{"id":6634,"date":"2023-12-07T11:55:54","date_gmt":"2023-12-07T02:55:54","guid":{"rendered":"https:\/\/agus.co.jp\/?p=6634"},"modified":"2024-09-03T17:45:23","modified_gmt":"2024-09-03T08:45:23","slug":"%e6%88%90%e8%86%9c%e8%a3%85%e7%bd%ae%e3%81%ae%e5%9f%ba%e6%9c%ac%e3%81%a8%e4%bb%a3%e8%a1%a8%e7%9a%84%e3%81%aa%e7%a8%ae%e9%a1%9e%ef%bc%81%e7%8b%ac%e8%87%aa%e3%81%ae%e6%88%90%e8%86%9c%e8%a3%85%e7%bd%ae","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=6634","title":{"rendered":"\u6210\u819c\u88c5\u7f6e\u306e\u57fa\u672c\u3068\u4ee3\u8868\u7684\u306a\u7a2e\u985e\uff01\u72ec\u81ea\u306e\u6210\u819c\u88c5\u7f6e\u3082\u7d39\u4ecb"},"content":{"rendered":"\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/co8DJQqOJCSakqO_zA33rWVzqN3G7fIE2CNvQGFwtEpAq9SNUaWzKDwsOagc8ny0D1vbs_A7BwiUWwM4eGxJKV-yy2spDMtBhOCSz0gvVWZhhSs4IApdhxbNSnHEtxk9eVmOnLGUeHFXGmcu2qGuNGE\" 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src=\"https:\/\/lh7-us.googleusercontent.com\/cZ_d74UAih-kdBYaCnFJ9Dtoxc8UeYuKD9KqTcIAofLvd67LtViKm3bpqjoCest9h6MRf6k1Pb95j8vqFFRAxB6TlXCmzAhrFeThFJbJDPpkxn471AebN7ssNv2GfBdRy1P3YBKpkQZ5wISqzGQFekw\" 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style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u83c5\u88fd\u4f5c\u6240\u306e\u6210\u819c\u88c5\u7f6e<\/h2>\n\n\n\n<p>\u3053\u3053\u3067\u306f\u5f0a\u793e\u300c\u83c5\u88fd\u4f5c\u6240\u300d\u306e\u6210\u819c\u88c5\u7f6e\u306b\u3064\u3044\u3066\u7d39\u4ecb\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\uff1aSSP1000<\/h3>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/xZx2dDyv4oLVgtvgBjcY8wXwvJp7wk2DfNN-QZcv6TSTNIjuQuDbXlGI6-iIKNa5lT22z6e44xqdVRWAC6VtcXiaNDEUUuPYDPLAx33p2Myb-VHe4PGZGFKUXkaAaD1LGwNfoQPwQLFg0YeffPT0ons\" alt=\"\"\/><\/figure><\/div>\n\n\n<p>SSP1000\u306f\u5353\u4e0a\u578bRF\u30b9\u30d1\u30c3\u30bf\u306e\u30a8\u30f3\u30c8\u30ea\u30fc\u30e2\u30c7\u30eb\u3067\u3059\u3002\u6210\u819c\u65b9\u5411\u3092\u5909\u66f4\u53ef\u80fd\u306a\u305f\u3081\u3001\u6210\u819c\u3059\u308b\u88fd\u54c1\u3054\u3068\u306b\u52b9\u7387\u306e\u826f\u3044\u6210\u819c\u3092\u53ef\u80fd\u306b\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u7570\u5e38\u653e\u96fb\u304c\u8d77\u304d\u3084\u3059\u3044\u7d76\u7e01\u6750\u6599\u306b\u5bfe\u3057\u3066\u306f\u3001\u30d1\u30eb\u30b9\u767a\u632f\u6a5f\u80fd\u4ed8\u304d\u9ad8\u5468\u6ce2RF\u96fb\u6e90\u306e\u63a1\u7528\u306b\u3088\u308a\u5b89\u5b9a\u3057\u305f\u6210\u819c\u3092\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u64cd\u4f5c\u306b\u3064\u3044\u3066\u3082\u7c21\u5358\u3055\u3092\u8ffd\u6c42\u3057\u3001\u771f\u7a7a\u5f15\u304d\u306b\u3064\u3044\u3066\u306f\u958b\u59cb\u30fb\u505c\u6b62\u3068\u3082\u306