{"id":8184,"date":"2025-05-14T10:00:04","date_gmt":"2025-05-14T01:00:04","guid":{"rendered":"https:\/\/agus.co.jp\/?p=8184"},"modified":"2025-06-11T05:02:33","modified_gmt":"2025-06-10T20:02:33","slug":"%e7%9c%9f%e7%a9%ba%e3%83%90%e3%83%ab%e3%83%96%e3%81%ae%e4%bb%95%e7%b5%84%e3%81%bf%e3%81%a8%e3%81%af%ef%bc%9f%e6%a7%8b%e9%80%a0%e3%83%bb%e7%a8%ae%e9%a1%9e%e3%83%bb%e9%81%b8%e5%ae%9a%e6%96%b9%e6%b3%95","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=8184","title":{"rendered":"\u771f\u7a7a\u30d0\u30eb\u30d6\u306e\u4ed5\u7d44\u307f\u3068\u306f\uff1f\u7814\u7a76\u958b\u767a\u3092\u52a0\u901f\u3059\u308b\u9078\u5b9a\u30fb\u904b\u7528\u65b9\u6cd5\u3092\u5fb9\u5e95\u89e3\u8aac"},"content":{"rendered":"\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"250\" height=\"200\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/05\/image2-1.png\" alt=\"\" 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class=\"has-fixed-layout\"><tbody><tr><td><strong>\u5f01\u4f53\uff08\u30c7\u30a3\u30b9\u30af\/\u30d7\u30e9\u30b0\/\u30b2\u30fc\u30c8\uff09<\/strong><\/td><td>\u30ac\u30b9\u6d41\u3092\u906e\u65ad\u3059\u308b\u305f\u3081\u306e\u53ef\u52d5\u90e8\u54c1\u3067\u3059\u3002\u30d0\u30eb\u30d6\u306e\u7a2e\u985e\u306b\u3088\u3063\u3066\u5f62\u72b6\u304c\u7570\u306a\u308a\u307e\u3059\u3002<\/td><\/tr><tr><td><strong>\u5f01\u5ea7\uff08\u30b7\u30fc\u30c8\uff09<\/strong><\/td><td>\u5f01\u4f53\u304c\u63a5\u89e6\u3057\u3001\u6c17\u5bc6\u6027\u306e\u3042\u308b\u30b7\u30fc\u30eb\u9762\u3092\u5f62\u6210\u3059\u308b\u56fa\u5b9a\u90e8\u54c1\u3067\u3059\u3002<\/td><\/tr><tr><td><strong>\u30b7\u30fc\u30eb\u6a5f\u69cb<\/strong><\/td><td>\u5f01\u4f53\u3068\u5f01\u5ea7\u304c\u63a5\u89e6\u3059\u308b\u3053\u3068\u3067\u3001\u30ac\u30b9\u6f0f\u308c\u3092\u5fb9\u5e95\u7684\u306b\u9632\u3050\u305f\u3081\u306e\u6700\u3082\u91cd\u8981\u306a\u90e8\u5206\u3067\u3059\u3002\u4e3b\u306bO\u30ea\u30f3\u30b0\u3084\u30e1\u30bf\u30eb\u30b7\u30fc\u30eb\u306a\u3069\u304c\u7528\u3044\u3089\u308c\u307e\u3059\u3002<\/td><\/tr><tr><td><strong>\u30d0\u30eb\u30d6\u30dc\u30c7\u30a3<\/strong><\/td><td>\u30d0\u30eb\u30d6\u5168\u4f53\u306e\u30d5\u30ec\u30fc\u30e0\u3067\u3042\u308a\u3001\u771f\u7a7a\u914d\u7ba1\u30b7\u30b9\u30c6\u30e0\u306b\u63a5\u7d9a\u3055\u308c\u307e\u3059\u3002<\/td><\/tr><tr><td><strong>\u99c6\u52d5\u90e8<\/strong><\/td><td>\u5f01\u4f53\u3092\u958b\u9589\u3055\u305b\u308b\u305f\u3081\u306e\u6a5f\u69cb\u3067\u3059\u3002\u624b\u52d5\u3001\u7a7a\u5727\u3001\u96fb\u78c1\u3001\u30e2\u30fc\u30bf\u30fc\u99c6\u52d5\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002<\/td><\/tr><tr><td><strong>\u30b9\u30c6\u30e0\/\u30b7\u30e3\u30d5\u30c8<\/strong><\/td><td>\u99c6\u52d5\u90e8\u3068\u5f01\u4f53\u3092\u9023\u7d50\u3057\u3001\u52d5\u529b\u3092\u4f1d\u9054\u3059\u308b\u90e8\u54c1\u3067\u3059\u3002<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u90e8\u54c1\u304c\u7cbe\u5bc6\u306b\u9023\u643a\u3059\u308b\u3053\u3068\u3067\u3001\u771f\u7a7a\u30d0\u30eb\u30d6\u306f\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u958b\u9589\u52d5\u4f5c\u3068\u9ad8\u3044\u30b7\u30fc\u30eb\u6027\u80fd\u3092\u6975\u9650\u306e\u771f\u7a7a\u74b0\u5883\u4e0b\u3067\u3082\u5b9f\u73fe\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u771f\u7a7a\u30d0\u30eb\u30d6\u306e\u52d5\u4f5c\u539f\u7406\u3068\u30b7\u30fc\u30eb\u6280\u8853<\/h3>\n\n\n\n<p>\u771f\u7a7a\u30d0\u30eb\