{"id":6782,"date":"2024-02-01T15:41:25","date_gmt":"2024-02-01T06:41:25","guid":{"rendered":"https:\/\/agus.co.jp\/?p=6782"},"modified":"2024-03-08T12:29:41","modified_gmt":"2024-03-08T03:29:41","slug":"%e7%b5%b6%e7%b8%81%e8%86%9c%e3%81%a8%e3%81%af%ef%bc%9f%e4%bd%bf%e3%82%8f%e3%82%8c%e3%82%8b%e9%83%a8%e5%93%81%e3%82%84%e6%88%90%e8%86%9c%e6%96%b9%e6%b3%95%e3%83%bb%e7%a8%ae%e9%a1%9e%e3%83%bb%e6%9c%80","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=6782","title":{"rendered":"\u7d76\u7e01\u819c\u3068\u306f\uff1f\u4f7f\u308f\u308c\u308b\u90e8\u54c1\u3084\u6210\u819c\u65b9\u6cd5\u30fb\u7a2e\u985e\u30fb\u6700\u65b0\u306e\u6280\u8853\u52d5\u5411\u307e\u3067\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\uff01"},"content":{"rendered":"\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/rg1rBhaXKydBN3KsY6Hgjb-wpL3bzWJ2-NdVP-KhZspsHBaFqhnpLnCh1eCwQqbExX1GoNkYf7IrEZtmUSqVopFpJIUa24iNnzQ10RZBh9audvWlR0_A2_Nj3YtJJMQj_dB4obsP3twzcfUiN25mzqA\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u7d76\u7e01\u819c\u306f\u305d\u306e\u540d\u306e\u901a\u308a\u96fb\u6c17\u7684\u306b\u7d76\u7e01\u3059\u308b\u305f\u3081\u306e\u819c\u3067\u3059\u3002\u3057\u304b\u3057\u3001\u666e\u6bb5\u8033\u306b\u3059\u308b\u3053\u3068\u304c\u306a\u3044\u5206\u30a4\u30e1\u30fc\u30b8\u304c\u3064\u304d\u306b\u304f\u3044\u3082\u306e\u3060\u3068\u601d\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u305d\u3053\u3067\u672c\u8a18\u4e8b\u3067\u306f\u3001\u7d76\u7e01\u819c\u306b\u3064\u3044\u3066\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002\u7279\u6027\u3084\u6210\u819c\u65b9\u6cd5\u3001\u4ee3\u8868\u7684\u306a\u7a2e\u985e\u3068\u3001\u6210\u819c\u53ef\u80fd\u306a\u88c5\u7f6e\u3082\u7d39\u4ecb\u3057\u307e\u3059\u306e\u3067\u3001\u8584\u819c\u306b\u3064\u3044\u3066\u95a2\u5fc3\u3092\u304a\u6301\u3061\u306e\u65b9\u306f\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d76\u7e01\u819c\u3068\u306f\uff1f<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/z5Rf4NzAuYq65OjwfoYXWo9ASiqfhP7gMVk-k52VdbxmykkTv_8VapO4Zgaa7ZuXj2YVU8ECXk-XGALHCXx6z109sTD-kCtboLnAsub5Ulc9jrhTGqnYeo6UbbYsKKpOg7m9pThtA5Gf7sqG4WS93Zk\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u7d76\u7e01\u819c\u306f\u3001\u4e3b\u306b\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306e\u610f\u5473\u5408\u3044\u3067\u4f7f\u308f\u308c\u308b\u3053\u3068\u304c\u591a\u3044\u8a00\u8449\u3067\u3059\u3002\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306f\u96fb\u6975\u3068\u57fa\u677f\u306e\u9593\u3092\u96fb\u6c17\u7684\u306b\u7d76\u7e01\u3059\u308b\u305f\u3081\u306e\u5c64\u306e\u3053\u3068\u3067\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u3084\u3001\u30b7\u30ea\u30b3