We have released our latest video on the official AGUS YouTube channel!
In this video, we focus on “Mechanics and Selection of Vacuum Chambers.”
In the semiconductor field, where ultra-precise nano-level processing is required, a vacuum environment is essential to eliminate fine dust and moisture from the air. We provide a clear, practical overview of everything from the fundamental reasons why a vacuum is required to structures that maintain high vacuum levels and key points for selection.
[Key Highlights]
- Roles of Vacuum Chambers (Application examples in CVD, sputtering, etching, EUV exposure, etc.)
- Mechanisms to Maintain High Vacuum (Differences in sealing structures between O-rings and metal gaskets)
- 5 Key Selection Criteria (Ultimate vacuum level, airtightness, durability, dimensions, and materials such as stainless steel and aluminum)
At Suga Co., Ltd., we design and manufacture both stainless steel and aluminum vacuum chambers. If you are considering R&D or equipment installation, please feel free to contact us!
