SPS2000
This model is the best for R&D in University/Research institute.
The process can be very quick and it requires only a small amount of powder so you can try many different things in a short time at low cost.
This can be used for the development of the space environment
simulation and satellite components.
This model is the best for R&D in University/Research institute.
The process can be very quick and it requires only a small amount of powder so you can try many different things in a short time at low cost.
PEEM is an electron microscope that detects photoelectrons emitted from a sample by irradiating short wavelength light such as ultraviolet light.
2 dimensions mapping can be performed in real time to see the status of the electron (work function) on the surface of the sample.
This is a film deposition system that utilizes the sputtering phenomenon in which Ar ions collide with the target under plasma discharge, and the target material ejected by the collision are deposited on the substrate as a film.
As a related matter, we also introduce Annealing equipment to enhance the quality of the film after the deposition process.
Desk-Top model as a low end model and it can select the deposition direction.
Expandable Dual-cathode slim tower
Dual cathode model with glove box. Auto-matcher is standard.
Triple cathode, substrate heating MAX800 ℃, film thickness distribution ± 3%
Triple cathode, substrate heating up to Max.800℃, film thickness distribution ±3%, Expandable type.
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
This equipment is the system suitable for laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.
As a related matter, we also introduce Annealing equipment to enhance the quality of the film after the deposition process.
Desk-Top model, an entry-model
This model is capable of depositing all over the surface for both powder and solid particles.
Desk-top ALD with Glove Box, Deposition to the powder possible
Deposition direction, glove box and LL chamber can be selected.
Expandable Model. Deposition direction selectable.
Substrate Heating up to 800℃
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
This is the model to evaporate metals onto substrates.
This is a vacuum evaporation system for the deposition of metal films and oxide films.
High-temperature heat treatment and gas replacement for substrates are possible. SAN2000Plus is capable of plasma processing.
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
This model is the substrate transfer arm to be responsible for the Load Lock function and substrate transfer.
This is the space-saving automated substrate transfer arm which can connect with 3 plus series.
This model is the atmosphere controlled furnace heating up samples placed within a quartz furnace tube.
Precise temperature control, pressure control, water vapor introduction and rapid cooling are possible.
This can be used for the development of the space environment
simulation and satellite components.
Various introduction ports.
This equipment is used to remove the thin film which is not masked.
Chemicals, H2O and Nitrogen are introduced by the spray.
Recipes can be created.
Necessary parts for vacuum equipment and vacuum fixture are available.
This valve corresponds to in-house produced isolation valves; NW25 and NW40.
It can be fabricated in either stainless steel or aluminum.
VG/VF as vacuum flange (JIS Standard) are available as our in-house products.
Pipe and joint are welded with a vacuum flange.
A special order is also available.
It transmits the engine power to the generator and pump.
It is used for the counter and the pump unit and transmit the engine rotation power to the pump.
It is mainly used for the spindle front drive and transmit the engine rotation power to the generator.
This crane was developed for the vessel.
There are three types of Shellooks (300, 500,500A)which can be used for small vessels,etc.
This is the hoisting machine and winch for the hoisting work.
This is the best for the hoisting part of light capacity crane to save the hoisting work.
This model is mainly used to dredge scallops and sea cucumbers from the bottom of the sea.
The labor work of the net lifting can be saved and custom-made machine as well as the steel and aluminum is also possible.
It is made of rust-resistant SUS.
We assure you of the solid power transmission.。
This 5V pulley is readily available from stock.
This 5V pulley is readily available from stock.
Stepped pulley and 3V,5V,8V, A,B,C are available.
It can be provided corresponding to various engines.
There are an abundant line-up products corresponding to each types of hoisting.
We have an abundant line-up.
A warping drum can be manufactured by either Casting or Aluminum.
A hoisting drum can be manufactured fromφ250to φ800mm
using FC250, FC300 or FC3%Cr.
This drum is used for the hoisting. Contact us for further information.
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