\u30f3\u7a92\u5316\u819c\u3092\u8584\u819c\u3068\u3057\u3066\u6210\u819c\u3059\u308b\u3053\u3068\u3067\u3001\u7d76\u7e01\u819c\u3068\u3057\u3066\u6a5f\u80fd\u3055\u305b\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u91d1\u5c5e\u3001\u9178\u5316\u819c\u3001\u534a\u5c0e\u4f53\u306e3\u5c64\u69cb\u9020\u306b\u306a\u3063\u305f\u3082\u306e\u306fMOS\u3068\u547c\u3070\u308c\u3001\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u3064\u3044\u3066\u306f\u4ee5\u4e0b\u306e\u8a18\u4e8b\u3067\u89e3\u8aac\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u8a73\u3057\u3044\u5185\u5bb9\u3092\u77e5\u308a\u305f\u3044\u65b9\u306f\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n<div class=\"related_link\"><span class=\"title\"><i class=\"fa-solid fa-bookmark\"><\/i>\u95a2\u9023\u8a18\u4e8b<\/span><ul><li><a href=\"https:\/\/agus.co.jp\/?p=5376\"><span class=\"thumbnail\"><img decoding=\"async\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2022\/12\/0-3.jpeg\"><\/span><span class=\"post_title\">\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3068\u306f\uff1f\u7528\u9014\u3084\u7a2e\u985e\u3001\u4f55\u306b\u4f7f\u308f\u308c\u3066\u3044\u308b\u304b\u3092\u89e3\u8aac\u3057\u307e\u3059\uff01<\/span><\/a><\/li><\/ul><\/div>\n\n\n\n<p><\/p>\n\n\n\n<p>\u307e\u305f\u3001\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306b\u306f\u3001\u4ee5\u4e0b\u306e4\u3064\u306e\u6027\u8cea\u304c\u671b\u307e\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\u819c\u4e2d\u306b\u6b20\u9665\u30fb\u4e0d\u7d14\u7269\u304c\u5c11\u306a\u3044<\/li>\n\n\n\n<li>\u7d76\u7e01\u7834\u58ca\u8010\u5727\u304c\u9ad8\u3044<\/li>\n\n\n\n<li>\u754c\u9762\u6e96\u4f4d\u5bc6\u5ea6\u304c\u5c11\u306a\u3044<\/li>\n\n\n\n<li>\u56fa\u5b9a\u96fb\u8377\u5bc6\u5ea6\u304c\u5c11\u306a\u3044<br>\u306a\u3069<\/li>\n<\/ol>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d76\u7e01\u819c\u306e\u6210\u819c\u65b9\u6cd5<\/h2>\n\n\n\n<p>\u7d76\u7e01\u819c\u306e\u6210\u819c\u65b9\u6cd5\u306b\u306f\u300cALD\u6cd5\u300d\u300c\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u300d\u300cCVD\u6cd5\u300d\u306a\u3069\u306e\u65b9\u6cd5\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">ALD\u6cd5\uff08\u539f\u5b50\u5c64\u5806\u7a4d\uff09<\/h3>\n\n\n\n<p>ALD\u6cd5\u306f\u4e3b\u306b2\u7a2e\u985e\u306e\u524d\u99c6\u4f53\u3092\u4f7f\u7528\u3057\u3001\u5316\u5b66\u53cd\u5fdc\u3092\u5229\u7528\u3057\u3066\u819c\u3092\u7a4d\u307f\u91cd\u306d\u3066\u3044\u304f\u65b9\u6cd5\u3067\u3059\u3002\u307e\u305a\u3001\u8868\u9762\u306b1\u3064\u76ee\u306e\u524d\u99c6\u4f53\u3092\u4ed8\u7740\u3055\u305b\u3001\u6b21\u306b2\u3064\u76ee\u306e\u524d\u99c6\u4f53\u3092\u91cd\u306d\