Test example of deposition
We would like to share with you the result of Al2O3 deposition on φ300μm Ti beads using SAL1000B, desk-top type ALD system for deposition on powder.
The recipes for the deposition test were prepared as follows.
- Equipment: SAL1000B
- Substrate rotation：On
- Vibration: On
- A device angle: About 8 degrees
- Substrate temperature: 350℃
- Sample size: φ300μm Ti beads
- H2O open time: 15 msec
- Wait time after H2O: 15 sec
- Wait time after TMA: 15 sec
- Wait time after TMA: 10 sec
- Number of repetitions: 1500 cycles
Before film formation
After film formation
In this video, the stirring conditions before deposition on φ300μm Ti beads with SAL1000B can be seen.
Deposition test will be available as well.
For further information on the kinds of deposition, please feel free to contact us.
