{"id":8416,"date":"2025-07-29T13:54:14","date_gmt":"2025-07-29T04:54:14","guid":{"rendered":"https:\/\/agus.co.jp\/?p=8416"},"modified":"2025-08-06T17:40:17","modified_gmt":"2025-08-06T08:40:17","slug":"ald%ef%bc%88%e5%8e%9f%e5%ad%90%e5%b1%a4%e5%a0%86%e7%a9%8d%e6%b3%95%ef%bc%89%e3%81%ae%e3%83%97%e3%83%aa%e3%82%ab%e3%83%bc%e3%82%b5%ef%bc%88%e5%89%8d%e9%a7%86%e4%bd%93%ef%bc%89%e3%81%a8%e3%81%af","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=8416","title":{"rendered":"ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\uff08\u524d\u99c6\u4f53\uff09\u3068\u306f\uff1f"},"content":{"rendered":"\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"640\" height=\"425\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/07\/image2.jpg\" alt=\"\" class=\"wp-image-8417\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/07\/image2.jpg 640w, https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/07\/image2-300x199.jpg 300w\" sizes=\"auto, (max-width: 640px) 100vw, 640px\" 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class=\"kakomi\">\n<p>\u9ad8\u7cbe\u5ea6\u306a\u8584\u819c\u6210\u819c\u3092\u5b9f\u73fe\u3059\u308bALD\u88c5\u7f6e\u3092\u304a\u63a2\u3057\u3067\u3059\u304b\uff1f\u83c5\u88fd\u4f5c\u6240\u306f\u3001\u5927\u5b66\u306e\u7814\u7a76\u6240\u3067\u3082\u5c0e\u5165\u5b9f\u7e3e\u306e\u3042\u308bALD\u88c5\u7f6e\u3067\u3001\u304a\u5ba2\u69d8\u306e\u7814\u7a76\u958b\u767a\u3092\u5f37\u529b\u306b\u652f\u63f4\u3057\u307e\u3059\u3002\u500b\u5225\u306e\u7814\u7a76\u76ee\u7684\u306b\u5408\u308f\u305b\u305f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3084\u3001\u5c0e\u5165\u524d\u306e\u30c6\u30b9\u30c8\u6210\u819c\u3082\u53ef\u80fd\u3067\u3059\u3002ALD\u88c5\u7f6e\u306e\u3054\u691c\u8a0e\u3084\u3054\u76f8\u8ac7\u306f\u3001\u305c\u3072\u5f53\u793e\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002<\/p>\n<p><a href=\"https:\/\/agus.co.jp\/?page_id=95\" class=\"cvbtn cvbtn_2\">\u304a\u554f\u3044\u5408\u308f\u305b\u306f\u3053\u3061\u3089<\/a><\/p>\n<\/div>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">ALD\u30d7\u30ea\u30ab\u30fc\u30b5\uff08\u524d\u99c6\u4f53\uff09\u3068\u306f\uff1f<\/h2>\n\n\n\n<p>ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u306f\u3001\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u4e0d\u53ef\u6b20\u306a\u3001\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u306e\u6975\u3081\u3066\u7cbe\u5bc6\u306a\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u6280\u8853\u3067\u3059\u3002\u3053\u306eALD\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u819c\u306e\u6750\u6599\u3068\u306a\u308b\u9375\u3092\u63e1\u308b\u306e\u304c\u300c\u30d7\u30ea\u30ab\u30fc\u30b5\uff08\u524d\u99c6\u4f53\uff09\u300d\u3068\u547c\u3070\u308c\u308b\u7279\u6b8a\u306a\u5316\u5408\u7269\u3067\u3059\u3002\u