u30d6\u306e\u52d5\u4f5c\u539f\u7406\u306f\u3001\u5f01\u4f53\u3092\u52d5\u304b\u3057\u3001\u5f01\u5ea7\u3068\u5bc6\u7740\u3055\u305b\u308b\u3053\u3068\u3067\u30ac\u30b9\u6d41\u3092\u906e\u65ad\u3059\u308b\u3053\u3068\u306b\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u969b\u3001\u6700\u3082\u91cd\u8981\u306a\u306e\u304c\u300c\u30b7\u30fc\u30eb\u300d\u306e\u539f\u7406\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u771f\u7a7a\u30d0\u30eb\u30d6\u306e\u30b7\u30fc\u30eb\u306f\u3001\u5f01\u4f53\u3068\u5f01\u5ea7\u306e\u9593\u306b\u9069\u5207\u306a\u6a5f\u68b0\u7684\u5727\u529b\u3092\u304b\u3051\u3001\u305d\u306e\u9593\u306e\u9699\u9593\u3092\u306a\u304f\u3059\u3053\u3068\u3067\u884c\u308f\u308c\u307e\u3059\u3002\u3053\u306e\u969b\u3001\u4e3b\u306b\u4ee5\u4e0b\u306e\u4e8c\u3064\u306e\u30b7\u30fc\u30eb\u6280\u8853\u304c\u7528\u3044\u3089\u308c\u3001\u305d\u308c\u305e\u308c\u7570\u306a\u308b\u771f\u7a7a\u9818\u57df\u3084\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306b\u5bfe\u5fdc\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">\u30a8\u30e9\u30b9\u30c8\u30de\u30fc\u30b7\u30fc\u30eb<\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7279\u5fb4<\/strong><\/li>\n<\/ul>\n\n\n\n<p>O\u30ea\u30f3\u30b0\u306a\u3069\u306e\u30b4\u30e0\u72b6\u306e\u5f3e\u6027\u7d20\u6750\uff08\u30d5\u30c3\u7d20\u30b4\u30e0\u3001NBR\u306a\u3069\uff09\u3092\u30b7\u30fc\u30eb\u6750\u3068\u3057\u3066\u4f7f\u7528\u3057\u307e\u3059\u3002\u6bd4\u8f03\u7684\u4f4e\u30b3\u30b9\u30c8\u3067\u53d6\u308a\u6271\u3044\u304c\u5bb9\u6613\u3067\u3042\u308a\u3001\u9ad8\u3044\u30b7\u30fc\u30eb\u6027\u80fd\u3092\u6bd4\u8f03\u7684\u5bb9\u6613\u306b\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5236\u7d04<\/strong><\/li>\n<\/ul>\n\n\n\n<p>\u9ad8\u6e29\u3084\u7279\u5b9a\u306e\u8150\u98df\u6027\u5316\u5b66\u7269\u8cea\u306b\u306f\u5f31\u304f\u3001\u7d4c\u5e74\u52a3\u5316\u306b\u3088\u308b\u30ac\u30b9\u653e\u51fa\uff08\u30a2\u30a6\u30c8\u30ac\u30b9\uff09\u306e\u61f8\u5ff5\u304c\u3042\u308b\u305f\u3081\u3001\u8d85\u9ad8\u771f\u7a7a\u9818\u57df\u306b\u306f\u4e0d\u5411\u304d\u3067\u3059\u3002\u7279\u306b\u3001\u9ad8\u7d14\u5ea6\u306a\u30d7\u30ed\u30bb\u30b9\u3092\u8981\u3059\u308b\u7814\u7a76\u3067\u306f\u3001\u30a2\u30a6\u30c8\u30ac\u30b9\u304c\u5b9f\u9a13\u7d50\u679c\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u30ea\u30b9\u30af\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7528\u9014<\/strong><\/li>\n<\/ul>\n\n\n\n<p>\u4e3b\u306b\u7c97\u771f\u7a7a\u304b\u3089\u9ad8\u771f\u7a7a\uff0810\u22125 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class=\"wp-block-list\">\n<li><strong>\u7279\u5fb4<\/strong><\/li>\n<\/ul>\n\n\n\n<p><strong>\u9285\u306a\u3069\u306e\u91d1\u5c5e\u30ac\u30b9\u30b1\u30c3\u30c8<\/strong>\uff08\u7528\u9014\u306b\u5fdc\u3058\u3066\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u30cb\u30c3\u30b1\u30eb\u306a\u3069\u3082\u4f7f\u7528\u3055\u308c\u307e\u3059\uff09\u3092\u30b7\u30fc\u30eb\u6750\u3068\u3057\u3066\u4f7f\u7528\u3057\u307e\u3059\u3002\u975e\u5e38\u306b\u9ad8\u3044\u8010\u71b1\u6027\u3001\u8010\u85ac\u54c1\u6027\u3001\u305d\u3057\u3066\u30a2\u30a6\u30c8\u30ac\u30b9\u304c\u6975\u3081\u3066\u5c11\u306a\u3044\u3068\u3044\u3046\u7279\u6027\u3092\u6301\u3061\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u6975\u3081\u3066\u30af\u30ea\u30fc\u30f3\u306a\u771f\u7a7a\u74b0\u5883\u304c\u8981