\n\n\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306e\u793e\u4f1a\u3067\u306e\u6d3b\u7528\u65b9\u6cd5<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh6.googleusercontent.com\/bwqr8ocQOhl0KMflI_N_9ak2NdiC5-PiOd-D0oPbyzmSMq8mpYH1eK2doAEnaHuBzEKcBt8qFHZY_m4RQXReZERYTEuCRT5dw76qIEgJRnTIvRIkUVBL4g4_sk7sYJy8p6I7f9CzXr0KGOKdyADVLM4\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u4e3b\u306b\u4ee5\u4e0b\u306e\u7528\u9014\u3067\u539f\u6599\u3084\u6750\u6599\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/p>\n<ul>\n<li style=\"list-style-type: none;\">\n<ul>\n<li>MO-CVD\uff08\u6709\u6a5f\u91d1\u5c5e\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff09\u306e\u6750\u6599<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<ul>\n<li style=\"list-style-type: none;\">\n<ul>\n<li>\u30b7\u30ea\u30b3\u30f3\u534a\u5c0e\u4f53\u306e\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u5c64\u306e\u5f62\u6210<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u81ea\u4f53\u304c\u6700\u7d42\u88fd\u54c1\u3068\u3057\u3066\u4f7f\u308f\u308c\u308b\u3053\u3068\u306f\u5c11\u306a\u3044\u3067\u3059\u304c\u3001\u305d\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001TMA\u306f\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08Al\u2082O\u2083\uff09\u306e\u5f62\u6210\u306b\u4f7f\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u3042\u308a\u3001\u3053\u308c\u306f\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3084\u7d76\u7e01\u5c64\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306fALD\u88c5\u7f6e\u3067\u3082\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh4.googleusercontent.com\/mxCKN4yUHkznRVydZqIL7pEJIazIvxpbz1E0EaKknxw2SAFGSIa-oUARTxQklfaxm2BRt9sEoQQJB17B1ctZsvcTcWBkX24bKZ-5eaoEKQouzKxq9H3xixYsQOF2ASGapaNtTwSzTSiwdZo513RR1t4\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u306f\u3001ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\uff09\u88c5\u7f6e\u3067\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002ALD\u88c5\u7f6e\u306f\u3001\u539f\u5b50\u5c64\u30ec\u30d9\u30eb\u3067\u8584\u819c\u3092\u6210\u819c\u3059\u308b\u305f\u3081\u306e\u88c5\u7f6e\u3067\u3001\u7814\u7a76\u958b\u767a\u306b\u304a\u3044\u3066\u5e83\u304f\u7528\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>TMA\u3092\u524d\u99c6\u4f53\u3068\u3057\u3066\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u975e\u5e38\u306b\u5747\u4e00\u3067\u7cbe\u5bc6\u306a\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002ALD\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u5404\u5c64\u304c\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u7a4d\u307f\u91cd\u306d\u3089\u308c\u308b\u305f\u3081\u3001\u975e\u5e38\u306b\u9ad8\u7cbe\u5ea6\u306a\u8584\u819c\u306e\u5f62\u6210\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n<p>\u83c5\u88fd\u4f5c\u6240\u3067\u88fd\u9020\u3057\u3066\u3044\u308bALD\u88c5\u7f6e\u3067\u3082\u3001TMA\u3092\u4f7f\u7528\u3057\u3066\u9ad8\u54c1\u8cea\u306a\u8584\u819c\u3092\u6210\u819c\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u8a73\u3057\u3044\u30b9\u30da\u30c3\u30af\u306a\u3069\u306f\u3001\u4ee5\u4e0b\u306e\u30ea\u30f3\u30af\u304b\u3089\u3054\u78ba\u8a8d\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p><\/p>\n\n\n\n<figure class=\"wp-block-embed is-type-wp-embed\"><div class=\"wp-block-embed__wrapper\">\n<blockquote class=\"wp-embedded-content\" data-secret=\"IC27VTxUFk\"><a href=\"https:\/\/agus.co.jp\/?p=272\">SAL1000<\/a><\/blockquote><iframe loading=\"lazy\" class=\"wp-embedded-content\" sandbox=\"allow-scripts\" security=\"restricted\" style=\"position: absolute; visibility: hidden;\" title=\"&#8220;SAL1000&#8221; &#8212; \u682a\u5f0f\u4f1a\u793e\u83c5\u88fd\u4f5c\u6240\" src=\"https:\/\/agus.co.jp\/?p=272&#038;embed=true#?secret=cDaBIU6kD2#?secret=IC27VTxUFk\" data-secret=\"IC27VTxUFk\" width=\"500\" height=\"282\" frameborder=\"0\" marginwidth=\"0\" marginheight=\"0\" scrolling=\"no\"><\/iframe>\n<\/div><\/figure>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 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