We have released our latest video on the official AGUS YouTube channel!
In this video, we focus on “Maintenance Methods for Sputtering Systems.”
Proper maintenance is essential for achieving high-quality thin-film deposition and ensuring the long-term stable operation of your equipment. We provide a clear, practical Q&A overview of key inspection and cleaning procedures you can use on-site.
[Key Highlights]
- 3 Main Objectives of Maintenance (Extending equipment lifespan, ensuring repeatability, etc.)
- 4 Essential Areas to Clean & Service (Pumps, chamber interior, shield plates)
- Safety Precautions & Troubleshooting Steps for Discharge Issues
- Daily vs. Periodic Inspection Checklists
If you want to prevent common issues like slow vacuum pump-down times or abnormal discharging, this video offers the actionable insights you need. Check it out to keep your system performing at its best!