b\u30dc\u30bf\u30f31\u3064\u3067\u64cd\u4f5c\u304c\u53ef\u80fd\u3067\u3059\u3002\u8907\u96d1\u306a\u30d7\u30ed\u30bb\u30b9\u306e\u591a\u304f\u3092\u81ea\u52d5\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u6a5f\u68b0\u64cd\u4f5c\u306b\u6163\u308c\u3066\u3044\u306a\u3044\u65b9\u3067\u3082\u3054\u4f7f\u7528\u3044\u305f\u3060\u3051\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8a73\u7d30\u306a\u30b9\u30da\u30c3\u30af\u306a\u3069\u306f\u4ee5\u4e0b\u306e\u30da\u30fc\u30b8\u3067\u516c\u958b\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p><\/p>\n\n\n\n<a href=\"https:\/\/agus.co.jp\/?p=218\" class=\"cvbtn cvbtn_2\">SSP1000\u306e\u8a73\u7d30\u3092\u898b\u3066\u307f\u308b<\/a>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">ALD\u88c5\u7f6e\uff1aSAL1000<\/h3>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/V9Nj7KezR3ICfFQn_FAdyHJWqmQdj8aKRadXXPL8fH2fJdCVhXYP9P2c_pX87xZI85GBx5Xx0vtEuWn3tLk-3g2CESA_FIl_mdej5uzCwZJJYNtliQp6SIDcS5kQn5Gj2OsoSvmDRZ7la5tANemCXzE\" alt=\"\"\/><\/figure><\/div>\n\n\n<p>\u3053\u3061\u3089\u306f\u5353\u4e0a\u578b\u306eALD\u88c5\u7f6e\u3067\u3042\u308a\u3001\u30a8\u30f3\u30c8\u30ea\u30fc\u30e2\u30c7\u30eb\u3067\u3059\u3002\u672c\u4f53\u91cd\u91cf50kg\u3067\u3001\u53d6\u624b\u3092\u3064\u3051\u3066\u3044\u308b\u305f\u3081\u5927\u4eba2\u4eba\u3067\u3042\u308c\u3070\u7c21\u5358\u306b\u79fb\u52d5\u3067\u304d\u308b\u70b9\u3082\u30dd\u30a4\u30f3\u30c8\u3002<\/p>\n\n\n\n<p>\u4f7f\u3044\u3084\u3059\u3055\u3092\u7279\u306b\u91cd\u8996\u3057\u3066\u4f5c\u6210\u3057\u3066\u304a\u308a\u3001\u30b7\u30f3\u30d7\u30eb\u304b\u3064\u7c21\u5358\u306a\u64cd\u4f5c\u3067\u6210\u819c\u53ef\u80fd\u3067\u3059\u3002\u57fa\u677f\u306e\u30bb\u30c3\u30c8\u306f\u672c\u4f53\u4e0a\u90e8\u306e\u30cf\u30c3\u30c1\u3092\u958b\u3051\u3066\u3001\u57fa\u677f\u30db\u30eb\u30c0\u30fc\u306e\u4e0a\u306b\u30a6\u30a8\u30cf\u30fc\u306a\u3069\u3092\u7f6e\u304d\u3001\u30cf\u30c3\u30c1\u3092\u9589\u3081\u308b\u3060\u3051\u3067\u30bb\u30c3\u30c8\u304c\u7d42\u4e86\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u57fa\u672c\u64cd\u4f5c\u306f\u30dc\u30bf\u30f3\u3092\u62bc\u3059\u3060\u3051\u3067\u904b\u7528\u53ef\u80fd\u3067\u3042\u308a\u3001\u30bf\u30c3\u30c1\u30d1\u30cd\u30eb\u90e8\u5206\u3067\u306f\u6210\u819c\u6642\u306e\u72b6\u614b\u3092\u78ba\u8a8d\u3067\u304d\u308b\u3088\u3046\u8a2d\u8a08\u3057\u3066\u304a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u30aa\u30d7\u30b7\u30e7\u30f3\u3067\u306e\u8ffd\u52a0\u306b\u306f\u306a\u308a\u307e\u3059\u304c\u57fa\u677f\u56de\u8ee2\u6a5f\u69cb\u3092\u53d6\u308a\u4ed8\u3051\u308b\u3053\u3068\u3082\u3067\u304d\u3001\u57fa\u790e\u304b\u3089\u5fdc\u7528\u307e\u3067\u69d8\u3005\u306a\u5b9f\u9a13\u306b\u3054\u5229\u7528\u3044\u305f\u3060\u3051\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8a73\u7d30\u306a\u30b9\u30da\u30c3\u30af\u306a\u3069\u306f\u4ee5\u4e0b\u306e\u30da\u30fc\u30b8\u3067\u516c\u958b\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<a