\u6c42\u3055\u308c\u308b\u7814\u7a76\u958b\u767a\u306b\u6700\u9069\u3067\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5236\u7d04<\/strong><\/li>\n<\/ul>\n\n\n\n<p>\u4e00\u5ea6\u7de0\u3081\u4ed8\u3051\u308b\u3068\u30ac\u30b9\u30b1\u30c3\u30c8\u304c\u5851\u6027\u5909\u5f62\u3059\u308b\u305f\u3081\u3001\u518d\u5229\u7528\u304c\u3067\u304d\u305a\u4ea4\u63db\u304c\u5fc5\u8981\u3068\u306a\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u521d\u671f\u30b3\u30b9\u30c8\u304c\u9ad8\u304f\u3001\u7de0\u3081\u4ed8\u3051\u306b\u306f\u5c02\u7528\u5de5\u5177\u3084\u719f\u7df4\u3092\u8981\u3059\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7528\u9014<\/strong><\/li>\n<\/ul>\n\n\n\n<p>\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff1a10\u22127 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class=\"wp-block-list\">\n<li>\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u8a2d\u8a08\u304c\u53ef\u80fd\u3067\u3001\u9650\u3089\u308c\u305f\u8a2d\u7f6e\u30b9\u30da\u30fc\u30b9\u306e\u7814\u7a76\u8a2d\u5099\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u30b9\u30c8\u30ed\u30fc\u30af\u304c\u77ed\u304f\u3001\u6bd4\u8f03\u7684\u901f\u3044\u958b\u9589\u304c\u53ef\u80fd\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u6d41\u8def\u304c\u4e00\u5ea6\u66f2\u304c\u308b\u305f\u3081\u3001\u30b2\u30fc\u30c8\u30d0\u30eb\u30d6\u306b\u6bd4\u3079\u3066\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9\u306f\u3084\u3084\u52a3\u308a\u307e\u3059\u304c\u3001\u4e00\u822c\u7684\u306a\u7814\u7a76\u7528\u9014\u3067\u306f\u5341\u5206\u306a\u6027\u80fd\u3092\u767a\u63ee\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u5f01\u5ea7\u3078\u306e\u7740\u5ea7\u306b\u3088\u3063\u3066\u30b7\u30fc\u30eb\u3059\u308b\u305f\u3081\u3001\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u906e\u65ad\u304c\u53ef\u80fd\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u30a8\u30e9\u30b9\u30c8\u30de\u30fc\u30b7\u30fc\u30eb\u3068\u30e1\u30bf\u30eb\u30b7\u30fc\u30eb\u306e\u4e21\u65b9\u304c\u7528\u3044\u3089\u308c\u3001\u7c97\u771f\u7a7a\u304b\u3089\u8d85\u9ad8\u771f\u7a7a\u307e\u3067\u5e45\u5e83\u3044\u771f\u7a7a\u9818\u57df\u306b\u5bfe\u5fdc\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u25b6\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<p>\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u5c0e\u5165\u30e9\u30a4\u30f3\uff08\u7279\u306b\u7cbe\u5bc6\u306a\u6d41\u91cf\u5236\u5fa1\u304c\u5fc5\u8981\u306aCVD\/ALD\u30d7\u30ed\u30bb\u30b9\u306a\u3069\uff09\u3001\u771f\u7a7a\u6392\u6c17\u30e9\u30a4\u30f3\u306e\u5206\u5c90\u3001\u7814\u7a76\u7528\u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u88dc\u52a9\u6392\u6c17\u30e9\u30a4\u30f3\u3001\u30ed\u30fc\u30c9\u30ed\u30c3\u30af\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u9694\u96e2\u3001\u5206\u6790\u88c5\u7f6e\u306a\u3069\u3001\u69d8\u3005\u306a\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3001\u7cbe\u5bc6\u306a\u30ac\u30b9\u6d41\u91cf\u5236\u5fa1\u304c\u5fc5\u8981\u306a\u53cd\u5fdc\u30d7\u30ed\u30bb\u30b9\u306b\u3082\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u2462\u30d0\u30bf\u30d5\u30e9\u30a4\u30d0\u30eb\u30d6\uff1a\u8fc5\u901f\u306a\u958b\u9589\u3068\u6392\u6c17\u30e9\u30a4\u30f3\u5bfe\u5fdc<\/h3>\n\n\n\n<p>\u30d0\u30bf\u30d5\u30e9\u30a4\u30d0\u30eb\u30d6\u306f\u3001\u5186\u76e4\u72b6\u306e\u5f01\u4f53\u304c\u8ef8\u3092\u4e2d