{"id":8739,"date":"2025-10-15T10:48:54","date_gmt":"2025-10-15T01:48:54","guid":{"rendered":"https:\/\/agus.co.jp\/?p=8739"},"modified":"2026-03-11T18:22:14","modified_gmt":"2026-03-11T09:22:14","slug":"ald%e3%81%a7%e8%a1%a8%e9%9d%a2%e3%81%ae%e8%a6%aa%e6%b0%b4%e6%80%a7%e3%83%bb%e7%96%8e%e6%b0%b4%e6%80%a7%e3%82%92%e3%82%b3%e3%83%b3%e3%83%88%e3%83%ad%e3%83%bc%e3%83%ab%e3%81%99%e3%82%8b%e6%96%b9","status":"publish","type":"post","link":"https:\/\/agus.co.jp\/?p=8739","title":{"rendered":"ALD\u3067\u8868\u9762\u306e\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3059\u308b\u65b9\u6cd5\u3068\u5fdc\u7528\u4f8b\u3092\u89e3\u8aac"},"content":{"rendered":"\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"512\" height=\"384\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/10\/image-3.png\" alt=\"ALD\u3067\u8868\u9762\u306e\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3059\u308b\u65b9\u6cd5\u3068\u5fdc\u7528\u4f8b\u3092\u89e3\u8aac\" class=\"wp-image-8740\" style=\"width:840px;height:auto\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/10\/image-3.png 512w, https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/10\/image-3-300x225.png 300w\" sizes=\"auto, (max-width: 512px) 100vw, 512px\" \/><\/figure>\n\n\n\n<p>\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff08ALD\uff09\u306f\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u8584\u819c\u3092\u5f62\u6210\u3057\u3001\u819c\u539a\u3060\u3051\u3067\u306a\u304f\u8868\u9762\u306e\u5316\u5b66\u7279\u6027\u307e\u3067\u3082\u7cbe\u5bc6\u306b\u5236\u5fa1\u3067\u304d\u308b\u9769\u65b0\u7684\u306a\u6280\u8853\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u7279\u306b\u3001\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3068\u3044\u3063\u305f\u300c\u6fe1\u308c\u6027\u300d\u306e\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306f\u3001\u534a\u5c0e\u4f53\u3001\u533b\u7642\u3001\u5149\u5b66\u5206\u91ce\u306a\u3069\u3067\u6027\u80fd\u3084\u6a5f\u80fd\u3092\u5de6\u53f3\u3059\u308b\u91cd\u8981\u306a\u8981\u7d20\u3067\u3059\u3002\u672c\u8a18\u4e8b\u3067\u306f\u3001ALD\u306b\u3088\u308b\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u306e\u5236\u5fa1\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u6750\u6599\u5225\u306e\u7279\u6027\u3001\u305d\u3057\u3066\u5fdc\u7528\u4f8b\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u89e3\u8aac\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div class=\"kakomi kakomi_with_title\">\n<span class=\"title\"><i class=\"fas