href=\"https:\/\/agus.co.jp\/?p=272\" class=\"cvbtn cvbtn_2\">SAL1000\u306e\u8a73\u7d30\u3092\u898b\u3066\u307f\u308b<\/a>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u84b8\u7740\u88c5\u7f6e\uff1aSEV2000Plus<\/h3>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/4LYHZW5xcTbbIeSa_jMnIRig9qSz27GjcgoknDEA8ljTNmfGDOxQ6ItOQJCyNoJhNnHTqf6EC3DZSlAriY5DwUiaksaKt81MnRPtnNHonbi0DUIETxK16OfI3yjEn8WUlvuNy_ivxAryt8ycZUcnagY\" alt=\"\"\/><\/figure><\/div>\n\n\n<p>\u30bf\u30c3\u30c1\u30d1\u30cd\u30eb\u306b\u3088\u308b\u64cd\u4f5c\u3067\u3001\u6392\u6c17\u64cd\u4f5c\u3092\u81ea\u52d5\u3067\u884c\u3048\u308b\u3053\u3068\u304c\u7279\u5fb4\u3067\u3059\u3002\u307e\u305f\u3001\u6c34\u6676\u632f\u52d5\u5b50\u306b\u3088\u308b\u819c\u539a\u8a08\u3067\u3001\u819c\u539a\u7ba1\u7406\u304c\u53ef\u80fd\u306a\u7814\u7a76\u958b\u767a\u306b\u9069\u3057\u305f\u30e2\u30c7\u30eb\u306e\u84b8\u7740\u88c5\u7f6e\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u672c\u6a5f\u306f\u771f\u7a7a\u84b8\u7740\u88c5\u7f6e\u3067\u3042\u308b\u3082\u306e\u306e\u3001\u300cSTR2000\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc\u30e6\u30cb\u30c3\u30c8\u300d\u3092\u63a5\u7d9a\u3059\u308b\u3053\u3068\u3067\u3001ALD\u88c5\u7f6e\u3001\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u3001\u30a2\u30cb\u30fc\u30eb\u88c5\u7f6e\u3068\u8907\u5408\u3057\u3066\u904b\u7528\u3067\u304d\u307e\u3059\u3002\u5927\u6c17\u306b\u66dd\u3055\u305a\u9023\u7d9a\u51e6\u7406\u3067\u304d\u308b\u3053\u3068\u304b\u3089\u3001\u57fa\u677f\u3078\u306e\u5f71\u97ff\u3092\u6700\u5c0f\u9650\u306b\u6210\u819c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u8a73\u7d30\u306a\u30b9\u30da\u30c3\u30af\u306a\u3069\u306f\u4ee5\u4e0b\u306e\u30da\u30fc\u30b8\u3067\u516c\u958b\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p><\/p>\n\n\n\n<a href=\"https:\/\/agus.co.jp\/?p=2277\" class=\"cvbtn cvbtn_2\">SEV2000Plus\u306e\u8a73\u7d30\u3092\u898b\u3066\u307f\u308b<\/a>\n\n\n\n<p><\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30c6\u30b9\u30c8\u6210\u819c\u3067\u5c0e\u5165\u524d\u306b\u78ba\u8a8d\u3059\u308b\u3053\u3068\u3082\u53ef\u80fd<\/h2>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u3067\u306f\u3001\u6210\u819c\u88c5\u7f6e\u306e\u5c0e\u5165\u3092\u691c\u8a0e\u3055\u308c\u3066\u3044\u308b\u65b9\u5411\u3051\u306b\u300c\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u300d\u3092\u5