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u53cd\u5fdc\u3092\u7e70\u308a\u8fd4\u3057\u4e00\u5c64\u305a\u3064\u7a4d\u307f\u91cd\u306d\u3066\u3044\u304f\u30a4\u30e1\u30fc\u30b8\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u5bc6\u7740\u529b\u304c\u9ad8\u304f\u3001\u51f9\u51f8\u306b\u5bfe\u3057\u3066\u3082\u6709\u52b9\u3067\u5c0f\u3055\u3044\u7a74\u3084\u7a81\u8d77\u304c\u591a\u3044\u88fd\u54c1\u3067\u3082\u8584\u819c\u3092\u5f62\u6210\u3067\u304d\u307e\u3059\u3002\u307e\u305f\u3001\u539a\u307f\u306e\u8abf\u6574\u3082\u539f\u5b501\u500b\u5206\u306e\u30ec\u30d9\u30eb\u307e\u3067\u53ef\u80fd\u3067\u3042\u308a\u3001\u7d76\u7e01\u819c\u3068\u3057\u3066\u306fAl2O3\uff08\u30a2\u30eb\u30df\u30ca\uff09\u3092\u7dfb\u5bc6\u306b\u6210\u819c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5<\/h3>\n\n\n\n<p>\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u653e\u96fb\u306b\u3088\u308b\u30d7\u30e9\u30ba\u30de\u4e2d\u306b\u3067\u304d\u305f\u30a4\u30aa\u30f3(\u901a\u5e38Ar+\u30a4\u30aa\u30f3)\u3092\u6210\u819c\u6750\u6599\u306e\u677f\uff08\u30bf\u30fc\u30b2\u30c3\u30c8\uff09\u306b\u3076\u3064\u3051\u3066\u6750\u6599\u3092\u306f\u306d\u98db\u3070\u3057\u3001\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u624b\u6cd5\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u3092\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u3057\u3001\u7a92\u5316\u7269\u3084\u9178\u5316\u7269\u3092\u6750\u6599\u3068\u3057\u3066\u9078\u629e\u3059\u308b\u3068\u3001\u30b7\u30ea\u30b3\u30f3\u7a92\u5316\u819c\u3001\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u3068\u3044\u3063\u305f\u7d76\u7e01\u819c\u3092\u6210\u819c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">CVD\u6cd5<\/h3>\n\n\n\n<p>CVD\u6cd5\u306f\u5316\u5b66\u7684\u6c17\u76f8\u6210\u9577\u306e\u7565\u3067\u3001\u305d\u306e\u540d\u306e\u901a\u308a\u5316\u5b66\u53cd\u5fdc\u3092\u7528\u3044\u3066\u6210\u819c\u3059\u308b\u65b9\u6cd5\u3067\u3059\u3002\u6c17\u4f53\u306b\u7a92\u7d20\u3084\u9178\u7d20\u3092\u542b\u3093\u3060\u30ac\u30b9\u3092\u9078\u629e\u3057\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u306b\u5bfe\u3057\u53cd\u5fdc\u3055\u305b\u308b\u3053\u3068\u3067\u30b7\u30ea\u30b3\u30f3\u7a92\u5316\u819c\u3001\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u3092\u6210\u819c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u6a5f\u68b0\u7684\u5f37\u5ea6\u3084\u5438\u6e7f\u6027\u306a\u3069\u306e\u819c\u8cea\u9762\u306b\u304a\u3044\u3066\u306f\u3001\u9178\u5316\u819c\u304c\u512a\u308c\u305f\u7279\u6027\u3092\u793a\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306e\u7a2e\u985e<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/blYZBnqnwjCMCq7UeMOLQNMJ3GkndkO_MC40Wq7KTedXbsmFn8czFyv33EGC5ueo2s1pZ3yKOVoEhjRgk_4sUkOxzCh9DoszD6S6zzyVazKbRKxlST1g35MT9kGB1hbTBWpjICh4SwpcfXojlW9W3nA\" alt=\"\"\/><\/figure>\n\n\n\n<p>\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306e\u4ee3\u8868\u7684\u306a\u7a2e\u985e\u306b\u300cHigh-k\u6750\u6599\u300d\u3068\u300cLow-k\u6750\u6599\u300d\u3092\u7528\u3044\u305f\u3082\u306e\u304c\u3042\u308a\u307e\u3059\u3002\u305d\u308c\u305e\u308c\u898b\u3066\u3044\u304d\u307e\u3057\u3087\u3046\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">High-k\u6750\u6599<\/h3>\n\n\n\n<p>High-k\u6750\u6599\u306f\u9ad8\u8a98\u96fb\u4f53\u3067\u3042\u308a\u3001\u4e3b\u306bMOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u4f7f\u308f\u308c\u308b\u6750\u6599\u3067\u3059\u3002\u30b2\u30fc\u30c8\u9178\u5316\u819c\u306b\u4f7f\u3046\u5834\u5408\u3068\u3001\u30e1\u30e2\u30ea\u30fc\u306e\u30ad\u30e3\u30d1\u30b7\u30bf\u5bb9\u91cf\u3092\u4e0a\u3052\u308b\u305f\u3081\u306b\u4f7f\u3046\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u7269\u306b\u6bd4\u3079\u9ad8\u3044\u8a98\u96fb\u7387\u3092\u6301\u3063\u3066\u304a\u308a\u3001\u9ad8\u901f\u30fb\u9ad8\u6027\u80fd\u306a\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3092\u4f5c\u308b\u305f\u3081\u306b\u5fc5\u8981\u4e0d\u53ef\u6b20\u306a\u6750\u6599\u3067\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8fd1\u5e74\u3067\u306f\u3001MOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u4ee5\u5916\u306b\u3082DRAM\u3084\u30d5\u30e9\u30c3\u30b7\u30e5\u30e1\u30e2\u30ea\u3001\u9ad8\u901f\u30d7\u30ed\u30bb\u30c3\u30b5\u306a\u3069\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u6750\u6599\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Low-k\u6750\u6599<\/h3>\n\n\n\n<p>Low-k\u6750\u6599\u306f\u4f4e\u8a98\u96fb\u7387\u3067\u3042\u308a\u3001\u591a\u5c64\u914d\u7dda\u9593\u306b\u304a\u3051\u308b\u5c64\u9593\u7d76\u7e01\u819c\u306e\u5947\u751f\u5bb9\u91cf\u3092\u4e0b\u3052\u3001\u30c7\u30d0\u30a4\u30b9\u3092\u9ad8\u901f\u5316\u3055\u305b\u308b\u305f\u3081\u306b\u7528\u3044\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u96c6\u7a4d\u56de\u8def\u306e\u5185\u90e8\u3067\u306f\u3001\u91d1\u5c5e\u914d\u7dda\u304c\u4f55\u5c64\u306b\u3082\u5f35\u308a\u5de1\u3089\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u96c6\u7a4d\u56de\u8def\u306e\u5c0f\u578b\u5316\u306b\u4f34\u3044\u3001\u914d\u7dda\u540c\u58eb\u306e\u8ddd\u96e2\u304c\u8fd1\u304f\u306a\u308a\u3001\u914d\u7dda\u9593\u306e\u96fb\u6c17\u5bb9\u91cf\u304c\u5927\u304d\u304f\u306a\u308a\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u3053\u308c\u306b\u3088\u308a\u3001\u914d\u7dda\u3092\u4f1d\u308f\u308b\u4fe1\u53f7\u304c\u9045\u304f\u306a\u308b\u73fe\u8c61\u304c\