fa-check-circle\"><\/i>\u9ad8\u7cbe\u5ea6\u306a\u8584\u819c\u6210\u819c\u3092\u5b9f\u73fe\u3059\u308bALD\u88c5\u7f6e\u30fb\u30b9\u30d1\u30c3\u30bf\u88c5\u7f6e\u306a\u3089\u3001\u83c5\u88fd\u4f5c\u6240\u306b\u304a\u4efb\u305b\u304f\u3060\u3055\u3044<\/span>\n<p>\u9577\u5e74\u306e\u7d4c\u9a13\u3068\u72ec\u81ea\u306e\u6280\u8853\u3067\u3001\u5927\u5b66\u3084\u7814\u7a76\u6a5f\u95a2\u3067\u306e\u5c0e\u5165\u5b9f\u7e3e\u3082\u591a\u6570\u3002<\/p>\n<p>\u7814\u7a76\u76ee\u7684\u306b\u5fdc\u3058\u305f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3084\u3001\u5c0e\u5165\u524d\u306e\u30c6\u30b9\u30c8\u6210\u819c\u3082\u53ef\u80fd\u3067\u3059\u3002<\/p>\n<p>\u88c5\u7f6e\u306e\u3054\u691c\u8a0e\u3084\u305d\u306e\u4ed6\u3054\u76f8\u8ac7\u306f\u3001\u305c\u3072\u5f53\u793e\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002<\/p>\n<a href=\"https:\/\/agus.co.jp\/?page_id=95\" class=\"cvbtn cvbtn_2\">\u304a\u554f\u5408\u305b\u306f\u3053\u3061\u3089<\/a><\/div>\n\n\n<div class=\"related_link\"><span class=\"title\"><i class=\"fa-solid fa-bookmark\"><\/i>\u95a2\u9023\u8a18\u4e8b<\/span><ul><li><a href=\"https:\/\/agus.co.jp\/?p=7476\"><span class=\"thumbnail\"><img decoding=\"async\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2024\/09\/e9264b5c146fb09391b67e7b15e50200.png\"><\/span><span class=\"post_title\">ALD\u88c5\u7f6e\u3068\u306f\uff1f\u539f\u7406\u3084\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u30fb\u88c5\u7f6e\u306e\u9078\u3073\u65b9\u307e\u3067\u89e3\u8aac<\/span><\/a><\/li><\/ul><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3068\u306f\uff1fALD\u304c\u3082\u305f\u3089\u3059\u8868\u9762\u7279\u6027\u306e\u7cbe\u5bc6\u5236\u5fa1<\/h2>\n\n\n\n<p>\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff08ALD\uff09\u306f\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u8584\u819c\u3092\u7a4d\u5c64\u3059\u308b\u6210\u819c\u6280\u8853\u3067\u3042\u308a\u3001\u539a\u3055\u3060\u3051\u3067\u306a\u304f<strong>\u8868\u9762\u306e\u5316\u5b66\u7684\u6027\u8cea<\/strong>\u307e\u3067\u7cbe\u5bc6\u306b\u5236\u5fa1\u3067\u304d\u308b\u3053\u3068\u304c\u7279\u5fb4\u3067\u3059\u3002\u305d\u306e\u4e2d\u3067\u3082\u3001\u300c\u89aa\u6c34\u6027\u300d\u3068\u300c\u758e\u6c34\u6027\u300d\u306e\u5236\u5fa1\u306f\u3001\u6750\u6599\u306e\u6fe1\u308c\u6027\uff08\u6db2\u4f53\u304c\u56fa\u4f53\u8868\u9762\u306b\u5e83\u304c\u308b\u304b\u3001\u3042\u308b\u3044\u306f\u5f3e\u304b\u308c\u308b\u304b\u3092\u793a\u3059\u6027\u8cea\uff09\u3084\u8868\u9762\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u5909\u5316\u3055\u305b\u3001\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u3084\u6a5f\u80fd\u6027\u3092\u5927\u304d\u304f\u5de6\u53f3\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2460\u89aa\u6c34\u6027\uff1d\u6c34\u306b\u300c\u306a\u3058\u3080\u300d\u8868\u9762<\/h3>\n\n\n\n<p>\u89aa\u6c34\u6027\u3068\u306f\u3001\u6c34\u5206\u5b50\u3068\u9ad8\u3044\u89aa\u548c\u6027\u3092\u3082\u3064\u8868\u9762\u7279\u6027\u3092\u6307\u3057\u307e\u3059\u3002\u8868\u9762\u306b\u6975\u6027\u57fa\uff08\u2013OH\u3001\u2013COOH\u3001\u2013NH\u2082\u306a\u3069\uff09\u304c\u591a\u304f\u5b58\u5728\u3059\u308b\u5834