b9f\u65bd\u3057\u3066\u3044\u307e\u3059\u3002\u73fe\u5728\u3001\u4e8c\u3064\u306e\u65b9\u6cd5\u304c\u9078\u629e\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u4e00\u3064\u306f\u3001\u304a\u5ba2\u69d8\u306b\u3054\u6765\u793e\u3044\u305f\u3060\u304d\u3001\u88c5\u7f6e\u672c\u4f53\u306e\u8aac\u660e\u3092\u542b\u3093\u3060\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u3078\u306e\u30c6\u30b9\u30c8\u6210\u819c\u3092\u884c\u3046\u65b9\u6cd5\u3002<\/p>\n\n\n\n<p>\u3082\u3046\u4e00\u3064\u306f\u3001\u304a\u5ba2\u69d8\u304b\u3089\u30b5\u30f3\u30d7\u30eb\u3092\u304a\u9810\u304b\u308a\u3057\u3001\u5f0a\u793e\u3067\u6210\u819c\u3057\u305f\u4e0a\u3067\u304a\u8fd4\u3057\u3059\u308b\u30c6\u30b9\u30c8\u6210\u819c\u65b9\u6cd5\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u6210\u819c\u6750\u6599\u306e\u52b9\u679c\u3084\u5747\u4e00\u6027\u306a\u3069\u3001\u5b9f\u969b\u306e\u7814\u7a76\u306b\u6d3b\u7528\u3067\u304d\u308b\u304b\u3092\u78ba\u8a8d\u3057\u305f\u4e0a\u3067\u5c0e\u5165\u3067\u304d\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u4e00\u5ea6\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u3092\u3054\u5229\u7528\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<a href=\"https:\/\/agus.co.jp\/?page_id=95\" class=\"txtlink\">\u83c5\u88fd\u4f5c\u6240\u306e\u30c6\u30b9\u30c8\u6210\u819c\u30b5\u30fc\u30d3\u30b9\u3092\u5229\u7528\u3057\u3066\u307f\u308b<\/a>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u6210\u819c\u88c5\u7f6e\u306f\u8584\u819c\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306e\u88c5\u7f6e\u3067\u3042\u308a\u3001\u4ee3\u8868\u7684\u306a\u3082\u306e\u306b\u300c\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u300d\u300cALD\u88c5\u7f6e\u300d\u300c\u84b8\u7740\u88c5\u7f6e\u300d\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u308c\u305e\u308c\u8584\u819c\u3092\u4f5c\u308b\u65b9\u6cd5\u304c\u7570\u306a\u308a\u3001\u84b8\u7740\u529b\u3084\u51f9\u51f8\u3078\u306e\u9069\u5fdc\u6027\u306a\u3069\u3001\u8584\u819c\u3092\u4f5c\u308a\u305f\u3044\u5bfe\u8c61\u3084\u7d20\u6750\u306b\u3088\u308a\u9069\u3057\u305f\u3082\u306e\u3092\u9078\u629e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u306e\u6210\u819c\u88c5\u7f6e\u306b\u95a2\u3057\u3066\u306f\u3001\u30b7\u30f3\u30d7\u30eb\u304b\u3064\u7c21\u5358\u64cd\u4f5c\u3067\u9ad8\u3044\u7cbe\u5ea6\u3092\u5f97\u3089\u308c\u308b\u3082\u306e\u304c\u591a\u304f\u3001\u4f7f\u3044\u3084\u3059\u3055\u3092\u6c42\u3081\u308b\u65b9\u306b\u304a\u3059\u3059\u3081\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u4ee5\u4e0b\u306e\u8a18\u4e8b\u3067\u306f\u5b9f\u969b\u306b\u5c0e\u5165\u3055\u308c\u305f\u304a\u5ba2\u69d8\u306b\u30a4\u30f3\u30bf\u30d3\u30e5\u30fc\u3092\u5b9f\u65bd\u3057\u3001\u304a\u7b54\u3048\u3044\u305f\u3060\u3044\u305f\u5185\u5bb9\u3092\u8a18\u4e8b\u306b\u3057\u305f\u3082\u306e\u3067\u3059\u3002\u5c0e\u5165\u524d\u306e\u53c2\u8003\u3068\u3057\u3066\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<div 