u8d77\u304d\u307e\u3059\u3002\u4fe1\u53f7\u9045\u5ef6\u306e\u554f\u984c\u3092\u89e3\u6c7a\u3059\u308b\u305f\u3081\u306b\u3001\u8a98\u96fb\u7387\u306e\u4f4e\u3044Low-k\u6750\u6599\u304c\u7528\u3044\u3089\u308c\u308b\u3068\u3044\u3046\u3053\u3068\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d76\u7e01\u819c\u306b\u95a2\u3059\u308b\u6700\u65b0\u306e\u6280\u8853\u52d5\u5411<\/h2>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/KMYcKzel_dvbVdH7LS2RmRGRPXQNUs1eWBuHlaA7SB7AYma4JXjjivg1lhyMgrsXz4YPrtCDtuH88L9Rngf9MkrCqWR3uhhOGayQMx8TdDEtLCkTdtXOXgc5EpgvGehlBlqAxt8ZZ5gUqM5Zbcw1hFg\" alt=\"\"\/><\/figure>\n\n\n\n<p>2000\u5e74\u4ee3\u306b\u5165\u308a\u3001\u7d76\u7e01\u819c\u306f\u98db\u8e8d\u7684\u306b\u9032\u5316\u3092\u9042\u3052\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u6570\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u307e\u3067\u8584\u304f\u306a\u3063\u305f\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306f\u3001\u91cf\u5b50\u30ec\u30d9\u30eb\u3067\u306e\u96fb\u6d41\u306e\u6f0f\u308c\uff08\u30ea\u30fc\u30af\u96fb\u6d41\uff09\u3092\u5f15\u304d\u8d77\u3053\u3057\u307e\u3059\u3002\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u304c\u8584\u304f\u306a\u308b\u306b\u3064\u308c\u3001\u30ea\u30fc\u30af\u96fb\u6d41\u306e\u5f71\u97ff\u306f\u5927\u304d\u304f\u306a\u308a\u3001\u5927\u304d\u306a\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u3057\u304b\u3057\u3001\u3053\u306e\u554f\u984c\u3082\u3001High-k\u6750\u6599\u3092\u7528\u3044\u305f\u7d76\u7e01\u819c\u3092\u4f5c\u308b\u3053\u3068\u3067\u89e3\u6c7a\u3057\u3001\u73fe\u5728\u3067\u306f\u5b89\u5b9a\u3057\u305f\u8d85\u5c0f\u578b\u306e\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u3092\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d76\u7e01\u819c\u3092\u52a0\u5de5\u53ef\u80fd\u306a\u88c5\u7f6e<\/h2>\n\n\n\n<p>\u3053\u3053\u3067\u306f\u3001\u7d76\u7e01\u819c\u3092\u6210\u819c\u3059\u308b\u305f\u3081\u306e\u88c5\u7f6e\u3092\u7d39\u4ecb\u3057\u307e\u3059\u3002\u300cALD\u6cd5\u300d\u300c\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u300d\u305d\u308c\u305e\u308c\u306b\u5bfe\u5fdc\u3057\u305f\u88c5\u7f6e\u3092\u7d39\u4ecb\u3057\u3066\u3044\u307e\u3059\u306e\u3067\u3001\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<h3><span style=\"font-weight: 400;\">ALD\u88c5\u7f6e\uff08ALD\u6cd5\uff09\uff1aSAL1000<\/span><\/h3>\n<p>\u00a0<\/p>\n<p><span style=\"font-weight: 