\u5408\u3001\u6c34\u5206\u5b50\u3068\u6c34\u7d20\u7d50\u5408\u3084\u30a4\u30aa\u30f3\u7d50\u5408\u3092\u5f62\u6210\u3057\u3084\u3059\u304f\u3001\u6fe1\u308c\u5e83\u304c\u308a\u3084\u3059\u3044\u6027\u8cea\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u4f8b\u3048\u3070\u3001\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08Al\u2082O\u2083\uff09\u3084\u9178\u5316\u30b1\u30a4\u7d20\uff08SiO\u2082\uff09\u306e\u8868\u9762\u306f\u3001\u2013OH\u57fa\uff08\u30b7\u30e9\u30ce\u30fc\u30eb\u57fa\uff09\u3067\u7d42\u7aef\u3055\u308c\u3066\u304a\u308a\u3001\u81ea\u7136\u306b\u89aa\u6c34\u6027\u3092\u793a\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2461\u758e\u6c34\u6027\uff1d\u6c34\u3092\u300c\u306f\u3058\u304f\u300d\u8868\u9762<\/h3>\n\n\n\n<p>\u4e00\u65b9\u3001\u758e\u6c34\u6027\u3068\u306f\u6c34\u3068\u306e\u89aa\u548c\u6027\u304c\u4f4e\u304f\u3001\u6c34\u3092\u306f\u3058\u304f\u6027\u8cea\u3092\u6307\u3057\u307e\u3059\u3002\u8868\u9762\u304c\u975e\u6975\u6027\u57fa\uff08\u2013CH\u2083\u3001\u2013CF\u2083\u306a\u3069\uff09\u3067\u8986\u308f\u308c\u3066\u3044\u308b\u5834\u5408\u3001\u6c34\u5206\u5b50\u306f\u7d50\u5408\u3057\u306b\u304f\u304f\u3001\u9ad8\u3044\u63a5\u89e6\u89d2\u3092\u793a\u3057\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u758e\u6c34\u6027\u819c\u306f\u3001\u6709\u6a5f\u30d5\u30c3\u7d20\u7cfb\u306eALD\u819c\u3084\u3001HMDS\u51e6\u7406\u306b\u3088\u308b\u30e1\u30c1\u30eb\u57fa\u88ab\u8986\u8868\u9762\u306a\u3069\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2462\u63a5\u89e6\u89d2\uff08\u30b3\u30f3\u30bf\u30af\u30c8\u30a2\u30f3\u30b0\u30eb\uff09\u306b\u3064\u3044\u3066<\/h3>\n\n\n\n<p>\u8868\u9762\u306e\u6fe1\u308c\u6027\u306f\u3001\u300c\u63a5\u89e6\u89d2\uff08Contact Angle\uff09\u300d\u3067\u5b9a\u91cf\u7684\u306b\u8a55\u4fa1\u3055\u308c\u307e\u3059\u3002\u6c34\u6ef4\u3092\u56fa\u4f53\u8868\u9762\u306b\u843d\u3068\u3057\u305f\u3068\u304d\u306e\u89d2\u5ea6\u304c<strong>25\u00b0\u4ee5\u4e0b<\/strong>\u306a\u3089\u89aa\u6c34\u6027\u3001<strong>90\u00b0\u4ee5\u4e0a<\/strong>\u306a\u3089\u758e\u6c34\u6027\u3001<strong>150\u00b0\u4ee5\u4e0a<\/strong>\u306a\u3089\u8d85\u758e\u6c34\u6027\u3068\u5206\u985e\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>ALD\u3067\u306f\u3001\u539f\u5b50\u5c64\u30ec\u30d9\u30eb\u3067\u8868\u9762\u5b98\u80fd\u57fa\u3092\u8abf\u6574\u3067\u304d\u308b\u305f\u3081\u3001\u3053\u306e\u63a5\u89e6\u89d2\u3092<strong>\u72d9\u3044\u901a\u308a\u306b\u5236\u5fa1\u3067\u304d\u308b<\/strong>\u306e\u304c\u5927\u304d\u306a\u7279\u5fb4\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">ALD\u306b\u3088\u308b\u8868\u9762\u7279\u6027\u5236\u5fa1\u306e\u30e1\u30ab\u30cb\u30ba\u30e0<\/h2>\n\n\n\n<p>ALD\uff08Atomic Layer