30d7\u30ea\u30ab\u30fc\u30b5\u306f\u3001\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u306e\u52b9\u7387\u3068\u7d50\u679c\u3092\u5927\u304d\u304f\u5de6\u53f3\u3059\u308b\u3001ALD\u306e\u5fc3\u81d3\u90e8\u3068\u3082\u8a00\u3048\u308b\u5b58\u5728\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u30d7\u30ea\u30ab\u30fc\u30b5\uff08\u524d\u99c6\u4f53\uff09\u306e\u5b9a\u7fa9\u3068ALD\u306b\u304a\u3051\u308b\u5f79\u5272<\/h2>\n\n\n\n<p>\u30d7\u30ea\u30ab\u30fc\u30b5\uff08precursor\uff09\u3068\u306f\u3001\u5316\u5b66\u53cd\u5fdc\u306b\u304a\u3044\u3066\u6700\u7d42\u751f\u6210\u7269\u306b\u81f3\u308b\u307e\u3067\u306e\u9014\u4e2d\u3067\u751f\u6210\u3055\u308c\u308b\u7269\u8cea\u3001\u3042\u308b\u3044\u306f\u6700\u7d42\u751f\u6210\u7269\u3068\u306a\u308b\u524d\u306e\u6750\u6599\u7269\u8cea\u3092\u6307\u3059\u5316\u5b66\u7528\u8a9e\u3067\u3059\u3002ALD\u306b\u304a\u3044\u3066\u306f\u3001\u3053\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u304c\u6c17\u4f53\u72b6\u614b\u3067\u53cd\u5fdc\u30c1\u30e3\u30f3\u30d0\u30fc\u306b\u5c0e\u5165\u3055\u308c\u3001\u57fa\u677f\u8868\u9762\u3067\u9078\u629e\u7684\u306b\u53cd\u5fdc\u3059\u308b\u3053\u3068\u3067\u3001\u539f\u5b501\u5c64\u3054\u3068\u306e\u8584\u819c\u3092\u5f62\u6210\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>ALD\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u901a\u5e38\u30012\u7a2e\u985e\u4ee5\u4e0a\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u304c\u4ea4\u4e92\u306b\u5c0e\u5165\u3055\u308c\u307e\u3059\u3002\u4f8b\u3048\u3070\u3001\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08Al\u2082O\u2083\uff09\u3092\u6210\u819c\u3059\u308b\u5834\u5408\u3001\u7b2c1\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u3068\u3057\u3066\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08TMA: Al(CH\u2083)\u2083\uff09\u3001\u7b2c2\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u3068\u3057\u3066\u6c34\uff08H\u2082O\uff09\u3084\u9178\u7d20\u30d7\u30e9\u30ba\u30de\u304c\u7528\u3044\u3089\u308c\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u306f\u3001\u4ee5\u4e0b\u306e\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u819c\u6750\u6599\u306e\u4f9b\u7d66\u6e90<\/strong>: \u76ee\u7684\u306e\u8584\u819c\u3092\u69cb\u6210\u3059\u308b\u539f\u5b50\uff08\u4f8b\uff1aAl\u3001Hf\u3001Ti\u306a\u3069\uff09\u3092\u57fa\u677f\u8868\u9762\u306b\u4f9b\u7d66\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u81ea\u5df1\u5236\u9650\u53cd\u5fdc\u306e\u5b9f\u73fe<\/strong>: \u30d7\u30ea\u30ab\u30fc\u30b5\u306f\u57fa\u677f\u8868\u9762\u306e\u7279\u5b9a\u306e\u53cd\u5fdc\u30b5\u30a4\u30c8\u306b\u306e\u307f\u5438\u7740\u30fb\u53cd\u5fdc\u3057\u3001\u30b5\u30a4\u30c8\u304c\u5168\u3066\u57cb\u307e\u308b\u3068\u305d\u308c\u4ee5\u4e0a\u53cd\u5fdc\u304c\u9032\u307e\u306a\u3044\u300c\u81ea\u5df1\u5236\u9650\u6027\u300d\u3092\u6301\u3064\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u7279\u6027\u304c\u3001ALD\u306b\u304a\u3051\u308b\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u819c\u539a\u5236\u5fa1\u3068\u512a\u308c\u305f\u5747\u4e00\u6027\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u63ee\u767a\u6027<\/strong>: \u771f\u7a7a\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u52b9\u7387\u7684\u306b\u6c17\u5316\u3057\u3001\u57fa\u677f\u8868\u9762\u307e\u3067\u5747\u4e00\u306b\u5230\u9054\u3059\u308b\u5341\u5206\u306a\u84b8\u6c17\u5727\u3092\u6301\u3064\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n<div class=\"related_link\"><span class=\"title\"><i class=\"fa-solid fa-bookmark\"><\/i>\u95a2\u9023\u8a18\u4e8b<\/span><ul><li><a href=\"https:\/\/agus.co.jp\/?p=8307\"><span class=\"thumbnail\"><img decoding=\"async\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/06\/image5-1.png\"><\/span><span class=\"post_title\">ALD\uff08\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff09\u3068\u306f\uff1f\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u5f79\u5272\u30fb\u88c5\u7f6e\u3082\u7d39\u4ecb<\/span><\/a><\/li><\/ul><\/div>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">ALD\u30d7\u30ea\u30ab\u30fc\u30b5\u306b\u6c42\u3081\u3089\u308c\u308b\u4e3b\u8981\u306a\u7279\u6027<\/h2>\n\n\n\n<p>ALD\u30d7\u30ed\u30bb\u30b9\u3067\u9ad8\u54c1\u8cea\u306a\u8584\u819c\u3092\u5b89\u5b9a\u3057\u3066\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u4f7f\u7528\u3059\u308b\u30d7\u30ea\u30ab\u30fc\u30b5\u304c\u7279\u5b9a\u306e\u91cd\u8981\u306a\u7279\u6027\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u7279\u6027\u304c\u3001ALD\u306e\u7cbe\u5ea6\u3001\u52b9\u7387\u3001\u305d\u3057\u3066\u5f97\u3089\u308c\u308b\u819c\u306e\u54c1\u8cea\u306b\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u5341\u5206\u306a\u84b8\u6c17\u5727\u3068\u71b1\u5b89\u5b9a\u6027<\/strong>: \u30d7\u30ea\u30ab\u30fc\u30b5\u306f\u3001\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u76ee\u7684\u306e\u6e29\u5ea6\u3067\u5b89\u5b9a\u3057\u3066\u6c17\u5316\u3057\u3001\u6c17\u76f8\u4e2d\u3067\u5206\u89e3\u3059\u308b\u3053\u3068\u306a\u304f\u57fa\u677f\u8868\u9762\u307e\u3067\u5230\u9054\u3067\u304d\u308b\u5341\u5206\u306a\u84b8\u6c17\u5727\u3068\u71b1\u5b89\u5b9a\u6027\u3092\u6301\u3064\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u84b8\u6c17\u5727\u304c\u4f4e\u3044\u3068\u4f9b\u7d66\u91cf\u304c\u4e0d\u5b89\u5b9a\u306b\u306a\u308a\u3001\u71b1\u5b89\u5b9a\u6027\u304c\u4f4e\u3044\u3068\u9014\u4e2d\u3067\u5206\u89e3\u3057\u3066\u4e0d\u7d14\u7269\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u9069\u5207\u306a\u53cd\u5fdc\u6027\uff08\u81ea\u5df1\u5236\u9650\u6027\uff09<\/strong>: \u57fa\u677f\u8868\u9762\u306e\u7279\u5b9a\u306e\u30b5\u30a4\u30c8\u306b\u9078\u629e\u7684\u306b\u5438\u7740\u3057\u3001\u81ea\u5df1\u5236\u9650\u7684\u306b\u53cd\u5fdc\u3059\u308b\u7279\u6027\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u539f\u5b501\u5c64\u305a\u3064\u6b63\u78ba\u306b\u6210\u819c\u3055\u308c\u3001\u819c\u539a\u5236\u5fa1\u3068\u5747\u4e00\u6027\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002\u904e\u5ea6\u306b\u53cd\u5fdc\u6027\u304c\u9ad8\u3059\u304e\u308b\u3068\u6c17\u76f8\u53cd\u5fdc\u304c\u8d77\u3053\u308a\u3001\u819c\u8cea\u304c\u4f4e\u4e0b\u3059\u308b\u6050\u308c\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u9ad8\u3044\u7d14\u5ea6\u3068\u4f4e\u3044\u4e0d\u7d14\u7269\u542b\u6709\u91cf<\/strong>: \u4e0d\u7d14\u7269\u304c\u6df7\u5165\u3059\u308b\u3068\u3001\u8584\u819c\u306e\u96fb\u6c17\u7684\u7279\u6027\u3084\u5149\u5b66\u7279\u6027\u3001\u6a5f\u68b0\u7684\u7279\u6027\u306b\u60aa\u5f71\u97ff\u3092\u4e0e\u3048\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3084\u6b69\u7559\u307e\u308a\u304c\u4f4e\u4e0b\u3057\u307e\u3059\u3002\u7279\u306b\u3001\u534a\u5c0e\u4f53\u7528\u9014\u3067\u306fppb\uff08\u30d1\u30fc\u30c4\u30fb\u30d1\u30fc\u30fb\u30d3\u30ea\u30aa\u30f3\uff09\u30ec\u30d9\u30eb\u306e\u8d85\u9ad8\u7d14\u5ea6\u304c\u6c42\u3081\u3089\u308c\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u526f\u751f\u6210\u7269\u306e\u9664\u53bb\u3057\u3084\u3059\u3055<\/strong>: \u30d7\u30ea\u30ab\u30fc\u30b5\u540c\u58eb\u306e\u53cd\u5fdc\u3067\u751f\u6210\u3055\u308c\u308b\u526f\u751f\u6210\u7269\u306f\u3001\u6b21\u306e\u30b5\u30a4\u30af\u30eb\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u306a\u3044\u3088\u3046\u3001\u5bb9\u6613\u306b\u6392\u6c17\u3067\u304d\u308b\u63ee\u767a\u6027\u3092\u6301\u3064\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u6b8b\u7559\u3059\u308b\u3068\u4e0d\u7d14\u7269\u3068\u3057\u3066\u819c\u306b\u53d6\u308a\u8fbc\u307e\u308c\u305f\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5747\u4e00\u6027\u3092\u640d\u306d\u305f\u308a\u3059\u308b\u539f\u56e0\u3068\u306a\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u975e\u8150\u98df\u6027\u30fb\u5b89\u5168\u6027<\/strong>: \u88c5\u7f6e\u6750\u6599\u3078\u306e\u8150\u98df\u6027\u304c\u4f4e\u304f\u3001\u4f5c\u696d\u8005\u306b\u3068\u3063\u3066\u5b89\u5168\u306b\u53d6\u308a\u6271\u3048\u308b\u7269\u8cea\u3067\u3042\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002\u6bd2\u6027\u3084\u5f15\u706b\u6027\u3001\u7206\u767a\u6027\u306a\u3069\u304c\u306a\u3044\u3001\u307e\u305f\u306f\u7ba1\u7406\u53ef\u80fd\u306a\u7bc4\u56f2\u3067\u3042\u308b\u3053\u3068\u304c\u6c42\u3081\u3089\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u7279\u6027\u3092\u517c\u306d\u5099\u3048\u305f\u30d7\u30ea\u30ab\u30fc\u30b5\u3092\u9078\u5b9a\u3057