\u5fc3\u306b\u56de\u8ee2\u3059\u308b\u3053\u3068\u3067\u958b\u9589\u3059\u308b\u30d0\u30eb\u30d6\u3067\u3059\u3002\u8776\u306e\u7fbd\u306e\u3088\u3046\u306b\u898b\u3048\u308b\u3053\u3068\u304b\u3089\u300c\u30d0\u30bf\u30d5\u30e9\u30a4\u300d\u3068\u547c\u3070\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u25b6\u7279\u5fb4<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u69cb\u9020\u304c\u30b7\u30f3\u30d7\u30eb\u3067\u3001\u8efd\u91cf\u304b\u3064\u975e\u5e38\u306b\u30b3\u30f3\u30d1\u30af\u30c8\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u5927\u53e3\u5f84\u306b\u5bfe\u5fdc\u3057\u3084\u3059\u304f\u3001\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306b\u512a\u308c\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u958b\u9589\u304c\u975e\u5e38\u306b\u901f\u304f\u3001\u7dca\u6025\u6642\u306e\u30b7\u30e3\u30c3\u30c8\u30c0\u30a6\u30f3\u3084\u3001\u30d7\u30ed\u30bb\u30b9\u9014\u4e2d\u306e\u8fc5\u901f\u306a\u30ac\u30b9\u5207\u308a\u66ff\u3048\u306b\u3082\u5bfe\u5fdc\u53ef\u80fd\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u5168\u9589\u6642\u3067\u3082\u5f01\u4f53\u304c\u6d41\u8def\u5185\u306b\u6b8b\u308b\u305f\u3081\u3001\u30b2\u30fc\u30c8\u30d0\u30eb\u30d6\u306b\u6bd4\u3079\u3066\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9\u306f\u4f4e\u3044\u3067\u3059\u304c\u3001\u7c97\u5f15\u304d\u6642\u306b\u306f\u5341\u5206\u306a\u6027\u80fd\u3092\u767a\u63ee\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li>\u4e3b\u306b\u30a8\u30e9\u30b9\u30c8\u30de\u30fc\u30b7\u30fc\u30eb\u304c\u7528\u3044\u3089\u308c\u3001\u4e2d\u771f\u7a7a\u304b\u3089\u9ad8\u771f\u7a7a\u9818\u57df\u3067\u306e\u4f7f\u7528\u304c\u591a\u3044\u3067\u3059\u3002<\/li>\n\n\n\n<li>\u90e8\u5206\u958b\u9589\u306b\u3088\u308a\u3001\u6d41\u91cf\u8abf\u6574\u6a5f\u80fd\u3092\u6301\u3064\u3082\u306e\u3082\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u25b6\u4e3b\u306a\u7528\u9014<\/strong><\/p>\n\n\n\n<p>\u7814\u7a76\u7528\u771f\u7a7a\u88c5\u7f6e\u306e\u7c97\u5f15\u304d\u30e9\u30a4\u30f3\u3001\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u5c0e\u5165\u30e9\u30a4\u30f3\uff08\u5927\u6d41\u91cf\u304c\u5fc5\u8981\u306a\u5834\u5408\uff09\u3001\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u306e\u5927\u6c17\u958b\u653e\u5f01\uff08\u30d9\u30f3\u30c8\u30d0\u30eb\u30d6\uff09\u306a\u3069\u3001\u8fc5\u901f\u306a\u958b\u9589\u3068\u5927\u6d41\u91cf\u306b\u5bfe\u5fdc\u3059\u308b\u7528\u9014\u3001\u307e\u305f\u306f\u5727\u529b\u5236\u5fa1\uff08\u6d41\u91cf\u8abf\u6574\uff09\u304c\u5fc5\u8981\u306a\u7c97\u771f\u7a7a\u30d7\u30ed\u30bb\u30b9\u3067\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u6392\u6c17\u30e9\u30a4\u30f3\u306e\u6d41\u8def\u5207\u308a\u66ff\u3048\u3084\u3001\u77ed\u6642\u9593\u3067\u306e\u6392\u6c17\u304c\u5fc5\u8981\u306a\u5834\u9762\u3067\u305d\u306e\u5229\u4fbf\u6027\u3092\u767a\u63ee\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7814\u7a76\u958b\u767a\u8ab2\u984c\u306b\u5fdc\u3058\u305f\u771f\u7a7a\u30d0\u30eb\u30d6\u306e\u6700\u9069\u306a\u9078\u5b9a\u65b9\u6cd5<\/h2>\n\n\n\n<p>\u6700\u9069\u306a\u771f\u7a7a\u30d0\u30eb\u30d6\u3092\u9078\u3076\u3053\u3068\u306f\u3001\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0\u306e\u6027\u80fd\u3001\u4fe1\u983c\u6027\u3001\u305d\u3057\u3066\u7814\u7a76\u958b\u767a\u306b\u304a\u3051\u308b\u5b9f\u9a13\u7d50\u679c\u306e\u518d\u73fe\u6027