Deposition\uff09\u306f\u3001\u524d\u99c6\u4f53\u30ac\u30b9\u3092\u4ea4\u4e92\u306b\u4f9b\u7d66\u3057\u3001\u5316\u5b66\u53cd\u5fdc\u306b\u3088\u3063\u30661\u539f\u5b50\u5c64\u305a\u3064\u5806\u7a4d\u3059\u308b\u6280\u8853\u3067\u3059\u3002\u5404\u53cd\u5fdc\u30b9\u30c6\u30c3\u30d7\u304c\u81ea\u5df1\u7d42\u7aef\u7684\uff08self-limiting\uff09\u306b\u9032\u3080\u305f\u3081\u3001\u819c\u539a\u306f\u3082\u3061\u308d\u3093\u3001<strong>\u8868\u9762\u7d42\u7aef\u57fa\u306e\u7a2e\u985e\u3084\u5bc6\u5ea6<\/strong>\u307e\u3067\u7cbe\u5bc6\u306b\u5236\u5fa1\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<p>\u83c5\u88fd\u4f5c\u6240\u306eALD\u6280\u8853\u3067\u306f\u3001\u91d1\u5c5e\u9178\u5316\u7269\u30fb\u7a92\u5316\u7269\u30fb\u6709\u6a5f\u8907\u5408\u819c\u306a\u3069\u3001\u5e45\u5e83\u3044\u6750\u6599\u3092\u5bfe\u8c61\u306b<strong>\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5236\u5fa1<\/strong>\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u307e\u305f\u3001\u30d7\u30e9\u30ba\u30de\u5f37\u5316ALD\uff08PEALD\uff09\u3092\u7528\u3044\u308b\u3053\u3068\u3067\u3001\u8868\u9762\u306e\u5b98\u80fd\u57fa\u3092\u9078\u629e\u7684\u306b\u5f62\u6210\u3057\u3001\u819c\u306e\u6fe1\u308c\u6027\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u3082\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<p>ALD\u306e\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3067\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3092\u5909\u5316\u3055\u305b\u308b\u8981\u56e0\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306b\u6574\u7406\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u6210\u819c\u6750\u6599\u306e\u7a2e\u985e<\/strong>\uff1a\u9178\u5316\u7269\u7cfb\u306f\u89aa\u6c34\u6027\u3001\u6709\u6a5f\u30d5\u30c3\u7d20\u7cfb\u306f\u758e\u6c34\u6027\u3092\u793a\u3059\u50be\u5411\u3002<br><\/li>\n\n\n\n<li><strong>\u8868\u9762\u7d42\u7aef\u57fa<\/strong>\uff1a\u2013OH\u3067\u7d42\u7aef\u3059\u308c\u3070\u89aa\u6c34\u6027\u3001\u2013CH\u2083\u3084\u2013CF\u2083\u3067\u7d42\u7aef\u3059\u308c\u3070\u758e\u6c34\u6027\u3002<br><\/li>\n\n\n\n<li><strong>\u30d7\u30e9\u30ba\u30de\u30fb\u71b1\u51e6\u7406\u6761\u4ef6<\/strong>\uff1a\u9178\u5316\u96f0\u56f2\u6c17\u4e0b\u3067\u306f\u89aa\u6c34\u5316\u3001\u9084\u5143\u96f0\u56f2\u6c17\u4e0b\u3067\u306f\u758e\u6c34\u5316\u304c\u9032\u884c\u3002<br><\/li>\n<\/ul>\n\n\n\n<p>\u3064\u307e\u308a\u3001ALD\u3067\u306f\u6210\u819c\u5f8c\u306e\u8868\u9762\u53cd\u5fdc\u3084\u30ac\u30b9\u9078\u629e\u3092\u901a\u3058\u3066\u3001<strong>\u539f\u5b50\u5c64\u5358\u4f4d\u3067\u6fe1\u308c\u6027\u3092\u30c7\u30b6\u30a4\u30f3\u3067\u304d\u308b<\/strong>\u306e\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u3010\u6750\u6599\u5225\u3011\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u306e\u5177\u4f53\u4f8b<\/h2>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2460Al\u2082O\u2083\uff08\u9178\u5316\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff09\uff1a\u89aa\u6c34\u6027<\/h3>\n\n\n\n<p>Al\u2082O\u2083\u306fALD\u3067\u6700\u3082\u5e83\u304f\u7528\u3044\u3089\u308c\u308b\u9178\u5316\u7269\u6750\u6599\u3067\u3001\u5f62\u6210\u5f8c\u306f\u2013OH\u57fa\u3067\u8868\u9762\u304c\u8986\u308f\u308c\u308b\u305f\u3081\u9ad8\u3044\u89aa\u6c34\u6027\u3092\u793a\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u7279\u6027\u306f\u3001<strong>\u91d1\u5c5e\u914d\u7dda\u4fdd\u8b77\u819c\u3084\u30d0\u30ea\u30a2\u5c64<\/strong>\u306a\u3069\u3001\u6fe1\u308c\u6027\u304c\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u306b\u6709\u7528\u3067\u3059\u3002\u3055\u3089\u306b\u3001\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u3084\u6709\u6a5f\u4fee\u98fe\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u89aa\u6c34\u6027\u304b\u3089\u758e\u6c34\u6027\u3078\u306e\u8ee2\u63db\u3082\u5bb9\u6613\u3067\u3059\u3002<\/p>\n\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"520\" height=\"269\" src=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/10\/m_dfaf014f2-1.jpeg\" alt=\"\" class=\"wp-image-8785\" srcset=\"https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/10\/m_dfaf014f2-1.jpeg 520w, https:\/\/agus.co.jp\/wp-content\/uploads\/2025\/10\/m_dfaf014f2-1-300x155.jpeg 300w\" sizes=\"auto, (max-width: 520px) 100vw, 520px\" \/><\/figure>\n\n\n\n<p><a href=\"https:\/\/academic.oup.com\/jmicro\/article\/74\/5\/367\/8045956?login=false\">\u5f15\u7528<\/a><\/p>\n\n\n\n<p><strong>CA measurements<\/strong><\/p>\n\n\n\n<p>To gain insights into the hydrophilicity of the ALD-coated Si tip, we measured CAs of a water droplet deposited on a Si wafer with and without ALD Al<sub>2<\/sub>O<sub>3<\/sub>&nbsp;coating, as shown in&nbsp;<a href=\"javascript:;\">Fig.&nbsp;2a\u2013d<\/a>. Without coating (<a href=\"javascript:;\">Fig.&nbsp;2a<\/a>), the CA was relatively high (70.4\u00b0), suggesting the tip hydrophobicity due to organic contamination. Even after 10 or 20 cycles, the CA remains almost the same: 71.6\u00b0 and 67.6\u00b0, respectively. As discussed earlier, the surface of the 20-cycle ALD-coated tip can be carbon, SiO<sub>2<\/sub>&nbsp;or Al<sub>2<\/sub>O<sub>3<\/sub>, depending on the initial thickness of the carbon contamination layer. The observed high CA for this experiment suggests that the surface was still terminated with carbon even after 20 cycles. After 50 cycles, the CA dramatically decreased to show 15.8\u00b0, suggesting the coverage of the tip apex by hydrophilic Al<sub>2<\/sub>O<sub>3<\/sub>&nbsp;film. This result is consistent with our TEM observations shown in&nbsp;<a href=\"javascript:;\">Fig.&nbsp;1<\/a>.