SAL1000
Desk-Top model, an entry-model
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This equipment is the system suitable for laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.
As a related matter, we also introduce Annealing equipment to enhance the quality of the film after the deposition process.
Desk-Top model, an entry-model
This model is capable of depositing all over the surface for both powder and solid particles.
Desk-top ALD with Glove Box, Deposition to the powder possible
Deposition direction, glove box and LL chamber can be selected.
Expandable Model. Deposition direction selectable.
Substrate Heating up to 800℃
Pressure control during heat treatment (annealing) to the substrate and heat treatment by introducing inert gas is possible.
The temperature control of Max.1000deg.C is achievable and RF power source can be equipped with and the combination with other systems can be possible.
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