\u3001\u3055\u3089\u306b\u306f\u904b\u7528\u30b3\u30b9\u30c8\u306b\u76f4\u7d50\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u4ee5\u4e0b\u306e\u30dd\u30a4\u30f3\u30c8\u3092\u8907\u5408\u7684\u306b\u8003\u616e\u3057\u3066\u9078\u5b9a\u3092\u9032\u3081\u307e\u3057\u3087\u3046\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u3068\u5230\u9054\u771f\u7a7a\u5ea6\u304b\u3089\u306e\u9078\u5b9a\u30dd\u30a4\u30f3\u30c8<\/h3>\n\n\n\n<p><strong>\u25b6\u5230\u9054\u771f\u7a7a\u5ea6\u8981\u4ef6<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4f4e\u771f\u7a7a\uff5e\u4e2d\u771f\u7a7a\uff08\u7c97\u5f15\u304d\u30d7\u30ed\u30bb\u30b9\uff09:<\/strong>\u00a0<\/li>\n<\/ul>\n\n\n\n<p>100 Pa \u301c 10\u22123 Pa \u7a0b\u5ea6\u306e\u771f\u7a7a\u5ea6\u3067\u306f\u3001\u30d0\u30bf\u30d5\u30e9\u30a4\u30d0\u30eb\u30d6\u3001\u30dc\u30fc\u30eb\u30d0\u30eb\u30d6\u306a\u3069\u304c\u30b3\u30b9\u30c8\u3068\u6027\u80fd\u306e\u30d0\u30e9\u30f3\u30b9\u3067\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u9ad8\u771f\u7a7a\uff5e\u8d85\u9ad8\u771f\u7a7a\uff08\u7cbe\u5bc6\u30d7\u30ed\u30bb\u30b9\uff09:<\/strong><\/li>\n<\/ul>\n\n\n\n<p>&nbsp;10\u22125 Pa \u4ee5\u4e0b\u306e\u771f\u7a7a\u5ea6\u304c\u5fc5\u8981\u306a\u5834\u5408\u3001\u30b2\u30fc\u30c8\u30d0\u30eb\u30d6\u3001\u30a2\u30f3\u30b0\u30eb\u30d0\u30eb\u30d6\u3001\u305d\u3057\u3066\u5fc5\u305a<strong>\u30e1\u30bf\u30eb\u30b7\u30fc\u30eb\u30bf\u30a4\u30d7<\/strong>\u306e\u30d0\u30eb\u30d6\u304c\u5fc5\u9808\u3068\u306a\u308a\u307e\u3059\u3002\u7279\u306b\u8868\u9762\u79d1\u5b66\u3001MBE\u3001\u9ad8\u7d14\u5ea6\u8584\u819c\u306e\u6210\u819c\u306a\u3069\u3001\u6b8b\u7559\u30ac\u30b9\u306b\u3088\u308b\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3092\u6975\u9650\u307e\u3067\u6392\u9664\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u7814\u7a76\u3067\u306f\u3001\u8d85\u9ad8\u771f\u7a7a\u5bfe\u5fdc\u3068\u305d\u308c\u306b\u4f34\u3046\u4f4e\u30a2\u30a6\u30c8\u30ac\u30b9\u7279\u6027\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n\n\n\n<p><strong>\u25b6\u914d\u7ba1\u53e3\u5f84\u3068\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5c0f\u53e3\u5f84\u30e9\u30a4\u30f3\uff08\u30ac\u30b9\u5c0e\u5165\u306a\u3069\uff09\uff1a<\/strong><\/li>\n<\/ul>\n\n\n\n<p>&nbsp;\u30a2\u30f3\u30b0\u30eb\u30d0\u30eb\u30d6\u306a\u3069\u304c\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u4e3b\u6392\u6c17\u30e9\u30a4\u30f3\uff1a<\/strong>\u00a0<\/li>\n<\/ul>\n\n\n\n<p>\u7814\u7a76\u7528\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u6392\u6c17\u901f\u5ea6\u3092\u6700\u5927\u5316\u3057\u305f\u3044\u5834\u5408\u3001\u30b2\u30fc\u30c8\u30d0\u30eb\u30d6\u3084\u30d0\u30bf\u30d5\u30e9\u30a4\u30d0\u30eb\u30d6\u304c\u6709\u5229\u3067\u3059\u3002\u7279\u306b\u5206\u5b50\u6d41\u9818\u57df\u3067\u306e\u30ac\u30b9\u8f38\u9001\u52b9\u7387\u304c\u91cd\u8981\u306a\u5834\u5408\u306f\u3001\u30b2\u30fc\u30c8\u30d0\u30eb\u30d6\u306e\u9ad8\u3044\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9\u304c\u5fc5\u9808\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u25b6\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u306e\u7a2e\u985e\u3068\u6750\u6599\u9069\u5408\u6027:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30af\u30ea\u30fc\u30f3\u306a\u4e0d\u6d3b\u6027\u30ac\u30b9\uff08Ar, N2\u306a\u3069\uff09\uff1a<\/strong>\u00a0<\/li>\n<\/ul>\n\n\n\n<p>\u307b\u3068\u3093\u3069\u306