This time, we interviewed Professor Tamotsu Hashizume who has installed Suga’s ALD system.

More than 10 years ago, Professor Hashizume installed Suga ALD for fabrication and characterization of semiconductor devices, particularly for GaN power transistors. To deposit high-quality insulator films on semiconductor surfaces, his students and coworkers from companies frequently use the ALD system.

We received feedback on the actual experience on using our ALD system, how it differs from other company’s equipment and its advantages, so please take a look at this article if you are a researcher or university official currently considering obtaining this kind of equipment.

――What problems did you have before you installed ALD system from us?

First, I used an imported ALD equipment because there were few domestic ALD systems commercially available.  

However, the imported ALD often broke down, and it took very long time to be repaired. This was a severe obstacle to our research activities. 

――What prompted you to install ALD system from us?

Before the ALD system was installed, another device from SUGA was used at the research center.

Before the ALD system was installed, we used some equipments provided by SUGA. Then we were well aware of the company’s sincere response to some kinds of our requirements. In this regard, we decided to install the ALD system from SUGA.

――What are the advantages of installing ALD system from us?

The SUGA ALD has excellent operation stability, leading to a steady progress of experiments. This is very important for our research plan.  

SUGA quickly respond to our requirements for repairs of equipments. 

In addition, it is very nice for us that SUGA can customize equipments according to the purpose of our research and development. 

Researchers often have desires for modifications depending on the purpose of their research.

They are flexible and responsive to the needs of the people who use it.

It is very much appreciated.

――What do you think ALD systems will help us within our lives in the future?

ALD systems are characterized by the ability to produce a variety of films evenly, even on complex shapes.

The advantage of the ALD process is to uniformly deposit various kinds of films even on complex-shape objects, leading to an application for surface coating technology.

As an example, what about ‘dentures’?

Dentures are coated with several layers to prevent them from being damaged by various acids and chemical reactions.

I think that the  surface coating technology using ALD is effective to develop new products in the  industrial society. 

It could be used in many other places.

Introduction of SUGA’s ALD system.

The ALD system installed at Research Center for Integrated Quantum Electronics, Hokkaido University is the predecessor to the SAL3000, which is currently on the market.

In addition to this system, there are six other types of ALD systems are available.

For more information on ALD system products, Click here.

Summary

As a case study, Designated Professor Hashizume gave us a first-hand account of the actual use of our ALD system.

Unlike foreign products, they are less likely to break down and, if they do, they can be repaired quickly.

Furthermore, the ability to consult on customization depending on the purpose of the research was highly appreciated.

To ensure that you are satisfied with the product even after purchase, we are committed to meeting the various requirements of our customers.

We hope you find this is informative and educational if you have a plan to obtain this kind of equipment.

For further inquiries, please contact us at below.