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class=\"post_title\">\u83c5\u88fd\u4f5c\u6240\u306eALD\u88c5\u7f6e\u3092\u5c0e\u5165\u3057\u305f\u4e8b\u4f8b\u7d39\u4ecb\u3010\u5317\u6d77\u9053\u5927\u5b66 \u91cf\u5b50\u96c6\u7a4d\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7814\u7a76\u30bb\u30f3\u30bf\u30fc  \u6a4b\u8a70\u4fdd \u7279\u4efb\u6559\u6388\u3011<\/span><\/a><\/li><\/ul><\/div>\n\n\n\n<p>\u53c2\u8003\u30b5\u30a4\u30c8<\/p>\n\n\n\n<p class=\"has-small-font-size\"><a href=\"https:\/\/metoree.com\/categories\/3254\/\">https:\/\/metoree.com\/categories\/3254\/<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\"><a href=\"https:\/\/nihon-polymer.co.jp\/2023\/07\/10\/4458\/\">\u6210\u819c\u88c5\u7f6e\u306e\u6280\u8853\u3084\u6709\u529b\u4f01\u696d\u304c\u63d0\u4f9b\u3059\u308b\u88fd\u54c1\u306b\u3064\u3044\u3066<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\"><a href=\"https:\/\/semiconductor.samsung.com\/jp\/support\/tools-resources\/fabrication-process\/eight-essential-semiconductor-fabrication-processes-part-2-oxidation-to-protect-the-wafer\/\">https:\/\/semiconductor.samsung.com\/jp\/support\/tools-resources\/fabrication-process\/eight-essential-semiconductor-fabrication-processes-part-2-oxidation-to-protect-the-wafer\/<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\"><a href=\"https:\/\/www.screen.co.jp\/spe\/technical\/guide\/deposition\">https:\/\/www.screen.co.jp\/spe\/technical\/guide\/deposition<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\"><a href=\"https:\/\/www.oike-kogyo.co.jp\/research\/column\/vacuum_dep\/\">https:\/\/www.oike-kogyo.co.jp\/research\/column\/vacuum_dep\/<\/a><\/p>\n\n\n\n<p class=\"has-small-font-size\"><a href=\"https:\/\/www.accscicn.com\/ja\/%E8%A7%A3%E6%B1%BA%E7%AD%96\/nanofabrication\/%E5%8E%9F%E5%AD%90%E5%B1%A4%E5%A0%86%E7%A9%8D%E6%B3%95%E3%81%A8%E3%81%AF\/\">\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\u3068\u306f<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u300c\u6210\u819c\u88c5\u7f6e\u3063\u3066\u3069\u3093\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u6210\u819c\u3057\u3066\u3044\u308b\u306e\uff1f\u300d \u300c\u7a2e\u985e\u304c\u3042\u308b\u3068\u805e\u3044\u3066\u3001\u305d\u308c\u305e\u308c\u306e\u9055\u3044\u304c\u5177\u4f53\u7684\u306b\u77e5\u308a\u305f\u3044\u300d 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