e\u6a19\u6e96\u7684\u306a\u30d0\u30eb\u30d6\u304c\u4f7f\u7528\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u8150\u98df\u6027\u30ac\u30b9\uff08F\u7cfb\u3001Cl\u7cfb\u306a\u3069\uff09\uff1a<\/strong><\/li>\n<\/ul>\n\n\n\n<p>&nbsp;\u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u304c\u8150\u98df\u6027\u3092\u6301\u3064\u5834\u5408\u3001\u30d0\u30eb\u30d6\u306e\u6750\u8cea\uff08\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc316L\u3001\u30cb\u30c3\u30b1\u30eb\u5408\u91d1\u306a\u3069\uff09\u3084\u30b7\u30fc\u30eb\u6750\u306e\u8010\u85ac\u54c1\u6027\u3092\u53b3\u5bc6\u306b\u78ba\u8a8d\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u5f01\u68d2\u3084\u99c6\u52d5\u90e8\u3078\u306e\u8150\u98df\u6027\u30ac\u30b9\u306e\u56de\u308a\u8fbc\u307f\u3092\u9632\u3050\u7279\u6b8a\u306a\u69cb\u9020\uff08\u30d9\u30ed\u30fc\u30ba\u30b7\u30fc\u30eb\u306a\u3069\uff09\u3084\u3001\u96fb\u78c1\u90e8\u304c\u6d41\u4f53\u306b\u63a5\u89e6\u3057\u306a\u3044\u69cb\u9020\u306e\u30d0\u30eb\u30d6\uff08\u4f8b: \u83c5\u88fd\u4f5c\u6240\u306e\u96fb\u78c1\u30ed\u30fc\u30bf\u30ea\u30fc\u30dd\u30f3\u30d7\u30d0\u30eb\u30d6\u306b\u63a1\u7528\u3055\u308c\u3066\u3044\u308b\u30a2\u30a4\u30bd\u30ec\u30fc\u30b7\u30e7\u30f3\u30d0\u30eb\u30d6\u306a\u3069\uff09\u3092\u9078\u5b9a\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u308c\u306b\u3088\u308a\u3001\u88c5\u7f6e\u306e\u5bff\u547d\u5ef6\u9577\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7c89\u5875\/\u7c92\u5b50\u3092\u542b\u3080\u30ac\u30b9\uff08\u30b9\u30d1\u30c3\u30bf\u7c92\u5b50\u3001\u53cd\u5fdc\u751f\u6210\u7269\u306a\u3069\uff09\uff1a<\/strong>\u00a0<\/li>\n<\/ul>\n\n\n\n<p>\u30b2\u30fc\u30c8\u30d0\u30eb\u30d6\u306e\u3088\u3046\u306b\u5f01\u4f53\u304c\u30b7\u30fc\u30eb\u9762\u304b\u3089\u5927\u304d\u304f\u96e2\u308c\u3066\u79fb\u52d5\u3059\u308b\u30bf\u30a4\u30d7\u306f\u3001\u7c92\u5b50\u304c\u30b7\u30fc\u30eb\u9762\u306b\u565b\u307f\u8fbc\u307f\u306b\u304f\u304f\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3084\u30b7\u30fc\u30eb\u4e0d\u826f\u306e\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u99c6\u52d5\u65b9\u5f0f\u304c\u7814\u7a76\u30d7\u30ed\u30bb\u30b9\u306b\u4e0e\u3048\u308b\u5f71\u97ff<\/h3>\n\n\n\n<p>\u771f\u7a7a\u30d0\u30eb\u30d6\u306e\u99c6\u52d5\u65b9\u5f0f\u306f\u3001\u64cd\u4f5c\u6027\u3001\u81ea\u52d5\u5316\u306e\u6709\u7121\u3001\u5fdc\u7b54\u901f\u5ea6\u3001\u305d\u3057\u3066\u30b7\u30b9\u30c6\u30e0\u5168\u4f53\u306e\u8a2d\u8a08\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002\u7814\u7a76\u958b\u767a\u306e\u52b9\u7387\u6027\u3068\u518d\u73fe\u6027\u3092\u9ad8\u3081\u308b\u4e0a\u3067\u91cd\u8981\u306a\u9078\u629e\u80a2\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p><strong>\u25b6\u624b\u52d5\u99c6\u52d5<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7279\u5fb4:<\/strong> \u6700\u3082\u30b7\u30f3\u30d7\u30eb\u3067\u4f4e\u30b3\u30b9\u30c8\u3002\u96fb\u6e90\u4e0d\u8981\u3002<\/li>\n\n\n\n<li><strong>\u7528\u9014:<\/strong> \u958b\u9589\u983b\u5ea6\u304c\u4f4e\u3044\u3001\u81ea\u52d5\u5316\u304c\u4e0d\u8981\u306a\u7b87\u6240\u3001\u307e\u305f\u306f\u624b\u52d5\u3067\u306e\u5fae\u8abf\u6574\u304c\u6c42\u3081\u3089\u308c\u308b\u7279\u5b9a\u306e\u5b9f\u9a13\u30d7\u30ed\u30bb\u30b9\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u25b6\u7a7a\u5727\uff08\u30cb\u30e5\u30fc\u30de\u30c1\u30c3\u30af\uff09\u99c6\u52d5<