SSP2500G
Dual cathode model with glove box. Auto-matcher is standard.
製品一覧
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SSP3000
Triple cathode, substrate heating MAX800 ℃, film thickness distribution ± 3%
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SSP3000Plus
Triple cathode, substrate heating up to Max.800℃, film thickness distribution ±3%, Expandable type.
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SAL1000
Desk-Top model, an entry-model
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SAL1000B
This model is capable of depositing all over the surface for both powder and solid particles.
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SAL1000G
Desk-top ALD with Glove Box, Deposition to the powder possible
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SAL3000
Deposition direction, glove box and LL chamber can be selected.
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SAL3000Plus
Expandable Model. Deposition direction selectable.
Substrate Heating up to 800℃
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MMC-Electromagnetic Clutch
It is used for the counter and the pump unit and transmit the engine rotation power to the pump.
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Air Clutch
It is mainly used for the spindle front drive and transmit the engine rotation power to the generator.