製品一覧

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  SSP1000

  Desk－Top model as a low end model and it can select the deposition direction.

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  SSP2000Plus

  Expandable Dual-cathode slim tower

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  SSP2500G

  Dual cathode model with glove box. Auto-matcher is standard.

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  SSP3000

  Triple cathode, substrate heating MAX800 ℃, film thickness distribution ± 3%

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  SSP3000Plus

  Triple cathode,　substrate heating up to Max.800℃, film thickness distribution ±3%, Expandable type.

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  SAL1000

  Desk-Top model, an entry-model

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  SAL1000B

  This model is capable of depositing all over the surface for both powder and solid particles.

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  SAL1000G

  Desk-top ALD with Glove Box, Deposition to the powder possible

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  SAL3000

  Deposition direction, glove box and LL chamber can be selected.

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  SAL3000Plus

  Expandable Model. Deposition direction selectable.
  Substrate Heating up to 800℃
  

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