<\/p>\n<\/blockquote>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>\u2461TiO\u2082\uff08\u9178\u5316\u30c1\u30bf\u30f3\uff09\uff1a\u8d85\u89aa\u6c34\u6027<\/strong><\/h3>\n\n\n\n<p>TiO\u2082\u306f\u5149\u89e6\u5a92\u4f5c\u7528\u306b\u3088\u308a\u3001\u7d2b\u5916\u5149\u7167\u5c04\u4e0b\u3067\u8868\u9762\u306e\u6709\u6a5f\u6c5a\u67d3\u3092\u5206\u89e3\u3057\u3001<strong>\u8d85\u89aa\u6c34\u6027<\/strong>\u3092\u793a\u3059\u3053\u3068\u304c\u77e5\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>ALD\u3067\u5f62\u6210\u3057\u305fTiO\u2082\u819c\u306f\u9ad8\u5bc6\u5ea6\u3067\u6b20\u9665\u304c\u5c11\u306a\u304f\u3001\u533b\u7642\u30c7\u30d0\u30a4\u30b9\u3084\u5149\u5b66\u30ac\u30e9\u30b9\u4e0a\u306b\u5229\u7528\u3059\u308b\u3068<strong>\u9632\u66c7\u30fb\u9632\u6c5a\u6a5f\u80fd<\/strong>\u3092\u767a\u63ee\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2462\u6709\u6a5f\u7cfbALD\uff08\u30d5\u30c3\u7d20\u7cfb\u306a\u3069\uff09\uff1a\u758e\u6c34\u6027<\/h3>\n\n\n\n<p>\u6709\u6a5f\u30d5\u30c3\u7d20\u7cfb\u306eALD\u819c\uff08\u4f8b\uff1aAlF\u2083\u3001ZnF\u2082\u3001\u6709\u6a5f\u30b7\u30e9\u30f3\u306a\u3069\uff09\u306f\u3001\u8868\u9762\u304c\u2013CF\u2083\u57fa\u3067\u8986\u308f\u308c\u308b\u305f\u3081\u6975\u3081\u3066\u758e\u6c34\u6027\u304c\u9ad8\u304f\u3001\u63a5\u89e6\u89d2100\u00b0\u3092\u8d85\u3048\u308b\u3053\u3068\u3082\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u3053\u306e\u6027\u8cea\u306f\u3001<strong>\u9632\u6c34\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30fb\u4f4e\u6469\u64e6\u819c\u30fb\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c1\u30c3\u30d7<\/strong>\u306a\u3069\u3001\u6c34\u3092\u5f3e\u304f\u7279\u6027\u304c\u6c42\u3081\u3089\u308c\u308b\u5206\u91ce\u3067\u5229\u7528\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3059\u308bALD\u306e\u5fdc\u7528\u4f8b<\/h2>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2460\u533b\u7642\u30c7\u30d0\u30a4\u30b9\uff1a\u8840\u6db2\u3084\u7d30\u80de\u3068\u306e\u306a\u3058\u307f\u3092\u8abf\u6574<\/h3>\n\n\n\n<p>\u533b\u7642\u6a5f\u5668\u3084\u30d0\u30a4\u30aa\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u3001\u8840\u6db2\u30fb\u7d30\u80de\u3068\u306e\u63a5\u89e6\u6642\u306e\u6fe1\u308c\u6027\u304c\u6a5f\u80fd\u6027\u3092\u5de6\u53f3\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<p>ALD\u306b\u3088\u3063\u3066\u8868\u9762\u3092\u89aa\u6c34\u5316\u3059\u308b\u3053\u3068\u3067<strong>\u7d30\u80de\u63a5\u7740\u6027\u3092\u9ad8\u3081\u308b<\/strong>\u3053\u3068\u304c\u3067\u304d\u3001\u9006\u306b\u758e\u6c34\u5316\u3059\u308b\u3053\u3068\u3067<strong>\u30bf\u30f3\u30d1\u30af\u8cea\u306e\u975e\u7279\u7570\u5438\u7740\u3092\u6291\u5236<\/strong>\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u533b\u7642\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u3084\u30d0\u30a4\u30aa\u30c1\u30c3\u30d7\u306e\u8868\u9762\u8a2d\u8a08\u304c\u6700\u9069\u5316\u53ef\u80fd\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2461\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c