SPS2000
This model is the best for R&D in University/Research institute.
The process can be very quick and it requires only a small amount of powder so you can try many different things in a short time at low cost.
Products
This is a film deposition system that utilizes the sputtering phenomenon in which Ar ions collide with the target under plasma discharge, and the target material ejected by the collision are deposited on the substrate as a film.
As a related matter, we also introduce Annealing equipment to enhance the quality of the film after the deposition process.
Advanced Material Development System
Material Synthesis System
Spark Plasma Sintering System（SPS）
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Laboratory Use Equipment
Vacuum Equipment
Photo Emission Electron Microscopy (PEEM)
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PEEM is an electron microscope that detects photoelectrons emitted from a sample by irradiating short wavelength light such as ultraviolet light.
MyPEEM
2 dimensions mapping can be performed in real time to see the status of the electron (work function) on the surface of the sample.
Sputtering Equipment
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This is a film deposition system that utilizes the sputtering phenomenon in which Ar ions collide with the target under plasma discharge, and the target material ejected by the collision are deposited on the substrate as a film.
As a related matter, we also introduce Annealing equipment to enhance the quality of the film after the deposition process.
SSP1000
Desk－Top model as a low end model and it can select the deposition direction.
SSP2000Plus
Expandable Dual-cathode slim tower
SSP2500G
Dual cathode model with glove box. Auto-matcher is standard.
SSP3000
Triple cathode, substrate heating MAX800 ℃, film thickness distribution ± 3%
SSP3000Plus
Triple cathode, substrate heating up to Max.800℃, film thickness distribution ±3%, Expandable type.
SAN1000
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
SAN2000Plus
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
ALD Equipment
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This equipment is the system suitable for laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.
As a related matter, we also introduce Annealing equipment to enhance the quality of the film after the deposition process.
SAL1000
Desk-Top model, an entry-model
SAL1000B
This model is capable of depositing all over the surface for both powder and solid particles.
SAL1000G
Desk-top ALD with Glove Box, Deposition to the powder possible
SAL3000
Deposition direction, glove box and LL chamber can be selected.
SAL3000Plus
Expandable Model. Deposition direction selectable.
Substrate Heating up to 800℃
SAN1000
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
SAN2000Plus
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
Evaporation system
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This is the model to evaporate metals onto substrates.
SEV2000Plus
This is a vacuum evaporation system for the deposition of metal films and oxide films.
Annealer
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High-temperature heat treatment and gas replacement for substrates are possible. SAN2000Plus is capable of plasma processing.
SAN1000
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
SAN2000Plus
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
Transfer Unit
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This model is the substrate transfer arm to be responsible for the Load Lock function and substrate transfer.
STR2000
This is the space-saving automated substrate transfer arm which can connect with 3 plus series.
Furnace
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This model is the atmosphere controlled furnace heating up samples placed within a quartz furnace tube.
SAF3000
Precise temperature control, pressure control, water vapor introduction and rapid cooling are possible.
Space Chamber
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This can be used for the development of the space environment
simulation and satellite components.
Space Chamber -Φ1m-
Various introduction ports.
Other Equipment
Wet Etching Equipment
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This equipment is used to remove the thin film which is not masked.
SWE1000
Chemicals, H2O and Nitrogen are introduced by the spray.
Recipes can be created.
Vacuum device
Vacuum Piping Parts
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Necessary parts for vacuum equipment and vacuum fixture are available.
Electromagnetic Rotary Pump Valve
This valve corresponds to in-house produced isolation valves; NW25 and NW40.
Vacuum Chamber
It can be fabricated in either stainless steel or aluminum.
JIS Vacuum Flange
VG/VF as vacuum flange (JIS Standard) are available as our in-house products.
Vacuum Joint
Pipe and joint are welded with a vacuum flange.
A special order is also available.
Marine Equipment
System device
Clutch for the ship
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It transmits the engine power to the generator and pump.
MMC-Electromagnetic Clutch
It is used for the counter and the pump unit and transmit the engine rotation power to the pump.
Air Clutch
It is mainly used for the spindle front drive and transmit the engine rotation power to the generator.
Hydraulic Crane
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This crane was developed for the vessel.
Shellook
There are three types of Shellooks (300, 500,500A)which can be used for small vessels,etc.
Hydraulic Fishing Machine
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This is the hoisting machine and winch for the hoisting work.
Hoist
This is the best for the hoisting part of light capacity crane to save the hoisting work.
Winch for Dredge Net
This model is mainly used to dredge scallops and sea cucumbers from the bottom of the sea.
Net Hauler
The labor work of the net lifting can be saved and custom-made machine as well as the steel and aluminum is also possible.
SUS Steel Net Hauler
It is made of rust-resistant SUS.
Component
Pulley, Pulley Adaptor
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We assure you of the solid power transmission.。
Standard 5V Pulley
This 5V pulley is readily available from stock.
Pulley Adaptor
This 5V pulley is readily available from stock.
Special pulley
Stepped pulley and 3V,5V,8V, A,B,C are available.
Front Pulley
It can be provided corresponding to various engines.
Drum
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There are an abundant line-up products corresponding to each types of hoisting.
Warping Drum
We have an abundant line-up.
A warping drum can be manufactured by either Casting or Aluminum.
Hoisting Drum
A hoisting drum can be manufactured fromφ250to φ800mm
using FC250, FC300 or FC3%Cr.
Bucket Type SUS Drum
This drum is used for the hoisting. Contact us for further information.