400;\">\u30a8\u30f3\u30c8\u30ea\u30fc\u30e2\u30c7\u30eb\u306e\u5353\u4e0a\u578bALD\u88c5\u7f6e\u3067\u3042\u308a\u3001\u5927\u4eba\u4e8c\u4eba\u3067\u7c21\u5358\u306b\u79fb\u52d5\u304c\u53ef\u80fd\u306a\u30e2\u30c7\u30eb\u3067\u3059\u3002\u30b7\u30f3\u30d7\u30eb\u304b\u3064\u7c21\u5358\u306a\u64cd\u4f5c\u304c\u7279\u5fb4\u3067\u3001\u57fa\u672c\u7684\u306a\u64cd\u4f5c\u306f\u4e0a\u90e8\u30cf\u30c3\u30c1\u306e\u958b\u9589\u3001\u57fa\u76e4\u30db\u30eb\u30c0\u30fc\u3078\u306e\u8a2d\u7f6e\u3068\u30b9\u30a4\u30c3\u30c1\u306e\u307f\u306b\u306a\u308a\u307e\u3059\u3002<\/span><\/p>\n<p><span style=\"font-weight: 400;\">\u30bf\u30c3\u30c1\u30d1\u30cd\u30eb\u90e8\u5206\u306b\u306f\u6210\u819c\u6642\u306e\u72b6\u6cc1\u304c\u8868\u793a\u3055\u308c\u308b\u305f\u3081\u3001\u78ba\u8a8d\u3057\u306a\u304c\u3089\u306e\u6210\u819c\u304c\u53ef\u80fd\u3067\u3059\u3002\u307e\u305f\u3001\u30aa\u30d7\u30b7\u30e7\u30f3\u3067\u306e\u8ffd\u52a0\u306b\u306f\u306a\u308a\u307e\u3059\u304c\u57fa\u677f\u56de\u8ee2\u6a5f\u69cb\u3092\u53d6\u308a\u4ed8\u3051\u308b\u3053\u3068\u3082\u3067\u304d\u3001\u57fa\u790e\u304b\u3089\u5fdc\u7528\u307e\u3067\u69d8\u3005\u306a\u5b9f\u9a13\u306b\u3054\u5229\u7528\u3044\u305f\u3060\u3051\u307e\u3059\u3002<\/span><\/p>\n<p><span style=\"font-weight: 400;\">\u8a73\u7d30\u306a\u30b9\u30da\u30c3\u30af\u306a\u3069\u306f\u4ee5\u4e0b\u306e\u30da\u30fc\u30b8\u3067\u516c\u958b\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/span><\/p>\n<p><a href=\"https:\/\/agus.co.jp\/?p=272\"><span style=\"font-weight: 400;\">SAL1000\u306e\u8a73\u7d30\u3092\u898b\u3066\u307f\u308b<\/span><\/a><\/p>\n<h3><span style=\"font-weight: 400;\">\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\uff08\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\uff09\uff1aSSP1000<\/span><\/h3>\n\n\n\n<figure class=\"wp-block-image\"><img decoding=\"async\" src=\"https:\/\/lh7-us.googleusercontent.com\/35kXMYDZnQfKFzhKdt576nFmJ9kAsIcfA7t2MXrpPDA3KFuMuxs9FM3PVd5cwP1K9mdLIiy23mjqCX5U_o5QWx11wULdc1PHQi6sD7BS6OXNIZpo2QAeik23xbNHXJQ7bHQmTEE9JMUFuFZ_sHzXbUw\" alt=\"\"\/><\/figure>\n\n\n\n<p>SSP1000\u306f\u5353\u4e0a\u578bRF\u30b9\u30d1\u30c3\u30bf\u306e\u30a8\u30f3\u30c8\u30ea\u30fc\u30e2\u30c7\u30eb\u3067\u3059\u3002\u6210\u819c\u65b9\u5411\u3092\u5909\u66f4\u53ef\u80fd\u306a\u305f\u3081\u3001\u6210\u819c\u3059\u308b\u88fd\u54c1\u3054\u3068\u306b\u52b9\u7387\u306e\u826f\u3044\u6210\u819c\u3092\u53ef\u80fd\u306b\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u64cd\u4f5c\u306b\u3064\u3044\u3066\u3082\u7c21\u5358\u3055\u3092\u8ffd\u6c42\u3057\u3001\u771f\u7a7a\u5f15\u304d\u306b\u3064\u3044\u3066\u306f\u958b\u59cb\u30fb\u505c\u6b62\u3068\u3082\u306b\u30dc\u30bf\u30f31\u3064\u3067\u64cd\u4f5c\u304c\u53ef\u80fd\u3067\u3059\u3002\u8907\u96d1\u306a\u30d7\u30ed\u30bb\u30b9\u306e\u591a\u304f\u3092\u81ea\u52d5\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u6a5f\u68b0\u64cd\u4f5c\u306b\u6163\u308c\u3066\u3044\u306a\u3044\u65b9\u3067\u3082\u3054\u4f7f\u7528\u3044\u305f\u3060\u3051\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u8a73\u7d30\u306a\u30b9\u30da\u30c3\u30af\u306a\u3069\u306f\u4ee5\u4e0b\u306e\u30da\u30fc\u30b8\u3067\u516c\u958b\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n<p><a