Test example of deposition
We introduce the result of Al2O3 deposition on φ45μm Ni powder using SAL1000B, desk-top type ALD system for deposition on powder.
The recipes for the deposition test were set as follows.
- Equipment: SAL1000B
- Substrate rotation：On
- Vibration: On
- A device angle: About 8 degrees
- Substrate temperature: 350℃
- Sample size: φ45μm Ni powder
- H2O open time: 15 msec
- Wait time after H2O: 15 sec
- TMA open time: 15 msec
- Wait time after TMA: 5 sec
- Number of repetitions: 1500 cycles
The number of repetitions is 1500 cycles, so we consider that about 165 nm of Al2O3 has been deposited.
Normal
AGUS offers a test deposition service.
If you are interested in what kind of deposition can be achieved with the SAL1000B, please feel free to contact AGUS
