STR2000
This is the space-saving automated substrate transfer arm which can connect with 3 plus series.
製品一覧
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SAF3000
Precise temperature control, pressure control, water vapor introduction and rapid cooling are possible.
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Space Chamber -Φ1m-
Various introduction ports.
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SWE1000
Chemicals, H2O and Nitrogen are introduced by the spray.
Recipes can be created.
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Electromagnetic Rotary Pump Valve
This valve corresponds to in-house produced isolation valves; NW25 and NW40.
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Vacuum Chamber
It can be fabricated in either stainless steel or aluminum.
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JIS Vacuum Flange
VG/VF as vacuum flange (JIS Standard) are available as our in-house products.
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Vacuum Joint
Pipe and joint are welded with a vacuum flange.
A special order is also available.