7\u30d0\u30a4\u30b9\uff1a\u89aa\u6c34\u3068\u758e\u6c34\u30d1\u30bf\u30fc\u30f3\u3067\u6d41\u8def\u3092\u5236\u5fa1<\/h3>\n\n\n\n<p>\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u3001\u6db2\u4f53\u306e\u6d41\u308c\u3092\u5236\u5fa1\u3059\u308b\u305f\u3081\u306b<strong>\u89aa\u6c34\uff0f\u758e\u6c34\u30d1\u30bf\u30fc\u30f3<\/strong>\u3092\u8a2d\u3051\u307e\u3059\u3002<\/p>\n\n\n\n<p>ALD\u306f\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u30b9\u30b1\u30fc\u30eb\u3067\u9078\u629e\u7684\u306a\u8868\u9762\u6539\u8cea\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u6d41\u8def\u5185\u90e8\u306e\u6fe1\u308c\u7279\u6027\u3092\u7cbe\u5bc6\u306b\u8a2d\u8a08\u53ef\u80fd\u3067\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u6db2\u6ef4\u306e\u8f38\u9001\u30fb\u5206\u96e2\u30fb\u53cd\u5fdc\u5236\u5fa1\u3092\u9ad8\u7cbe\u5ea6\u3067\u5b9f\u73fe\u3057\u307e\u3059\u3002<\/p>\n\n\n\n<div style=\"height:16px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\">\u2462\u5149\u5b66\u90e8\u6750\u30fb\u9632\u6c5a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u306e\u5fdc\u7528<\/h3>\n\n\n\n<p>\u5149\u5b66\u30ec\u30f3\u30ba\u3084\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u30ac\u30e9\u30b9\u3067\u306f\u3001\u6c34\u6ef4\u3084\u6cb9\u819c\u306e\u4ed8\u7740\u3092\u9632\u3050<strong>\u9632\u6c5a\u30fb\u9632\u66c7\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong>\u304c\u6c42\u3081\u3089\u308c\u307e\u3059\u3002<\/p>\n\n\n\n<p>TiO\u2082\u306e\u8d85\u89aa\u6c34\u819c\u3084\u3001\u6709\u6a5f\u30d5\u30c3\u7d20\u7cfbALD\u819c\u306b\u3088\u308b\u8d85\u758e\u6c34\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u900f\u660e\u6027\u3092\u4fdd\u3061\u306a\u304c\u3089\u9ad8\u3044\u6a5f\u80fd\u6027\u3092\u4ed8\u4e0e\u3057\u307e\u3059\u3002ALD\u306e\u5747\u4e00\u306a\u819c\u8cea\u306b\u3088\u308a\u3001\u30ca\u30ce\u30ec\u30d9\u30eb\u3067\u5236\u5fa1\u3055\u308c\u305f\u5149\u5b66\u6027\u80fd\u3092\u5b9f\u73fe\u3067\u304d\u308b\u70b9\u3082\u5927\u304d\u306a\u5229\u70b9\u3067\u3059\u3002<\/p>\n\n\n\n<div style=\"height:24px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p><strong>\u25bcALD\u306b\u3088\u308b\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306b\u3064\u3044\u3066\u306f\u4ee5\u4e0b\u306e\u52d5\u753b\u3067\u3082\u8a73\u3057\u304f\u89e3\u8aac\u3057\u3066\u3044\u307e\u3059\u306e\u3067\u3001\u305c\u3072\u3054\u89a7\u304f\u3060\u3055\u3044\u3002<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"\u6c34\u306b\u306a\u3058\u3080\uff1f\u5f3e\u304f\uff1fALD\u306b\u3088\u308b\u89aa\u6c34\u6027\u30fb\u758e\u6c34\u6027\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3068\u306f\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/BT8kuxURP80?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n\n\n\n<h2 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