\u3001\u9069\u5207\u306b\u4f9b\u7d66\u30fb\u5236\u5fa1\u3059\u308b\u3053\u3068\u304c\u3001ALD\u30d7\u30ed\u30bb\u30b9\u6210\u529f\u306e\u9375\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">ALD\u30d7\u30ea\u30ab\u30fc\u30b5\u306e\u7a2e\u985e\u3068\u4ee3\u8868\u7684\u306a\u6210\u819c\u6750\u6599<\/h2>\n\n\n\n<p>ALD\u3067\u306f\u3001\u76ee\u7684\u3068\u3059\u308b\u8584\u819c\u306e\u7a2e\u985e\u306b\u5fdc\u3058\u3066\u3001\u591a\u5c90\u306b\u308f\u305f\u308b\u30d7\u30ea\u30ab\u30fc\u30b5\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u4e3b\u306b\u4ee5\u4e0b\u306e\u5316\u5b66\u69cb\u9020\u3092\u6301\u3064\u5316\u5408\u7269\u304c\u7528\u3044\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u91d1\u5c5e\u6709\u6a5f\u5316\u5408\u7269\uff08MOC\uff09<\/strong>: \u91d1\u5c5e\u539f\u5b50\u3068\u6709\u6a5f\u914d\u4f4d\u5b50\uff08\u4f8b\uff1a\u30a2\u30eb\u30ad\u30eb\u57fa\u3001\u30a2\u30df\u30ce\u57fa\u306a\u3069\uff09\u304c\u7d50\u5408\u3057\u305f\u5316\u5408\u7269\u3002TMA\uff08\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff09\u306fAl\u2082O\u2083\u6210\u819c\u306b\u5e83\u304f\u4f7f\u308f\u308c\u307e\u3059\u3002\u63ee\u767a\u6027\u304c\u9ad8\u304f\u3001\u6bd4\u8f03\u7684\u4f4e\u6e29\u3067\u5229\u7528\u3057\u3084\u3059\u3044\u53cd\u9762\u3001\u70ad\u7d20\u4e0d\u7d14\u7269\u306e\u6df7\u5165\u30ea\u30b9\u30af\u304c\u3042\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u91d1\u5c5e\u30cf\u30ed\u30b2\u30f3\u5316\u7269<\/strong>: \u91d1\u5c5e\u539f\u5b50\u3068\u30cf\u30ed\u30b2\u30f3\u539f\u5b50\uff08Cl\u3001F\u3001Br\u3001I\u306a\u3069\uff09\u304c\u7d50\u5408\u3057\u305f\u5316\u5408\u7269\u3002HfCl\u2084\uff08\u56db\u5869\u5316\u30cf\u30d5\u30cb\u30a6\u30e0\uff09\u306fHfO\u2082\u6210\u819c\u306b\u7528\u3044\u3089\u308c\u307e\u3059\u3002\u9ad8\u3044\u84b8\u6c17\u5727\u3092\u6301\u3061\u3001\u91d1\u5c5e\u7d14\u5ea6\u304c\u9ad8\u3044\u819c\u304c\u5f97\u3089\u308c\u3084\u3059\u3044\u3067\u3059\u304c\u3001\u8150\u98df\u6027\u306e\u526f\u751f\u6210\u7269\u304c\u767a\u751f\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u03b2-\u30b8\u30b1\u30c8\u30f3\u932f\u4f53<\/strong>: \u03b2-\u30b8\u30b1\u30c8\u30f3\u3068\u547c\u3070\u308c\u308b\u6709\u6a5f\u914d\u4f4d\u5b50\u304c\u91d1\u5c5e\u539f\u5b50\u306b\u914d\u4f4d\u3057\u305f\u932f\u4f53\u3002\u63ee\u767a\u6027\u3068\u71b1\u5b89\u5b9a\u6027\u3092\u4e21\u7acb\u3057\u3084\u3059\u3044\u7279\u5fb4\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u30b7\u30e9\u30f3\u7cfb\u5316\u5408\u7269<\/strong>: \u30b1\u30a4\u7d20\u3092\u542b\u3080\u5316\u5408\u7269\u3002SiH\u2084\uff08\u30b7\u30e9\u30f3\uff09\u3084TEOS\uff08\u30c6\u30c8\u30e9\u30a8\u30c1\u30eb\u30aa\u30eb\u30bd\u30b1\u30a4\u9178\uff09\u306a\u3069\u304cSiO\u2082\u6210\u819c\u306b\u7528\u3044\u3089\u308c\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u30a2\u30df\u30f3\u7cfb\u5316\u5408\u7269<\/strong>: \u7a92\u7d20\u3092\u542b\u3080\u5316\u5408\u7269\u3002GaN\u6210\u819c\u306a\u3069\u306b\u7528\u3044\u3089\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u3092\u9069\u5207\u306b\u9078\u629e\u3057\u3001\u6c34\uff08H\u2082O\uff09\u3001\u30aa\u30be\u30f3\uff08O\u2083\uff09\u3001\u9178\u7d20\u30d7\u30e9\u30ba\u30de\u3001\u30a2\u30f3\u30e2\u30cb\u30a2\uff08NH\u2083\uff09\u306a\u3069\u306e\u53cd\u5fdc\u30ac\u30b9\u3068\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u591a\u7a2e\u591a\u69d8\u306a\u8584\u819c\u306e\u6210\u819c\u304c\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u9178\u5316\u7269<\/strong>: Al\u2082O\u2083, HfO\u2082, SiO\u2082, TiO\u2082, ZnO\u306a\u3069\u3002\u9ad8\u8a98\u96fb\u7387\u819c\u3001\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u819c\u3001\u900f\u660e\u5c0e\u96fb\u819c\u306a\u3069\u306b\u5229\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u7a92\u5316\u7269<\/strong>: TiN, TaN, Si\u2083N\u2084, AlN\u306a\u3069\u3002\u62e1\u6563\u30d0\u30ea\u30a2\u819c\u3001\u7d76\u7e01\u819c\u306a\u3069\u306b\u5229\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u91d1\u5c5e<\/strong>: Pt, Ru, W\u306a\u3069\u3002\u96fb\u6975\u6750\u6599\u3084\u30d0\u30ea\u30a2\u819c\u306b\u5229\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u30d7\u30ea\u30ab\u30fc\u30b5\u306e\u9078\u5b9a\u306f\u3001\u5f97\u3089\u308c\u308b\u819c\u306e\u54c1\u8cea\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3001\u305d\u3057\u3066\u88c5\u7f6e\u306e\u9069\u5408\u6027\u3092\u5927\u304d\u304f\u5de6\u53f3\u3059\u308b\u305f\u3081\u3001ALD\u6280\u8853\u306e\u5c02\u9580\u77e5\u8b58\u3068\u8c4a\u5bcc\u306a\u7d4c\u9a13\u304c\u6c42\u3081\u3089\u308c\u308b\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002<\/p>\n\n\n\n<p><\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u3067\u306e\u6210\u819c\u5b9f\u7e3e\u306f\u300cAl\u2082O\u2083, HfO\u2082, SiO\u2082, TiO\u2082\u300d\u306e4\u7a2e\u3067\u3001\u5bfe\u5fdc\u819c\u7a2e\u3092\u5897\u3084\u3059\u3079\u304f\u6280\u8853\u958b\u767a\u3092\u9032\u3081\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u83c5\u88fd\u4f5c\u6240\u304c\u63d0\u4f9b\u3059\u308bALD\u88c5\u7f6e\u3068\u30d7\u30ea\u30ab\u30fc\u30b5\u5bfe\u5fdc<\/h2>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u306eALD\u88c5\u7f6e\u306f\u3001\u69d8\u3005\u306a\u30d7\u30ea\u30ab\u30fc\u30b5\u306b\u5bfe\u5fdc\u3057\u3001\u304a\u5ba2\u69d8\u306e\u7814\u7a76\u958b\u767a\u30cb\u30fc\u30ba\u306b\u5fdc\u3058\u305f\u9ad8\u7cbe\u5ea6\u306a\u8584\u819c\u5f62\u6210\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u7279\u306b\u3001\u5f53\u793e\u306eALD\u88c5\u7f6e\u306f\u4ee5\u4e0b\u306e\u70b9\u306b\u6ce8\u529b\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u591a\u69d8\u306a\u30d7\u30ea\u30ab\u30fc\u30b5\u7cfb\u7d71\u3078\u306e\u5bfe\u5fdc<\/strong>: \u57fa\u672c\u7684\u306a2\u7cfb\u7d71\u306e\u30d7\u30ea\u30ab\u30fc\u30b5\u30dc\u30c8\u30eb\u304b\u3089\u3001\u6700\u59276\u500b\u307e\u3067\u642d\u8f09\u53ef\u80fd\u306a\u30e2\u30c7\u30eb\uff08SAL3000\uff09\u306a\u3069\u3001\u8907\u6570\u306e\u819c\u7a2e\u3084\u8907\u5408\u819c\u306e\u6210\u819c\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u3088\u3046\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u7814\u7a76\u958b\u767a\u306b\u7279\u5316\u3057\u305f\u8a2d\u8a08<\/strong>: SAL1000\u30b7\u30ea\u30fc\u30ba\u306e\u30a8\u30f3\u30c8\u30ea\u30fc\u30e2\u30c7\u30eb\u306f\u3001\u4f7f\u3044\u3084\u3059\u3055\u3092\u91cd\u8996\u3057\u305f\u5c0f\u578b\u8a2d\u8a08\u3067\u3042\u308a\u306a\u304c\u3089\u3001\u9ad8\u54c1\u8cea\u306a\u6210\u819c\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002\u7c89\u4f53\u6210\u819c\u306b\u7279\u5316\u3057\u305fSAL1000B\u3084\u3001\u30b0\u30ed\u30fc\u30d6\u30dc\u30c3\u30af\u30b9\u3092\u642d\u8f09\u3057\u5acc\u6c17\u6027\u6750\u6599\u306b\u5bfe\u5fdc\u3059\u308bSAL1000G\u306a\u3069\u3001\u7279\u5b9a\u7528\u9014\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u30e2\u30c7\u30eb\u3082\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u30d7\u30ea\u30ab\u30fc\u30b5\u4f9b\u7d66\u306e\u5b89\u5b9a\u6027<\/strong>: \u7cbe\u5bc6\u306a\u6e29\u5ea6\u5236\u5fa1\u3068\u30ac\u30b9\u6d41\u91cf\u5236\u5fa1\u306b\u3088\u308a\u3001\u30d7\u30ea\u30ab\u30fc\u30b5\u306e\u5b89\u5b9a\u3057\u305f\u4f9b\u7d66\u3092\u5b9f\u73fe\u3057\u3001\u539f\u5b50\u5c64\u3054\u3068\u306e\u7cbe\u5bc6\u306a\u819c\u539a\u5236\u5fa1\u3068\u512a\u308c\u305f\u9762\u5185\u5747\u4e00\u6027\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\u3002<\/li>\n\n\n\n<li><strong>\u5c06\u6765\u7684\u306a\u62e1\u5f35\u6027<\/strong>: SAL3000Plus\u306e\u3088\u3046\u306b\u3001\u4ed6\u306e\u6210\u819c\u88c5\u7f6e\uff08\u30b9\u30d1\u30c3\u30bf\u3001\u84b8\u7740\u3001\u30a2\u30cb\u30fc\u30eb\u306a\u3069\uff09\u3068\u306e\u8907\u5408\u5316\u304c\u53ef\u80fd\u306a\u30e2\u30c7\u30eb\u3082\u63d0\u4f9b\u3057\u3066\u304a\u308a\u3001\u5e45\u5e83\u3044\u7814\u7a76\u30cb\u30fc\u30ba\u306b\u5bfe\u5fdc\u3067\u304d\u308b\u67d4\u8edf\u6027\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u25bc\u8a73\u7d30\u306b\u3064\u3044\u3066\u306f\u3001\u3053\u3061\u3089\u306e\u8a18\u4e8b\u3067\u8a73\u3057\u304f\u3054\u7d39\u4ecb\u3057\u3066\u304a\u308a\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n<div class=\"related_link\"><span class=\"title\"><i class=\"fa-solid fa-bookmark\"><\/i>\u95a2\u9023\u8a18\u4e8b<\/span><ul><li><a href=\"https:\/\/agus.co.jp\/?p=7476\"><span class=\"thumbnail\"><img decoding=\"async\" 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