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7279\u5fb4:<\/strong> \u5727\u7e2e\u7a7a\u6c17\u3067\u5f01\u4f53\u3092\u99c6\u52d5\u3002\u9060\u9694\u64cd\u4f5c\u3084\u30d7\u30ed\u30bb\u30b9\u81ea\u52d5\u5316\u304c\u53ef\u80fd\u3002\u9ad8\u901f\u958b\u9589\u304c\u53ef\u80fd\u3067\u3001\u5fdc\u7b54\u6027\u306b\u512a\u308c\u308b\u3002\u96fb\u6e90\u306f\u4e0d\u8981\uff08\u305f\u3060\u3057\u3001\u5727\u7e2e\u7a7a\u6c17\u6e90\u306f\u5fc5\u8981\uff09\u3002<\/li>\n\n\n\n<li><strong>\u7528\u9014:<\/strong> \u958b\u9589\u983b\u5ea6\u304c\u9ad8\u3044\u3001\u81ea\u52d5\u5236\u5fa1\u304c\u5fc5\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u3001\u3042\u308b\u3044\u306f\u5b89\u5168\u6027\u78ba\u4fdd\u306e\u305f\u3081\u306e\u7dca\u6025\u906e\u65ad\u6a5f\u80fd\u304c\u5fc5\u8981\u306a\u7b87\u6240\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306a\u3069\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3001\u7814\u7a76\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u9ad8\u3044\u518d\u73fe\u6027\u3084\u8907\u96d1\u306a\u30b7\u30fc\u30b1\u30f3\u30b9\u5236\u5fa1\u306b\u8ca2\u732e\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u25b6\u96fb\u78c1\u99c6\u52d5\uff08\u30bd\u30ec\u30ce\u30a4\u30c9\uff09<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7279\u5fb4:<\/strong> \u96fb\u78c1\u77f3\u306e\u529b\u3067\u5f01\u4f53\u3092\u99c6\u52d5\u3002\u975e\u5e38\u306b\u9ad8\u901f\u306a\u958b\u9589\u304c\u53ef\u80fd\u3067\u3001\u5c0f\u578b\u5316\u3057\u3084\u3059\u3044\u3002<\/li>\n\n\n\n<li><strong>\u7528\u9014:<\/strong> \u77ac\u6642\u306e\u5207\u308a\u66ff\u3048\u304c\u5fc5\u8981\u306a\u7cbe\u5bc6\u5236\u5fa1\u3001\u4f8b\u3048\u3070\u9ad8\u7cbe\u5ea6\u306a\u30ac\u30b9\u5c0e\u5165\u30fb\u6392\u6c17\uff08\u4f8b\uff1a\u30d1\u30eb\u30b9\u30ac\u30b9\u5c0e\u5165\u306b\u3088\u308b\u819c\u539a\u5236\u5fa1\uff09\u3001\u30ea\u30fc\u30af\u5f01\u3001\u30d9\u30f3\u30c8\u5f01\u306a\u3069\u3001\u5fae\u91cf\u30ac\u30b9\u6d41\u91cf\u5236\u5fa1\u306e\u5fdc\u7b54\u6027\u304c\u6c42\u3081\u3089\u308c\u308b\u7814\u7a76\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u25b6\u30e2\u30fc\u30bf\u30fc\u99c6\u52d5:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u7279\u5fb4:<\/strong> \u30e2\u30fc\u30bf\u30fc\u3067\u5f01\u4f53\u3092\u99c6\u52d5\u3002\u975e\u5e38\u306b\u7cbe\u5bc6\u306a\u4f4d\u7f6e\u6c7a\u3081\u3084\u6d41\u91cf\u8abf\u6574\u304c\u53ef\u80fd\u3002<\/li>\n\n\n\n<li><strong>\u7528\u9014:<\/strong> \u7cbe\u5bc6\u306a\u6d41\u91cf\u5236\u5fa1\uff08\u4f8b\uff1a\u30b3\u30f3\u30c0\u30af\u30bf\u30f3\u30b9\u5236\u5fa1\u306b\u3088\u308b\u5727\u529b\u8abf\u6574\uff09\u3001\u307e\u305f\u306f\u958b\u9589\u901f\u5ea6\u3092\u30d7\u30ed\u30b0\u30e9\u30e0\u306b\u3088\u3063\u3066\u6b63\u78ba\u306b\u8abf\u6574\u3057\u305f\u3044\u5834\u5408\u3002\u7279\u306b\u3001\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u5727\u529b\u30e9\u30f3\u30d7\u30a2\u30c3\u30d7\u30fb\u30c0\u30a6\u30f3\u306e\u5236\u5fa1\u3084\u3001\u7279\u6b8a\u306a\u6392\u6c17\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u304c\u5fc5\u8981\u306a\u5834\u5408\u306b\u6709\u52b9\u3067\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30b7\u30fc\u30eb\u69cb\u9020\u304c\u771f\u7a7a\u5ea6\u3068\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306b\u4e0e\u3048\u308b\u5f71\u97ff<\/h3>\n\n\n\n<p>\u30b7\u30fc\u30eb\u69cb\u9020\u306e\u9078\u629e\u306f\u3001\u5