href=\"https:\/\/agus.co.jp\/?p=218\">SSP1000\u306e\u8a73\u7d30\u3092\u898b\u3066\u307f\u308b<\/a><\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u7d76\u7e01\u819c\u306f\u3001\u96fb\u6975\u3068\u57fa\u677f\u306e\u9593\u3092\u96fb\u6c17\u7684\u306b\u7d76\u7e01\u3059\u308b\u305f\u3081\u306e\u5c64\u3067\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u3084\u30b7\u30ea\u30b3\u30f3\u7a92\u5316\u819c\u3092\u8584\u819c\u3068\u3057\u3066\u6210\u819c\u3057\u3001\u6a5f\u80fd\u3055\u305b\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u4e3b\u306bMOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306b\u591a\u304f\u4f7f\u7528\u3055\u308c\u307e\u3059\u304c\u3001\u8fd1\u5e74\u3067\u306fHigk-k\u6750\u6599\u3001Low-k\u6750\u6599\u306b\u3088\u308aDRAM\u3001\u30d5\u30e9\u30c3\u30b7\u30e5\u30e1\u30e2\u30ea\u3001\u914d\u7dda\u306a\u3069\u306b\u3082\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u90e8\u54c1\u306e\u5c0f\u578b\u5316\u306b\u4f34\u3044\u3001\u30ea\u30fc\u30af\u96fb\u6d41\u304c\u554f\u984c\u306b\u306a\u3063\u3066\u3044\u307e\u3057\u305f\u304c\u3001High-k\u6750\u6599\u3092\u7528\u3044\u305f\u7d76\u7e01\u819c\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u9ad8\u3044\u5b89\u5b9a\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u3067\u306f\u3001\u3053\u306e\u4ed6\u306b\u3082\u8584\u819c\u3092\u306f\u3058\u3081\u3068\u3057\u305f\u3001\u69d8\u3005\u306a\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306e\u60c5\u5831\u3092\u516c\u958b\u3057\u3066\u3044\u307e\u3059\u3002\u76ee\u306b\u898b\u3048\u306a\u3044\u3051\u308c\u3069\u8eab\u8fd1\u306b\u3042\u308b\u3001\u6bce\u65e5\u4f7f\u3063\u3066\u3044\u308b\u3082\u306e\u3082\u3042\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n<div class=\"related_link\"><span class=\"title\"><i class=\"fa-solid fa-bookmark\"><\/i>\u95a2\u9023\u8a18\u4e8b<\/span><ul><li><a href=\"https:\/\/agus.co.jp\/?p=5635\"><span class=\"thumbnail\"><img decoding=\"async\" src=\"https:\/\/lh6.googleusercontent.com\/ybwRJpAxxeC4NsPh2Fdfr2Id8syCMlBMG7YDpiSpgh_gNI6j8NchtPq59YWMkz9jsy0VbfnbfXPBZ86yNviBJ9D3cfhHng2GLkzuN5C57A55o2BxnxdAbIWXvVZAk8hKF45OL8oEKhwmmKer4tpsqls\"><\/span><span class=\"post_title\">\u5149\u89e6\u5a92\u3068\u306f\uff1f6\u3064\u306f\u305f\u3089\u304d\u304b\u3089\u8eab\u8fd1\u306a4\u3064\u306e\u6d3b\u7528\u4f8b\u3001\u4ed5\u7d44\u307f\u307e\u3067\u9ad8\u6821\u751f\u5411\u3051\u306b\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac\u3057\u307e\u3059<\/span><\/a><\/li><li><a