230\u9054\u53ef\u80fd\u306a\u771f\u7a7a\u5ea6\u3068\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u30ea\u30b9\u30af\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u305f\u3081\u3001\u7814\u7a76\u76ee\u7684\u3068\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u306b\u5408\u81f4\u3055\u305b\u308b\u3053\u3068\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n\n\n\n<p><strong>\u25b6\u30a8\u30e9\u30b9\u30c8\u30de\u30fc\u30b7\u30fc\u30eb:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5229\u70b9:<\/strong> \u6bd4\u8f03\u7684\u5b89\u4fa1\u3067\u3001\u53d6\u308a\u6271\u3044\u304c\u5bb9\u6613\u3002\u826f\u597d\u306a\u30b7\u30fc\u30eb\u6027\u3092\u6bd4\u8f03\u7684\u5bb9\u6613\u306b\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u6b20\u70b9:<\/strong> \u8010\u71b1\u6027\u30fb\u8010\u85ac\u54c1\u6027\u304c\u9650\u5b9a\u7684\u3067\u3001\u9ad8\u6e29\u3084\u8150\u98df\u6027\u30ac\u30b9\u306b\u306f\u4e0d\u5411\u304d\u3002\u307e\u305f\u3001\u30a2\u30a6\u30c8\u30ac\u30b9\uff08\u30b7\u30fc\u30eb\u6750\u304b\u3089\u306e\u30ac\u30b9\u653e\u51fa\uff09\u304c\u3042\u308b\u305f\u3081\u3001\u8d85\u9ad8\u771f\u7a7a\u3067\u306f\u6b8b\u7559\u30ac\u30b9\u306b\u3088\u308b\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u6e90\u3068\u306a\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u7cbe\u5bc6\u306a\u7d44\u6210\u5206\u6790\u3084\u8868\u9762\u53cd\u5fdc\u306e\u7814\u7a76\u306b\u304a\u3044\u3066\u306f\u3001\u81f4\u547d\u7684\u306a\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u7528\u9014:<\/strong> \u4f4e\u771f\u7a7a\u304b\u3089\u9ad8\u771f\u7a7a\uff0810\u22125 Pa\u7a0b\u5ea6\uff09\u307e\u3067\u306e\u5e45\u5e83\u3044\u7528\u9014\u3002\u7c97\u5f15\u304d\u30e9\u30a4\u30f3\u3084\u3001\u30a2\u30a6\u30c8\u30ac\u30b9\u304c\u8a31\u5bb9\u3055\u308c\u308b\u30b7\u30b9\u30c6\u30e0\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u25b6\u30e1\u30bf\u30eb\u30b7\u30fc\u30eb:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5229\u70b9:<\/strong> <strong>\u8d85\u9ad8\u771f\u7a7a\uff08UHV\uff09\u5bfe\u5fdc\u304c\u53ef\u80fd<\/strong>\u3067\u3001\u6975\u3081\u3066\u4f4e\u3044\u30a2\u30a6\u30c8\u30ac\u30b9\u7279\u6027\u3092\u6301\u3061\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u30af\u30ea\u30fc\u30f3\u306a\u74b0\u5883\u304c\u4e0d\u53ef\u6b20\u306a\u6700\u5148\u7aef\u7814\u7a76\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u5229\u70b9\u3067\u3059\u3002\u9ad8\u3044\u8010\u71b1\u6027\u30fb\u8010\u85ac\u54c1\u6027\u304c\u3042\u308a\u3001\u53b3\u3057\u3044\u30d7\u30ed\u30bb\u30b9\u6761\u4ef6\u4e0b\u3067\u3082\u5b89\u5b9a\u3057\u305f\u30b7\u30fc\u30eb\u6027\u80fd\u3092\u7dad\u6301\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u6b20\u70b9:<\/strong> 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Pa\u4ee5\u4e0b\uff09\u304c\u5fc5\u8981\u306a\u6700\u5148\u7aef\u306e\u7814\u7a76\u958b\u767a\uff08\u4f8b\uff1a\u8868\u9762\u5206\u6790\u3001\u5206\u5b50\u7dda\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3001\u30af\u30ea\u30fc\u30f3\u30d7\u30ed\u30bb\u30b9\uff09<\/strong>\u3001\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u3001\u307e\u305f\u306f\u6975\u3081\u3066\u53b3\u5bc6\u306a\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u7ba1\u7406\u304c\u6c42\u3081\u3089\u308c\u308b\u7528\u9014\u3002<\/li>\n<\/ul>\n\n\n\n<h2 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