href=\"https:\/\/agus.co.jp\/?p=4385\"><span class=\"thumbnail\"><img decoding=\"async\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2021\/12\/pixta_9718369_M.jpg\"><\/span><span class=\"post_title\">\u534a\u5c0e\u4f53\u306e\u57fa\u677f\u300c\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u300d\u304c\u3067\u304d\u308b\u307e\u3067\u3092\u308f\u304b\u308a\u3084\u3059\u304f\u89e3\u8aac<\/span><\/a><\/li><\/ul><\/div>\n\n\n\n<p>\u53c2\u8003\u30b5\u30a4\u30c8<\/p>\n\n\n\n<p><a href=\"https:\/\/semi-net.com\/word\/\">https:\/\/semi-net.com\/word\/<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/e-words.jp\/w\/High-k.html\">https:\/\/e-words.jp\/w\/High-k.html<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/e-materials.net\/outlook\/2005HTML\/2005cap\/outlook2005-chap04-04.pdf\">https:\/\/e-materials.net\/outlook\/2005HTML\/2005cap\/outlook2005-chap04-04.pdf<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/terakoyamiho.wordpress.com\/\">https:\/\/terakoyamiho.wordpress.com\/<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/xtech.nikkei.com\/dm\/article\/WORD\/20060127\/112758\/\">https:\/\/xtech.nikkei.com\/dm\/article\/WORD\/20060127\/112758\/<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/the-simple.jp\/what-is-high-k-high-dielectric-constant-gate-insulating-film-explanation-of-basic-concepts-of-semiconductor-technology\">https:\/\/the-simple.jp\/what-is-high-k-high-dielectric-constant-gate-insulating-film-explanation-of-basic-concepts-of-semiconductor-technology<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/patents.google.com\/patent\/WO2011064957A1\/ja\">https:\/\/patents.google.com\/patent\/WO2011064957A1\/ja<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/semi-net.com\/word\/%E5%B1%A4%E9%96%93%E7%B5%B6%E7%B8%81%E8%86%9C%E5%BD%A2%E6%88%90%E6%96%B9%E6%B3%95%E3%81%A8%E7%89%B9%E6%80%A7\">https:\/\/semi-net.com\/word\/%E5%B1%A4%E9%96%93%E7%B5%B6%E7%B8%81%E8%86%9C%E5%BD%A2%E6%88%90%E6%96%B9%E6%B3%95%E3%81%A8%E7%89%B9%E6%80%A7<\/a><\/p>\n\n\n\n<p><a href=\"https:\/\/www.pra.jp\/techinfo\/process\">https:\/\/www.pra.jp\/techinfo\/process<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u7d76\u7e01\u819c\u306f\u305d\u306e\u540d\u306e\u901a\u308a\u96fb\u6c17\u7684\u306b\u7d76\u7e01\u3059\u308b\u305f\u3081\u306e\u819c\u3067\u3059\u3002\u3057\u304b\u3057\u3001\u666e\u6bb5\u8033\u306b\u3059\u308b\u3053\u3068\u304c\u306a\u3044\u5206\u30a4\u30e1\u30fc\u30b8\u304c\u3064\u304d\u306b\u304f\u3044\u3082\u306e\u3060\u3068\u601d\u3044\u307e\u3059\u3002 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